9/22/2010	10:39:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2010	10:39:54 AM	Recipe started at 10:39 AM
9/22/2010	10:39:54 AM	H2 valve closed
9/22/2010	10:39:54 AM	BCl3 valve closed
9/22/2010	10:39:54 AM	PH3 valve closed
9/22/2010	10:39:54 AM	SiCl4 pre valve closed
9/22/2010	10:39:54 AM	SiCl4 post valve closed
9/22/2010	10:39:54 AM	Main Vac valve closed
9/22/2010	10:39:54 AM	Bypass valve closed
9/22/2010	10:39:54 AM	Bubbler valve closed
9/22/2010	10:39:54 AM	Helium valve opened
9/22/2010	10:39:54 AM	Helium MFC set to  500.000000
9/22/2010	10:39:54 AM	H2 MFC set to  0.000000
9/22/2010	10:39:54 AM	BCl3 MFC set to  0.000000
9/22/2010	10:39:54 AM	PHl3 MFC set to  0.000000
9/22/2010	10:39:54 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:39:54 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:39:55 AM	Tube furnace set to 0
9/22/2010	10:41:14 AM	Helium valve closed
9/22/2010	10:41:14 AM	H2 valve closed
9/22/2010	10:41:14 AM	BCl3 valve closed
9/22/2010	10:41:14 AM	PH3 valve closed
9/22/2010	10:41:14 AM	SiCl4 pre valve closed
9/22/2010	10:41:14 AM	SiCl4 post valve closed
9/22/2010	10:41:14 AM	Main Vac valve closed
9/22/2010	10:41:14 AM	Bypass valve closed
9/22/2010	10:41:14 AM	Bubbler valve closed
9/22/2010	10:41:14 AM	Helium MFC set to  0.000000
9/22/2010	10:41:14 AM	H2 MFC set to  0.000000
9/22/2010	10:41:14 AM	BCl3 MFC set to  0.000000
9/22/2010	10:41:14 AM	PHl3 MFC set to  0.000000
9/22/2010	10:41:14 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:41:14 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:41:14 AM	Tube furnace set to 0
9/22/2010	10:41:14 AM	Run finished at 10:41 AM
9/22/2010	10:41:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2010	10:55:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	10:55:16 AM	Recipe started at 10:55 AM
9/22/2010	10:55:16 AM	Helium valve closed
9/22/2010	10:55:16 AM	H2 valve closed
9/22/2010	10:55:16 AM	BCl3 valve closed
9/22/2010	10:55:16 AM	PH3 valve closed
9/22/2010	10:55:16 AM	SiCl4 pre valve closed
9/22/2010	10:55:16 AM	SiCl4 post valve closed
9/22/2010	10:55:16 AM	Main Vac valve closed
9/22/2010	10:55:16 AM	Bubbler valve closed
9/22/2010	10:55:16 AM	Bypass valve opened
9/22/2010	10:55:16 AM	Helium MFC set to  0.000000
9/22/2010	10:55:16 AM	H2 MFC set to  0.000000
9/22/2010	10:55:16 AM	BCl3 MFC set to  0.000000
9/22/2010	10:55:16 AM	PHl3 MFC set to  0.000000
9/22/2010	10:55:16 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:55:16 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:55:16 AM	Tube furnace set to 0
9/22/2010	10:56:04 AM	Run aborted at 10:56 AM
9/22/2010	10:56:04 AM	Helium valve closed
9/22/2010	10:56:04 AM	H2 valve closed
9/22/2010	10:56:04 AM	BCl3 valve closed
9/22/2010	10:56:04 AM	PH3 valve closed
9/22/2010	10:56:04 AM	SiCl4 pre valve closed
9/22/2010	10:56:04 AM	SiCl4 post valve closed
9/22/2010	10:56:04 AM	Bypass valve closed
9/22/2010	10:56:04 AM	Main Vac valve closed
9/22/2010	10:56:04 AM	Bubbler valve closed
9/22/2010	10:56:04 AM	Helium MFC set to  0.000000
9/22/2010	10:56:04 AM	H2 MFC set to  0.000000
9/22/2010	10:56:04 AM	BCl3 MFC set to  0.000000
9/22/2010	10:56:04 AM	PHl3 MFC set to  0.000000
9/22/2010	10:56:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:56:04 AM	Tube furnace set to 0
9/22/2010	10:56:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	10:56:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2010	10:56:08 AM	Recipe started at 10:56 AM
9/22/2010	10:56:08 AM	H2 valve closed
9/22/2010	10:56:08 AM	BCl3 valve closed
9/22/2010	10:56:08 AM	PH3 valve closed
9/22/2010	10:56:08 AM	SiCl4 pre valve closed
9/22/2010	10:56:08 AM	SiCl4 post valve closed
9/22/2010	10:56:08 AM	Main Vac valve closed
9/22/2010	10:56:08 AM	Bypass valve closed
9/22/2010	10:56:08 AM	Bubbler valve closed
9/22/2010	10:56:09 AM	Helium valve opened
9/22/2010	10:56:09 AM	Helium MFC set to  500.000000
9/22/2010	10:56:09 AM	H2 MFC set to  0.000000
9/22/2010	10:56:09 AM	BCl3 MFC set to  0.000000
9/22/2010	10:56:09 AM	PHl3 MFC set to  0.000000
9/22/2010	10:56:09 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:56:09 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:56:09 AM	Tube furnace set to 0
9/22/2010	10:56:14 AM	Helium valve closed
9/22/2010	10:56:14 AM	H2 valve closed
9/22/2010	10:56:14 AM	BCl3 valve closed
9/22/2010	10:56:14 AM	PH3 valve closed
9/22/2010	10:56:14 AM	SiCl4 pre valve closed
9/22/2010	10:56:14 AM	SiCl4 post valve closed
9/22/2010	10:56:14 AM	Main Vac valve closed
9/22/2010	10:56:14 AM	Bypass valve closed
9/22/2010	10:56:14 AM	Bubbler valve closed
9/22/2010	10:56:14 AM	Helium MFC set to  0.000000
9/22/2010	10:56:14 AM	H2 MFC set to  0.000000
9/22/2010	10:56:14 AM	BCl3 MFC set to  0.000000
9/22/2010	10:56:14 AM	PHl3 MFC set to  0.000000
9/22/2010	10:56:14 AM	SiCl4 MFC set to  0.000000
9/22/2010	10:56:14 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:56:14 AM	Tube furnace set to 0
9/22/2010	10:56:14 AM	Run finished at 10:56 AM
9/22/2010	10:56:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2010	11:00:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	11:00:13 AM	Recipe started at 11:00 AM
9/22/2010	11:00:13 AM	Helium valve closed
9/22/2010	11:00:13 AM	H2 valve closed
9/22/2010	11:00:13 AM	BCl3 valve closed
9/22/2010	11:00:13 AM	PH3 valve closed
9/22/2010	11:00:13 AM	SiCl4 pre valve closed
9/22/2010	11:00:13 AM	SiCl4 post valve closed
9/22/2010	11:00:13 AM	Main Vac valve closed
9/22/2010	11:00:13 AM	Bubbler valve closed
9/22/2010	11:00:13 AM	Bypass valve opened
9/22/2010	11:00:13 AM	Helium MFC set to  0.000000
9/22/2010	11:00:13 AM	H2 MFC set to  0.000000
9/22/2010	11:00:13 AM	BCl3 MFC set to  0.000000
9/22/2010	11:00:13 AM	PHl3 MFC set to  0.000000
9/22/2010	11:00:13 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:00:13 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:00:13 AM	Tube furnace set to 0
9/22/2010	11:00:59 AM	Helium valve closed
9/22/2010	11:00:59 AM	H2 valve closed
9/22/2010	11:00:59 AM	BCl3 valve closed
9/22/2010	11:00:59 AM	PH3 valve closed
9/22/2010	11:00:59 AM	SiCl4 pre valve closed
9/22/2010	11:00:59 AM	SiCl4 post valve closed
9/22/2010	11:00:59 AM	Bubbler valve closed
9/22/2010	11:00:59 AM	Main Vac valve opened
9/22/2010	11:00:59 AM	Bypass valve opened
9/22/2010	11:00:59 AM	Helium MFC set to  0.000000
9/22/2010	11:00:59 AM	H2 MFC set to  0.000000
9/22/2010	11:00:59 AM	BCl3 MFC set to  0.000000
9/22/2010	11:00:59 AM	PHl3 MFC set to  0.000000
9/22/2010	11:00:59 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:00:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:00:59 AM	Tube furnace set to 0
9/22/2010	11:00:59 AM	Run finished at 11:00 AM
9/22/2010	11:00:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	11:03:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	11:03:18 AM	Recipe started at 11:03 AM
9/22/2010	11:03:18 AM	Helium valve closed
9/22/2010	11:03:18 AM	H2 valve closed
9/22/2010	11:03:18 AM	BCl3 valve closed
9/22/2010	11:03:18 AM	PH3 valve closed
9/22/2010	11:03:18 AM	SiCl4 pre valve closed
9/22/2010	11:03:18 AM	SiCl4 post valve closed
9/22/2010	11:03:18 AM	Main Vac valve closed
9/22/2010	11:03:18 AM	Bubbler valve closed
9/22/2010	11:03:18 AM	Bypass valve opened
9/22/2010	11:03:18 AM	Helium MFC set to  0.000000
9/22/2010	11:03:18 AM	H2 MFC set to  0.000000
9/22/2010	11:03:18 AM	BCl3 MFC set to  0.000000
9/22/2010	11:03:18 AM	PHl3 MFC set to  0.000000
9/22/2010	11:03:18 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:03:18 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:03:18 AM	Tube furnace set to 0
9/22/2010	11:03:18 AM	Helium valve closed
9/22/2010	11:03:18 AM	H2 valve closed
9/22/2010	11:03:18 AM	BCl3 valve closed
9/22/2010	11:03:18 AM	PH3 valve closed
9/22/2010	11:03:18 AM	SiCl4 pre valve closed
9/22/2010	11:03:18 AM	SiCl4 post valve closed
9/22/2010	11:03:18 AM	Bubbler valve closed
9/22/2010	11:03:18 AM	Main Vac valve opened
9/22/2010	11:03:18 AM	Bypass valve opened
9/22/2010	11:03:18 AM	Helium MFC set to  0.000000
9/22/2010	11:03:18 AM	H2 MFC set to  0.000000
9/22/2010	11:03:18 AM	BCl3 MFC set to  0.000000
9/22/2010	11:03:18 AM	PHl3 MFC set to  0.000000
9/22/2010	11:03:18 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:03:18 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:03:18 AM	Tube furnace set to 0
9/22/2010	11:04:19 AM	H2 valve closed
9/22/2010	11:04:19 AM	BCl3 valve closed
9/22/2010	11:04:19 AM	PH3 valve closed
9/22/2010	11:04:19 AM	SiCl4 pre valve closed
9/22/2010	11:04:19 AM	SiCl4 post valve closed
9/22/2010	11:04:19 AM	Bubbler valve closed
9/22/2010	11:04:19 AM	Helium valve opened
9/22/2010	11:04:19 AM	Main Vac valve opened
9/22/2010	11:04:19 AM	Bypass valve opened
9/22/2010	11:04:19 AM	Helium MFC set to  100.000000
9/22/2010	11:04:19 AM	H2 MFC set to  0.000000
9/22/2010	11:04:19 AM	BCl3 MFC set to  0.000000
9/22/2010	11:04:19 AM	PHl3 MFC set to  0.000000
9/22/2010	11:04:19 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:04:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:04:19 AM	Tube furnace set to 0
9/22/2010	11:05:19 AM	Helium valve closed
9/22/2010	11:05:19 AM	H2 valve closed
9/22/2010	11:05:19 AM	BCl3 valve closed
9/22/2010	11:05:19 AM	PH3 valve closed
9/22/2010	11:05:19 AM	SiCl4 pre valve closed
9/22/2010	11:05:19 AM	SiCl4 post valve closed
9/22/2010	11:05:19 AM	Bubbler valve closed
9/22/2010	11:05:19 AM	Main Vac valve opened
9/22/2010	11:05:19 AM	Bypass valve opened
9/22/2010	11:05:19 AM	Helium MFC set to  0.000000
9/22/2010	11:05:19 AM	H2 MFC set to  0.000000
9/22/2010	11:05:19 AM	BCl3 MFC set to  0.000000
9/22/2010	11:05:19 AM	PHl3 MFC set to  0.000000
9/22/2010	11:05:19 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:05:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:05:19 AM	Tube furnace set to 0
9/22/2010	11:06:19 AM	H2 valve closed
9/22/2010	11:06:19 AM	BCl3 valve closed
9/22/2010	11:06:19 AM	PH3 valve closed
9/22/2010	11:06:19 AM	SiCl4 pre valve closed
9/22/2010	11:06:19 AM	SiCl4 post valve closed
9/22/2010	11:06:19 AM	Bubbler valve closed
9/22/2010	11:06:19 AM	Helium valve opened
9/22/2010	11:06:19 AM	Main Vac valve opened
9/22/2010	11:06:19 AM	Bypass valve opened
9/22/2010	11:06:19 AM	Helium MFC set to  100.000000
9/22/2010	11:06:19 AM	H2 MFC set to  0.000000
9/22/2010	11:06:19 AM	BCl3 MFC set to  0.000000
9/22/2010	11:06:19 AM	PHl3 MFC set to  0.000000
9/22/2010	11:06:19 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:06:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:06:19 AM	Tube furnace set to 0
9/22/2010	11:07:19 AM	Helium valve closed
9/22/2010	11:07:19 AM	H2 valve closed
9/22/2010	11:07:19 AM	BCl3 valve closed
9/22/2010	11:07:19 AM	PH3 valve closed
9/22/2010	11:07:19 AM	SiCl4 pre valve closed
9/22/2010	11:07:19 AM	SiCl4 post valve closed
9/22/2010	11:07:19 AM	Bubbler valve closed
9/22/2010	11:07:19 AM	Main Vac valve opened
9/22/2010	11:07:19 AM	Bypass valve opened
9/22/2010	11:07:19 AM	Helium MFC set to  0.000000
9/22/2010	11:07:19 AM	H2 MFC set to  0.000000
9/22/2010	11:07:19 AM	BCl3 MFC set to  0.000000
9/22/2010	11:07:19 AM	PHl3 MFC set to  0.000000
9/22/2010	11:07:19 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:07:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:07:19 AM	Tube furnace set to 0
9/22/2010	11:08:19 AM	H2 valve closed
9/22/2010	11:08:19 AM	BCl3 valve closed
9/22/2010	11:08:19 AM	PH3 valve closed
9/22/2010	11:08:19 AM	SiCl4 pre valve closed
9/22/2010	11:08:19 AM	SiCl4 post valve closed
9/22/2010	11:08:19 AM	Bubbler valve closed
9/22/2010	11:08:19 AM	Helium valve opened
9/22/2010	11:08:19 AM	Main Vac valve opened
9/22/2010	11:08:19 AM	Bypass valve opened
9/22/2010	11:08:19 AM	Helium MFC set to  100.000000
9/22/2010	11:08:19 AM	H2 MFC set to  0.000000
9/22/2010	11:08:19 AM	BCl3 MFC set to  0.000000
9/22/2010	11:08:19 AM	PHl3 MFC set to  0.000000
9/22/2010	11:08:19 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:08:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:08:19 AM	Tube furnace set to 0
9/22/2010	11:09:19 AM	Helium valve closed
9/22/2010	11:09:19 AM	H2 valve closed
9/22/2010	11:09:20 AM	BCl3 valve closed
9/22/2010	11:09:20 AM	PH3 valve closed
9/22/2010	11:09:20 AM	SiCl4 pre valve closed
9/22/2010	11:09:20 AM	SiCl4 post valve closed
9/22/2010	11:09:20 AM	Bubbler valve closed
9/22/2010	11:09:20 AM	Main Vac valve opened
9/22/2010	11:09:20 AM	Bypass valve opened
9/22/2010	11:09:20 AM	Helium MFC set to  0.000000
9/22/2010	11:09:20 AM	H2 MFC set to  0.000000
9/22/2010	11:09:20 AM	BCl3 MFC set to  0.000000
9/22/2010	11:09:20 AM	PHl3 MFC set to  0.000000
9/22/2010	11:09:20 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:09:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:09:20 AM	Tube furnace set to 0
9/22/2010	11:10:20 AM	H2 valve closed
9/22/2010	11:10:20 AM	BCl3 valve closed
9/22/2010	11:10:20 AM	PH3 valve closed
9/22/2010	11:10:20 AM	SiCl4 pre valve closed
9/22/2010	11:10:20 AM	SiCl4 post valve closed
9/22/2010	11:10:20 AM	Bubbler valve closed
9/22/2010	11:10:20 AM	Helium valve opened
9/22/2010	11:10:20 AM	Main Vac valve opened
9/22/2010	11:10:20 AM	Bypass valve opened
9/22/2010	11:10:20 AM	Helium MFC set to  100.000000
9/22/2010	11:10:20 AM	H2 MFC set to  0.000000
9/22/2010	11:10:20 AM	BCl3 MFC set to  0.000000
9/22/2010	11:10:20 AM	PHl3 MFC set to  0.000000
9/22/2010	11:10:20 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:10:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:10:20 AM	Tube furnace set to 0
9/22/2010	11:11:20 AM	Helium valve closed
9/22/2010	11:11:20 AM	H2 valve closed
9/22/2010	11:11:20 AM	BCl3 valve closed
9/22/2010	11:11:20 AM	PH3 valve closed
9/22/2010	11:11:20 AM	SiCl4 pre valve closed
9/22/2010	11:11:20 AM	SiCl4 post valve closed
9/22/2010	11:11:20 AM	Bubbler valve closed
9/22/2010	11:11:20 AM	Main Vac valve opened
9/22/2010	11:11:20 AM	Bypass valve opened
9/22/2010	11:11:20 AM	Helium MFC set to  0.000000
9/22/2010	11:11:20 AM	H2 MFC set to  0.000000
9/22/2010	11:11:20 AM	BCl3 MFC set to  0.000000
9/22/2010	11:11:20 AM	PHl3 MFC set to  0.000000
9/22/2010	11:11:20 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:11:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:11:20 AM	Tube furnace set to 0
9/22/2010	11:12:20 AM	H2 valve closed
9/22/2010	11:12:20 AM	BCl3 valve closed
9/22/2010	11:12:20 AM	PH3 valve closed
9/22/2010	11:12:20 AM	SiCl4 pre valve closed
9/22/2010	11:12:20 AM	SiCl4 post valve closed
9/22/2010	11:12:20 AM	Bubbler valve closed
9/22/2010	11:12:20 AM	Helium valve opened
9/22/2010	11:12:20 AM	Main Vac valve opened
9/22/2010	11:12:20 AM	Bypass valve opened
9/22/2010	11:12:20 AM	Helium MFC set to  100.000000
9/22/2010	11:12:20 AM	H2 MFC set to  0.000000
9/22/2010	11:12:20 AM	BCl3 MFC set to  0.000000
9/22/2010	11:12:20 AM	PHl3 MFC set to  0.000000
9/22/2010	11:12:20 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:12:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:12:20 AM	Tube furnace set to 0
9/22/2010	11:13:20 AM	Helium valve closed
9/22/2010	11:13:20 AM	H2 valve closed
9/22/2010	11:13:20 AM	BCl3 valve closed
9/22/2010	11:13:20 AM	PH3 valve closed
9/22/2010	11:13:20 AM	SiCl4 pre valve closed
9/22/2010	11:13:20 AM	SiCl4 post valve closed
9/22/2010	11:13:20 AM	Bubbler valve closed
9/22/2010	11:13:20 AM	Main Vac valve opened
9/22/2010	11:13:20 AM	Bypass valve opened
9/22/2010	11:13:20 AM	Helium MFC set to  0.000000
9/22/2010	11:13:20 AM	H2 MFC set to  0.000000
9/22/2010	11:13:20 AM	BCl3 MFC set to  0.000000
9/22/2010	11:13:20 AM	PHl3 MFC set to  0.000000
9/22/2010	11:13:20 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:13:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:13:20 AM	Tube furnace set to 0
9/22/2010	11:14:20 AM	H2 valve closed
9/22/2010	11:14:20 AM	BCl3 valve closed
9/22/2010	11:14:20 AM	PH3 valve closed
9/22/2010	11:14:20 AM	SiCl4 pre valve closed
9/22/2010	11:14:20 AM	SiCl4 post valve closed
9/22/2010	11:14:20 AM	Bubbler valve closed
9/22/2010	11:14:20 AM	Helium valve opened
9/22/2010	11:14:20 AM	Main Vac valve opened
9/22/2010	11:14:20 AM	Bypass valve opened
9/22/2010	11:14:20 AM	Helium MFC set to  100.000000
9/22/2010	11:14:20 AM	H2 MFC set to  0.000000
9/22/2010	11:14:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:14:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:14:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:14:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:14:21 AM	Tube furnace set to 0
9/22/2010	11:15:21 AM	Helium valve closed
9/22/2010	11:15:21 AM	H2 valve closed
9/22/2010	11:15:21 AM	BCl3 valve closed
9/22/2010	11:15:21 AM	PH3 valve closed
9/22/2010	11:15:21 AM	SiCl4 pre valve closed
9/22/2010	11:15:21 AM	SiCl4 post valve closed
9/22/2010	11:15:21 AM	Bubbler valve closed
9/22/2010	11:15:21 AM	Main Vac valve opened
9/22/2010	11:15:21 AM	Bypass valve opened
9/22/2010	11:15:21 AM	Helium MFC set to  0.000000
9/22/2010	11:15:21 AM	H2 MFC set to  0.000000
9/22/2010	11:15:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:15:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:15:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:15:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:15:21 AM	Tube furnace set to 0
9/22/2010	11:16:21 AM	H2 valve closed
9/22/2010	11:16:21 AM	BCl3 valve closed
9/22/2010	11:16:21 AM	PH3 valve closed
9/22/2010	11:16:21 AM	SiCl4 pre valve closed
9/22/2010	11:16:21 AM	SiCl4 post valve closed
9/22/2010	11:16:21 AM	Bubbler valve closed
9/22/2010	11:16:21 AM	Helium valve opened
9/22/2010	11:16:21 AM	Main Vac valve opened
9/22/2010	11:16:21 AM	Bypass valve opened
9/22/2010	11:16:21 AM	Helium MFC set to  100.000000
9/22/2010	11:16:21 AM	H2 MFC set to  0.000000
9/22/2010	11:16:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:16:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:16:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:16:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:16:21 AM	Tube furnace set to 0
9/22/2010	11:17:21 AM	Helium valve closed
9/22/2010	11:17:21 AM	H2 valve closed
9/22/2010	11:17:21 AM	BCl3 valve closed
9/22/2010	11:17:21 AM	PH3 valve closed
9/22/2010	11:17:21 AM	SiCl4 pre valve closed
9/22/2010	11:17:21 AM	SiCl4 post valve closed
9/22/2010	11:17:21 AM	Bubbler valve closed
9/22/2010	11:17:21 AM	Main Vac valve opened
9/22/2010	11:17:21 AM	Bypass valve opened
9/22/2010	11:17:21 AM	Helium MFC set to  0.000000
9/22/2010	11:17:21 AM	H2 MFC set to  0.000000
9/22/2010	11:17:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:17:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:17:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:17:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:17:21 AM	Tube furnace set to 0
9/22/2010	11:18:21 AM	H2 valve closed
9/22/2010	11:18:21 AM	BCl3 valve closed
9/22/2010	11:18:21 AM	PH3 valve closed
9/22/2010	11:18:21 AM	SiCl4 pre valve closed
9/22/2010	11:18:21 AM	SiCl4 post valve closed
9/22/2010	11:18:21 AM	Bubbler valve closed
9/22/2010	11:18:21 AM	Helium valve opened
9/22/2010	11:18:21 AM	Main Vac valve opened
9/22/2010	11:18:21 AM	Bypass valve opened
9/22/2010	11:18:21 AM	Helium MFC set to  100.000000
9/22/2010	11:18:21 AM	H2 MFC set to  0.000000
9/22/2010	11:18:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:18:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:18:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:18:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:18:21 AM	Tube furnace set to 0
9/22/2010	11:19:21 AM	Helium valve closed
9/22/2010	11:19:21 AM	H2 valve closed
9/22/2010	11:19:21 AM	BCl3 valve closed
9/22/2010	11:19:21 AM	PH3 valve closed
9/22/2010	11:19:21 AM	SiCl4 pre valve closed
9/22/2010	11:19:21 AM	SiCl4 post valve closed
9/22/2010	11:19:21 AM	Bubbler valve closed
9/22/2010	11:19:21 AM	Main Vac valve opened
9/22/2010	11:19:21 AM	Bypass valve opened
9/22/2010	11:19:21 AM	Helium MFC set to  0.000000
9/22/2010	11:19:21 AM	H2 MFC set to  0.000000
9/22/2010	11:19:21 AM	BCl3 MFC set to  0.000000
9/22/2010	11:19:21 AM	PHl3 MFC set to  0.000000
9/22/2010	11:19:21 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:19:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:19:22 AM	Tube furnace set to 0
9/22/2010	11:20:22 AM	H2 valve closed
9/22/2010	11:20:22 AM	BCl3 valve closed
9/22/2010	11:20:22 AM	PH3 valve closed
9/22/2010	11:20:22 AM	SiCl4 pre valve closed
9/22/2010	11:20:22 AM	SiCl4 post valve closed
9/22/2010	11:20:22 AM	Bubbler valve closed
9/22/2010	11:20:22 AM	Helium valve opened
9/22/2010	11:20:22 AM	Main Vac valve opened
9/22/2010	11:20:22 AM	Bypass valve opened
9/22/2010	11:20:22 AM	Helium MFC set to  100.000000
9/22/2010	11:20:22 AM	H2 MFC set to  0.000000
9/22/2010	11:20:22 AM	BCl3 MFC set to  0.000000
9/22/2010	11:20:22 AM	PHl3 MFC set to  0.000000
9/22/2010	11:20:22 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:20:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:20:22 AM	Tube furnace set to 0
9/22/2010	11:21:22 AM	Helium valve closed
9/22/2010	11:21:22 AM	H2 valve closed
9/22/2010	11:21:22 AM	BCl3 valve closed
9/22/2010	11:21:22 AM	PH3 valve closed
9/22/2010	11:21:22 AM	SiCl4 pre valve closed
9/22/2010	11:21:22 AM	SiCl4 post valve closed
9/22/2010	11:21:22 AM	Bubbler valve closed
9/22/2010	11:21:22 AM	Main Vac valve opened
9/22/2010	11:21:22 AM	Bypass valve opened
9/22/2010	11:21:22 AM	Helium MFC set to  0.000000
9/22/2010	11:21:22 AM	H2 MFC set to  0.000000
9/22/2010	11:21:22 AM	BCl3 MFC set to  0.000000
9/22/2010	11:21:22 AM	PHl3 MFC set to  0.000000
9/22/2010	11:21:22 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:21:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:21:22 AM	Tube furnace set to 0
9/22/2010	11:22:22 AM	H2 valve closed
9/22/2010	11:22:22 AM	BCl3 valve closed
9/22/2010	11:22:22 AM	PH3 valve closed
9/22/2010	11:22:22 AM	SiCl4 pre valve closed
9/22/2010	11:22:22 AM	SiCl4 post valve closed
9/22/2010	11:22:22 AM	Bubbler valve closed
9/22/2010	11:22:22 AM	Helium valve opened
9/22/2010	11:22:22 AM	Main Vac valve opened
9/22/2010	11:22:22 AM	Bypass valve opened
9/22/2010	11:22:22 AM	Helium MFC set to  100.000000
9/22/2010	11:22:22 AM	H2 MFC set to  0.000000
9/22/2010	11:22:22 AM	BCl3 MFC set to  0.000000
9/22/2010	11:22:22 AM	PHl3 MFC set to  0.000000
9/22/2010	11:22:22 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:22:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:22:22 AM	Tube furnace set to 0
9/22/2010	11:23:22 AM	Helium valve closed
9/22/2010	11:23:22 AM	H2 valve closed
9/22/2010	11:23:22 AM	BCl3 valve closed
9/22/2010	11:23:22 AM	PH3 valve closed
9/22/2010	11:23:22 AM	SiCl4 pre valve closed
9/22/2010	11:23:22 AM	SiCl4 post valve closed
9/22/2010	11:23:22 AM	Bubbler valve closed
9/22/2010	11:23:22 AM	Main Vac valve opened
9/22/2010	11:23:22 AM	Bypass valve opened
9/22/2010	11:23:22 AM	Helium MFC set to  0.000000
9/22/2010	11:23:22 AM	H2 MFC set to  0.000000
9/22/2010	11:23:22 AM	BCl3 MFC set to  0.000000
9/22/2010	11:23:22 AM	PHl3 MFC set to  0.000000
9/22/2010	11:23:22 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:23:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:23:22 AM	Tube furnace set to 0
9/22/2010	11:23:23 AM	Run finished at 11:23 AM
9/22/2010	11:23:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	11:24:40 AM	Bypass valve closed
9/22/2010	11:24:40 AM	Main Vac valve closed
9/22/2010	11:24:59 AM	Bypass valve opened
9/22/2010	11:25:00 AM	Main Vac valve opened
9/22/2010	11:26:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	11:27:02 AM	Recipe started at 11:26 AM
9/22/2010	11:27:02 AM	Helium valve closed
9/22/2010	11:27:02 AM	H2 valve closed
9/22/2010	11:27:02 AM	BCl3 valve closed
9/22/2010	11:27:02 AM	PH3 valve closed
9/22/2010	11:27:02 AM	SiCl4 pre valve closed
9/22/2010	11:27:02 AM	SiCl4 post valve closed
9/22/2010	11:27:02 AM	Main Vac valve closed
9/22/2010	11:27:02 AM	Bubbler valve closed
9/22/2010	11:27:02 AM	Bypass valve opened
9/22/2010	11:27:02 AM	Helium MFC set to  0.000000
9/22/2010	11:27:02 AM	H2 MFC set to  0.000000
9/22/2010	11:27:02 AM	BCl3 MFC set to  0.000000
9/22/2010	11:27:02 AM	PHl3 MFC set to  0.000000
9/22/2010	11:27:02 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:27:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:27:03 AM	Tube furnace set to 0
9/22/2010	11:27:03 AM	Helium valve closed
9/22/2010	11:27:03 AM	H2 valve closed
9/22/2010	11:27:03 AM	BCl3 valve closed
9/22/2010	11:27:03 AM	PH3 valve closed
9/22/2010	11:27:03 AM	SiCl4 pre valve closed
9/22/2010	11:27:03 AM	SiCl4 post valve closed
9/22/2010	11:27:03 AM	Bubbler valve closed
9/22/2010	11:27:03 AM	Main Vac valve opened
9/22/2010	11:27:03 AM	Bypass valve opened
9/22/2010	11:27:03 AM	Helium MFC set to  0.000000
9/22/2010	11:27:03 AM	H2 MFC set to  0.000000
9/22/2010	11:27:03 AM	BCl3 MFC set to  0.000000
9/22/2010	11:27:03 AM	PHl3 MFC set to  0.000000
9/22/2010	11:27:03 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:27:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:27:03 AM	Tube furnace set to 0
9/22/2010	11:28:03 AM	H2 valve closed
9/22/2010	11:28:03 AM	BCl3 valve closed
9/22/2010	11:28:03 AM	PH3 valve closed
9/22/2010	11:28:03 AM	SiCl4 pre valve closed
9/22/2010	11:28:03 AM	SiCl4 post valve closed
9/22/2010	11:28:03 AM	Bubbler valve closed
9/22/2010	11:28:03 AM	Helium valve opened
9/22/2010	11:28:03 AM	Main Vac valve opened
9/22/2010	11:28:03 AM	Bypass valve opened
9/22/2010	11:28:03 AM	Helium MFC set to  100.000000
9/22/2010	11:28:03 AM	H2 MFC set to  0.000000
9/22/2010	11:28:03 AM	BCl3 MFC set to  0.000000
9/22/2010	11:28:03 AM	PHl3 MFC set to  0.000000
9/22/2010	11:28:03 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:28:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:28:03 AM	Tube furnace set to 0
9/22/2010	11:29:03 AM	Helium valve closed
9/22/2010	11:29:03 AM	H2 valve closed
9/22/2010	11:29:03 AM	BCl3 valve closed
9/22/2010	11:29:03 AM	PH3 valve closed
9/22/2010	11:29:03 AM	SiCl4 pre valve closed
9/22/2010	11:29:03 AM	SiCl4 post valve closed
9/22/2010	11:29:03 AM	Bubbler valve closed
9/22/2010	11:29:03 AM	Main Vac valve opened
9/22/2010	11:29:03 AM	Bypass valve opened
9/22/2010	11:29:03 AM	Helium MFC set to  0.000000
9/22/2010	11:29:03 AM	H2 MFC set to  0.000000
9/22/2010	11:29:03 AM	BCl3 MFC set to  0.000000
9/22/2010	11:29:03 AM	PHl3 MFC set to  0.000000
9/22/2010	11:29:03 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:29:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:29:03 AM	Tube furnace set to 0
9/22/2010	11:30:03 AM	H2 valve closed
9/22/2010	11:30:03 AM	BCl3 valve closed
9/22/2010	11:30:03 AM	PH3 valve closed
9/22/2010	11:30:03 AM	SiCl4 pre valve closed
9/22/2010	11:30:03 AM	SiCl4 post valve closed
9/22/2010	11:30:03 AM	Bubbler valve closed
9/22/2010	11:30:03 AM	Helium valve opened
9/22/2010	11:30:03 AM	Main Vac valve opened
9/22/2010	11:30:03 AM	Bypass valve opened
9/22/2010	11:30:03 AM	Helium MFC set to  100.000000
9/22/2010	11:30:03 AM	H2 MFC set to  0.000000
9/22/2010	11:30:03 AM	BCl3 MFC set to  0.000000
9/22/2010	11:30:03 AM	PHl3 MFC set to  0.000000
9/22/2010	11:30:03 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:30:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:30:04 AM	Tube furnace set to 0
9/22/2010	11:31:04 AM	Helium valve closed
9/22/2010	11:31:04 AM	H2 valve closed
9/22/2010	11:31:04 AM	BCl3 valve closed
9/22/2010	11:31:04 AM	PH3 valve closed
9/22/2010	11:31:04 AM	SiCl4 pre valve closed
9/22/2010	11:31:04 AM	SiCl4 post valve closed
9/22/2010	11:31:04 AM	Bubbler valve closed
9/22/2010	11:31:04 AM	Main Vac valve opened
9/22/2010	11:31:04 AM	Bypass valve opened
9/22/2010	11:31:04 AM	Helium MFC set to  0.000000
9/22/2010	11:31:04 AM	H2 MFC set to  0.000000
9/22/2010	11:31:04 AM	BCl3 MFC set to  0.000000
9/22/2010	11:31:04 AM	PHl3 MFC set to  0.000000
9/22/2010	11:31:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:31:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:31:04 AM	Tube furnace set to 0
9/22/2010	11:32:04 AM	H2 valve closed
9/22/2010	11:32:04 AM	BCl3 valve closed
9/22/2010	11:32:04 AM	PH3 valve closed
9/22/2010	11:32:04 AM	SiCl4 pre valve closed
9/22/2010	11:32:04 AM	SiCl4 post valve closed
9/22/2010	11:32:04 AM	Bubbler valve closed
9/22/2010	11:32:04 AM	Helium valve opened
9/22/2010	11:32:04 AM	Main Vac valve opened
9/22/2010	11:32:04 AM	Bypass valve opened
9/22/2010	11:32:04 AM	Helium MFC set to  100.000000
9/22/2010	11:32:04 AM	H2 MFC set to  0.000000
9/22/2010	11:32:04 AM	BCl3 MFC set to  0.000000
9/22/2010	11:32:04 AM	PHl3 MFC set to  0.000000
9/22/2010	11:32:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:32:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:32:04 AM	Tube furnace set to 0
9/22/2010	11:33:04 AM	Helium valve closed
9/22/2010	11:33:04 AM	H2 valve closed
9/22/2010	11:33:04 AM	BCl3 valve closed
9/22/2010	11:33:04 AM	PH3 valve closed
9/22/2010	11:33:04 AM	SiCl4 pre valve closed
9/22/2010	11:33:04 AM	SiCl4 post valve closed
9/22/2010	11:33:04 AM	Bubbler valve closed
9/22/2010	11:33:04 AM	Main Vac valve opened
9/22/2010	11:33:04 AM	Bypass valve opened
9/22/2010	11:33:04 AM	Helium MFC set to  0.000000
9/22/2010	11:33:04 AM	H2 MFC set to  0.000000
9/22/2010	11:33:04 AM	BCl3 MFC set to  0.000000
9/22/2010	11:33:04 AM	PHl3 MFC set to  0.000000
9/22/2010	11:33:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:33:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:33:04 AM	Tube furnace set to 0
9/22/2010	11:34:04 AM	H2 valve closed
9/22/2010	11:34:04 AM	BCl3 valve closed
9/22/2010	11:34:04 AM	PH3 valve closed
9/22/2010	11:34:04 AM	SiCl4 pre valve closed
9/22/2010	11:34:04 AM	SiCl4 post valve closed
9/22/2010	11:34:04 AM	Bubbler valve closed
9/22/2010	11:34:04 AM	Helium valve opened
9/22/2010	11:34:04 AM	Main Vac valve opened
9/22/2010	11:34:04 AM	Bypass valve opened
9/22/2010	11:34:04 AM	Helium MFC set to  100.000000
9/22/2010	11:34:04 AM	H2 MFC set to  0.000000
9/22/2010	11:34:04 AM	BCl3 MFC set to  0.000000
9/22/2010	11:34:04 AM	PHl3 MFC set to  0.000000
9/22/2010	11:34:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:34:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:34:04 AM	Tube furnace set to 0
9/22/2010	11:35:04 AM	Helium valve closed
9/22/2010	11:35:04 AM	H2 valve closed
9/22/2010	11:35:04 AM	BCl3 valve closed
9/22/2010	11:35:04 AM	PH3 valve closed
9/22/2010	11:35:04 AM	SiCl4 pre valve closed
9/22/2010	11:35:04 AM	SiCl4 post valve closed
9/22/2010	11:35:04 AM	Bubbler valve closed
9/22/2010	11:35:04 AM	Main Vac valve opened
9/22/2010	11:35:04 AM	Bypass valve opened
9/22/2010	11:35:04 AM	Helium MFC set to  0.000000
9/22/2010	11:35:04 AM	H2 MFC set to  0.000000
9/22/2010	11:35:04 AM	BCl3 MFC set to  0.000000
9/22/2010	11:35:04 AM	PHl3 MFC set to  0.000000
9/22/2010	11:35:04 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:35:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:35:05 AM	Tube furnace set to 0
9/22/2010	11:36:05 AM	H2 valve closed
9/22/2010	11:36:05 AM	BCl3 valve closed
9/22/2010	11:36:05 AM	PH3 valve closed
9/22/2010	11:36:05 AM	SiCl4 pre valve closed
9/22/2010	11:36:05 AM	SiCl4 post valve closed
9/22/2010	11:36:05 AM	Bubbler valve closed
9/22/2010	11:36:05 AM	Helium valve opened
9/22/2010	11:36:05 AM	Main Vac valve opened
9/22/2010	11:36:05 AM	Bypass valve opened
9/22/2010	11:36:05 AM	Helium MFC set to  100.000000
9/22/2010	11:36:05 AM	H2 MFC set to  0.000000
9/22/2010	11:36:05 AM	BCl3 MFC set to  0.000000
9/22/2010	11:36:05 AM	PHl3 MFC set to  0.000000
9/22/2010	11:36:05 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:36:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:36:05 AM	Tube furnace set to 0
9/22/2010	11:37:05 AM	Helium valve closed
9/22/2010	11:37:05 AM	H2 valve closed
9/22/2010	11:37:05 AM	BCl3 valve closed
9/22/2010	11:37:05 AM	PH3 valve closed
9/22/2010	11:37:05 AM	SiCl4 pre valve closed
9/22/2010	11:37:05 AM	SiCl4 post valve closed
9/22/2010	11:37:05 AM	Bubbler valve closed
9/22/2010	11:37:05 AM	Main Vac valve opened
9/22/2010	11:37:05 AM	Bypass valve opened
9/22/2010	11:37:05 AM	Helium MFC set to  0.000000
9/22/2010	11:37:05 AM	H2 MFC set to  0.000000
9/22/2010	11:37:05 AM	BCl3 MFC set to  0.000000
9/22/2010	11:37:05 AM	PHl3 MFC set to  0.000000
9/22/2010	11:37:05 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:37:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:37:05 AM	Tube furnace set to 0
9/22/2010	11:38:05 AM	H2 valve closed
9/22/2010	11:38:05 AM	BCl3 valve closed
9/22/2010	11:38:05 AM	PH3 valve closed
9/22/2010	11:38:05 AM	SiCl4 pre valve closed
9/22/2010	11:38:05 AM	SiCl4 post valve closed
9/22/2010	11:38:05 AM	Bubbler valve closed
9/22/2010	11:38:05 AM	Helium valve opened
9/22/2010	11:38:05 AM	Main Vac valve opened
9/22/2010	11:38:05 AM	Bypass valve opened
9/22/2010	11:38:05 AM	Helium MFC set to  100.000000
9/22/2010	11:38:05 AM	H2 MFC set to  0.000000
9/22/2010	11:38:05 AM	BCl3 MFC set to  0.000000
9/22/2010	11:38:05 AM	PHl3 MFC set to  0.000000
9/22/2010	11:38:05 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:38:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:38:05 AM	Tube furnace set to 0
9/22/2010	11:39:05 AM	Helium valve closed
9/22/2010	11:39:05 AM	H2 valve closed
9/22/2010	11:39:05 AM	BCl3 valve closed
9/22/2010	11:39:05 AM	PH3 valve closed
9/22/2010	11:39:05 AM	SiCl4 pre valve closed
9/22/2010	11:39:05 AM	SiCl4 post valve closed
9/22/2010	11:39:05 AM	Bubbler valve closed
9/22/2010	11:39:05 AM	Main Vac valve opened
9/22/2010	11:39:05 AM	Bypass valve opened
9/22/2010	11:39:05 AM	Helium MFC set to  0.000000
9/22/2010	11:39:05 AM	H2 MFC set to  0.000000
9/22/2010	11:39:05 AM	BCl3 MFC set to  0.000000
9/22/2010	11:39:05 AM	PHl3 MFC set to  0.000000
9/22/2010	11:39:05 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:39:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:39:05 AM	Tube furnace set to 0
9/22/2010	11:40:05 AM	H2 valve closed
9/22/2010	11:40:05 AM	BCl3 valve closed
9/22/2010	11:40:05 AM	PH3 valve closed
9/22/2010	11:40:05 AM	SiCl4 pre valve closed
9/22/2010	11:40:05 AM	SiCl4 post valve closed
9/22/2010	11:40:05 AM	Bubbler valve closed
9/22/2010	11:40:05 AM	Helium valve opened
9/22/2010	11:40:05 AM	Main Vac valve opened
9/22/2010	11:40:05 AM	Bypass valve opened
9/22/2010	11:40:05 AM	Helium MFC set to  100.000000
9/22/2010	11:40:05 AM	H2 MFC set to  0.000000
9/22/2010	11:40:05 AM	BCl3 MFC set to  0.000000
9/22/2010	11:40:05 AM	PHl3 MFC set to  0.000000
9/22/2010	11:40:05 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:40:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:40:06 AM	Tube furnace set to 0
9/22/2010	11:41:06 AM	Helium valve closed
9/22/2010	11:41:06 AM	H2 valve closed
9/22/2010	11:41:06 AM	BCl3 valve closed
9/22/2010	11:41:06 AM	PH3 valve closed
9/22/2010	11:41:06 AM	SiCl4 pre valve closed
9/22/2010	11:41:06 AM	SiCl4 post valve closed
9/22/2010	11:41:06 AM	Bubbler valve closed
9/22/2010	11:41:06 AM	Main Vac valve opened
9/22/2010	11:41:06 AM	Bypass valve opened
9/22/2010	11:41:06 AM	Helium MFC set to  0.000000
9/22/2010	11:41:06 AM	H2 MFC set to  0.000000
9/22/2010	11:41:06 AM	BCl3 MFC set to  0.000000
9/22/2010	11:41:06 AM	PHl3 MFC set to  0.000000
9/22/2010	11:41:06 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:41:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:41:06 AM	Tube furnace set to 0
9/22/2010	11:42:06 AM	H2 valve closed
9/22/2010	11:42:06 AM	BCl3 valve closed
9/22/2010	11:42:06 AM	PH3 valve closed
9/22/2010	11:42:06 AM	SiCl4 pre valve closed
9/22/2010	11:42:06 AM	SiCl4 post valve closed
9/22/2010	11:42:06 AM	Bubbler valve closed
9/22/2010	11:42:06 AM	Helium valve opened
9/22/2010	11:42:06 AM	Main Vac valve opened
9/22/2010	11:42:06 AM	Bypass valve opened
9/22/2010	11:42:06 AM	Helium MFC set to  100.000000
9/22/2010	11:42:06 AM	H2 MFC set to  0.000000
9/22/2010	11:42:06 AM	BCl3 MFC set to  0.000000
9/22/2010	11:42:06 AM	PHl3 MFC set to  0.000000
9/22/2010	11:42:06 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:42:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:42:06 AM	Tube furnace set to 0
9/22/2010	11:43:06 AM	Helium valve closed
9/22/2010	11:43:06 AM	H2 valve closed
9/22/2010	11:43:06 AM	BCl3 valve closed
9/22/2010	11:43:06 AM	PH3 valve closed
9/22/2010	11:43:06 AM	SiCl4 pre valve closed
9/22/2010	11:43:06 AM	SiCl4 post valve closed
9/22/2010	11:43:06 AM	Bubbler valve closed
9/22/2010	11:43:06 AM	Main Vac valve opened
9/22/2010	11:43:06 AM	Bypass valve opened
9/22/2010	11:43:06 AM	Helium MFC set to  0.000000
9/22/2010	11:43:06 AM	H2 MFC set to  0.000000
9/22/2010	11:43:06 AM	BCl3 MFC set to  0.000000
9/22/2010	11:43:06 AM	PHl3 MFC set to  0.000000
9/22/2010	11:43:06 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:43:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:43:06 AM	Tube furnace set to 0
9/22/2010	11:44:06 AM	H2 valve closed
9/22/2010	11:44:06 AM	BCl3 valve closed
9/22/2010	11:44:06 AM	PH3 valve closed
9/22/2010	11:44:06 AM	SiCl4 pre valve closed
9/22/2010	11:44:06 AM	SiCl4 post valve closed
9/22/2010	11:44:06 AM	Bubbler valve closed
9/22/2010	11:44:06 AM	Helium valve opened
9/22/2010	11:44:06 AM	Main Vac valve opened
9/22/2010	11:44:06 AM	Bypass valve opened
9/22/2010	11:44:06 AM	Helium MFC set to  100.000000
9/22/2010	11:44:06 AM	H2 MFC set to  0.000000
9/22/2010	11:44:06 AM	BCl3 MFC set to  0.000000
9/22/2010	11:44:06 AM	PHl3 MFC set to  0.000000
9/22/2010	11:44:06 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:44:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:44:06 AM	Tube furnace set to 0
9/22/2010	11:45:06 AM	Helium valve closed
9/22/2010	11:45:06 AM	H2 valve closed
9/22/2010	11:45:06 AM	BCl3 valve closed
9/22/2010	11:45:06 AM	PH3 valve closed
9/22/2010	11:45:06 AM	SiCl4 pre valve closed
9/22/2010	11:45:06 AM	SiCl4 post valve closed
9/22/2010	11:45:06 AM	Bubbler valve closed
9/22/2010	11:45:06 AM	Main Vac valve opened
9/22/2010	11:45:06 AM	Bypass valve opened
9/22/2010	11:45:06 AM	Helium MFC set to  0.000000
9/22/2010	11:45:06 AM	H2 MFC set to  0.000000
9/22/2010	11:45:06 AM	BCl3 MFC set to  0.000000
9/22/2010	11:45:06 AM	PHl3 MFC set to  0.000000
9/22/2010	11:45:06 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:45:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:45:07 AM	Tube furnace set to 0
9/22/2010	11:46:07 AM	H2 valve closed
9/22/2010	11:46:07 AM	BCl3 valve closed
9/22/2010	11:46:07 AM	PH3 valve closed
9/22/2010	11:46:07 AM	SiCl4 pre valve closed
9/22/2010	11:46:07 AM	SiCl4 post valve closed
9/22/2010	11:46:07 AM	Bubbler valve closed
9/22/2010	11:46:07 AM	Helium valve opened
9/22/2010	11:46:07 AM	Main Vac valve opened
9/22/2010	11:46:07 AM	Bypass valve opened
9/22/2010	11:46:07 AM	Helium MFC set to  100.000000
9/22/2010	11:46:07 AM	H2 MFC set to  0.000000
9/22/2010	11:46:07 AM	BCl3 MFC set to  0.000000
9/22/2010	11:46:07 AM	PHl3 MFC set to  0.000000
9/22/2010	11:46:07 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:46:07 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:46:07 AM	Tube furnace set to 0
9/22/2010	11:47:07 AM	Helium valve closed
9/22/2010	11:47:07 AM	H2 valve closed
9/22/2010	11:47:07 AM	BCl3 valve closed
9/22/2010	11:47:07 AM	PH3 valve closed
9/22/2010	11:47:07 AM	SiCl4 pre valve closed
9/22/2010	11:47:07 AM	SiCl4 post valve closed
9/22/2010	11:47:07 AM	Bubbler valve closed
9/22/2010	11:47:07 AM	Main Vac valve opened
9/22/2010	11:47:07 AM	Bypass valve opened
9/22/2010	11:47:07 AM	Helium MFC set to  0.000000
9/22/2010	11:47:07 AM	H2 MFC set to  0.000000
9/22/2010	11:47:07 AM	BCl3 MFC set to  0.000000
9/22/2010	11:47:07 AM	PHl3 MFC set to  0.000000
9/22/2010	11:47:07 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:47:07 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:47:07 AM	Tube furnace set to 0
9/22/2010	11:47:08 AM	Run finished at 11:47 AM
9/22/2010	11:47:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	11:53:26 AM	Recipe started at 11:53 AM
9/22/2010	11:53:26 AM	Helium valve closed
9/22/2010	11:53:26 AM	BCl3 valve closed
9/22/2010	11:53:26 AM	PH3 valve closed
9/22/2010	11:53:26 AM	SiCl4 pre valve closed
9/22/2010	11:53:26 AM	SiCl4 post valve closed
9/22/2010	11:53:26 AM	Main Vac valve closed
9/22/2010	11:53:26 AM	Bypass valve closed
9/22/2010	11:53:26 AM	Bubbler valve closed
9/22/2010	11:53:26 AM	H2 valve opened
9/22/2010	11:53:26 AM	Helium MFC set to  0.000000
9/22/2010	11:53:26 AM	H2 MFC set to  500.000000
9/22/2010	11:53:26 AM	BCl3 MFC set to  0.000000
9/22/2010	11:53:26 AM	PHl3 MFC set to  0.000000
9/22/2010	11:53:26 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:53:26 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:53:26 AM	Tube furnace set to 0
9/22/2010	11:54:48 AM	Helium valve closed
9/22/2010	11:54:48 AM	BCl3 valve closed
9/22/2010	11:54:48 AM	PH3 valve closed
9/22/2010	11:54:48 AM	SiCl4 pre valve closed
9/22/2010	11:54:48 AM	SiCl4 post valve closed
9/22/2010	11:54:48 AM	Main Vac valve closed
9/22/2010	11:54:48 AM	Bypass valve closed
9/22/2010	11:54:48 AM	H2 valve opened
9/22/2010	11:54:48 AM	Bubbler valve opened
9/22/2010	11:54:48 AM	Helium MFC set to  0.000000
9/22/2010	11:54:48 AM	H2 MFC set to  500.000000
9/22/2010	11:54:48 AM	BCl3 MFC set to  0.000000
9/22/2010	11:54:48 AM	PHl3 MFC set to  0.000000
9/22/2010	11:54:48 AM	SiCl4 MFC set to  0.000000
9/22/2010	11:54:48 AM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:54:49 AM	Tube furnace set to 1000
9/22/2010	12:14:49 PM	Helium valve closed
9/22/2010	12:14:49 PM	BCl3 valve closed
9/22/2010	12:14:49 PM	Main Vac valve closed
9/22/2010	12:14:49 PM	Bypass valve closed
9/22/2010	12:14:49 PM	H2 valve opened
9/22/2010	12:14:49 PM	PH3 valve opened
9/22/2010	12:14:49 PM	SiCl4 pre valve opened
9/22/2010	12:14:49 PM	SiCl4 post valve opened
9/22/2010	12:14:49 PM	Bubbler valve opened
9/22/2010	12:14:49 PM	Helium MFC set to  0.000000
9/22/2010	12:14:49 PM	H2 MFC set to  500.000000
9/22/2010	12:14:49 PM	BCl3 MFC set to  0.000000
9/22/2010	12:14:49 PM	PHl3 MFC set to  1.000000
9/22/2010	12:14:49 PM	SiCl4 MFC set to  50.000000
9/22/2010	12:14:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	12:14:49 PM	Tube furnace set to 1000
9/22/2010	12:34:49 PM	H2 valve closed
9/22/2010	12:34:49 PM	BCl3 valve closed
9/22/2010	12:34:49 PM	PH3 valve closed
9/22/2010	12:34:49 PM	SiCl4 pre valve closed
9/22/2010	12:34:49 PM	SiCl4 post valve closed
9/22/2010	12:34:49 PM	Main Vac valve closed
9/22/2010	12:34:49 PM	Bypass valve closed
9/22/2010	12:34:49 PM	Helium valve opened
9/22/2010	12:34:49 PM	Bubbler valve opened
9/22/2010	12:34:49 PM	Helium MFC set to  500.000000
9/22/2010	12:34:49 PM	H2 MFC set to  0.000000
9/22/2010	12:34:49 PM	BCl3 MFC set to  0.000000
9/22/2010	12:34:49 PM	PHl3 MFC set to  0.000000
9/22/2010	12:34:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	12:34:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	12:34:49 PM	Tube furnace set to 0
9/22/2010	12:54:49 PM	Helium valve closed
9/22/2010	12:54:49 PM	H2 valve closed
9/22/2010	12:54:49 PM	BCl3 valve closed
9/22/2010	12:54:49 PM	PH3 valve closed
9/22/2010	12:54:49 PM	SiCl4 pre valve closed
9/22/2010	12:54:49 PM	SiCl4 post valve closed
9/22/2010	12:54:49 PM	Main Vac valve closed
9/22/2010	12:54:49 PM	Bypass valve closed
9/22/2010	12:54:49 PM	Bubbler valve closed
9/22/2010	12:54:49 PM	Helium MFC set to  0.000000
9/22/2010	12:54:49 PM	H2 MFC set to  0.000000
9/22/2010	12:54:49 PM	BCl3 MFC set to  0.000000
9/22/2010	12:54:49 PM	PHl3 MFC set to  0.000000
9/22/2010	12:54:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	12:54:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	12:54:49 PM	Tube furnace set to 0
9/22/2010	12:54:49 PM	Run finished at 12:54 PM
9/22/2010	1:36:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	1:36:36 PM	Recipe started at 1:36 PM
9/22/2010	1:36:36 PM	Helium valve closed
9/22/2010	1:36:36 PM	H2 valve closed
9/22/2010	1:36:36 PM	BCl3 valve closed
9/22/2010	1:36:36 PM	PH3 valve closed
9/22/2010	1:36:36 PM	SiCl4 pre valve closed
9/22/2010	1:36:36 PM	SiCl4 post valve closed
9/22/2010	1:36:36 PM	Main Vac valve closed
9/22/2010	1:36:36 PM	Bubbler valve closed
9/22/2010	1:36:36 PM	Bypass valve opened
9/22/2010	1:36:36 PM	Helium MFC set to  0.000000
9/22/2010	1:36:36 PM	H2 MFC set to  0.000000
9/22/2010	1:36:36 PM	BCl3 MFC set to  0.000000
9/22/2010	1:36:36 PM	PHl3 MFC set to  0.000000
9/22/2010	1:36:36 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:36:36 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:36:36 PM	Tube furnace set to 0
9/22/2010	1:37:18 PM	Helium valve closed
9/22/2010	1:37:18 PM	H2 valve closed
9/22/2010	1:37:18 PM	BCl3 valve closed
9/22/2010	1:37:18 PM	PH3 valve closed
9/22/2010	1:37:18 PM	SiCl4 pre valve closed
9/22/2010	1:37:18 PM	SiCl4 post valve closed
9/22/2010	1:37:18 PM	Bubbler valve closed
9/22/2010	1:37:18 PM	Main Vac valve opened
9/22/2010	1:37:18 PM	Bypass valve opened
9/22/2010	1:37:18 PM	Helium MFC set to  0.000000
9/22/2010	1:37:18 PM	H2 MFC set to  0.000000
9/22/2010	1:37:18 PM	BCl3 MFC set to  0.000000
9/22/2010	1:37:18 PM	PHl3 MFC set to  0.000000
9/22/2010	1:37:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:37:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:37:18 PM	Tube furnace set to 0
9/22/2010	1:37:18 PM	Run finished at 1:37 PM
9/22/2010	1:37:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	1:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	1:38:56 PM	Recipe started at 1:38 PM
9/22/2010	1:38:56 PM	Helium valve closed
9/22/2010	1:38:56 PM	H2 valve closed
9/22/2010	1:38:56 PM	BCl3 valve closed
9/22/2010	1:38:56 PM	PH3 valve closed
9/22/2010	1:38:56 PM	SiCl4 pre valve closed
9/22/2010	1:38:56 PM	SiCl4 post valve closed
9/22/2010	1:38:56 PM	Main Vac valve closed
9/22/2010	1:38:56 PM	Bubbler valve closed
9/22/2010	1:38:56 PM	Bypass valve opened
9/22/2010	1:38:56 PM	Helium MFC set to  0.000000
9/22/2010	1:38:56 PM	H2 MFC set to  0.000000
9/22/2010	1:38:56 PM	BCl3 MFC set to  0.000000
9/22/2010	1:38:56 PM	PHl3 MFC set to  0.000000
9/22/2010	1:38:56 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:38:56 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:38:56 PM	Tube furnace set to 0
9/22/2010	1:38:57 PM	Helium valve closed
9/22/2010	1:38:57 PM	H2 valve closed
9/22/2010	1:38:57 PM	BCl3 valve closed
9/22/2010	1:38:57 PM	PH3 valve closed
9/22/2010	1:38:57 PM	SiCl4 pre valve closed
9/22/2010	1:38:57 PM	SiCl4 post valve closed
9/22/2010	1:38:57 PM	Bubbler valve closed
9/22/2010	1:38:57 PM	Main Vac valve opened
9/22/2010	1:38:57 PM	Bypass valve opened
9/22/2010	1:38:57 PM	Helium MFC set to  0.000000
9/22/2010	1:38:57 PM	H2 MFC set to  0.000000
9/22/2010	1:38:57 PM	BCl3 MFC set to  0.000000
9/22/2010	1:38:57 PM	PHl3 MFC set to  0.000000
9/22/2010	1:38:57 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:38:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:38:57 PM	Tube furnace set to 0
9/22/2010	1:39:57 PM	H2 valve closed
9/22/2010	1:39:57 PM	BCl3 valve closed
9/22/2010	1:39:57 PM	PH3 valve closed
9/22/2010	1:39:57 PM	SiCl4 pre valve closed
9/22/2010	1:39:57 PM	SiCl4 post valve closed
9/22/2010	1:39:57 PM	Bubbler valve closed
9/22/2010	1:39:57 PM	Helium valve opened
9/22/2010	1:39:57 PM	Main Vac valve opened
9/22/2010	1:39:57 PM	Bypass valve opened
9/22/2010	1:39:57 PM	Helium MFC set to  100.000000
9/22/2010	1:39:57 PM	H2 MFC set to  0.000000
9/22/2010	1:39:57 PM	BCl3 MFC set to  0.000000
9/22/2010	1:39:57 PM	PHl3 MFC set to  0.000000
9/22/2010	1:39:57 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:39:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:39:57 PM	Tube furnace set to 0
9/22/2010	1:40:57 PM	Helium valve closed
9/22/2010	1:40:57 PM	H2 valve closed
9/22/2010	1:40:57 PM	BCl3 valve closed
9/22/2010	1:40:57 PM	PH3 valve closed
9/22/2010	1:40:57 PM	SiCl4 pre valve closed
9/22/2010	1:40:57 PM	SiCl4 post valve closed
9/22/2010	1:40:57 PM	Bubbler valve closed
9/22/2010	1:40:57 PM	Main Vac valve opened
9/22/2010	1:40:57 PM	Bypass valve opened
9/22/2010	1:40:57 PM	Helium MFC set to  0.000000
9/22/2010	1:40:57 PM	H2 MFC set to  0.000000
9/22/2010	1:40:57 PM	BCl3 MFC set to  0.000000
9/22/2010	1:40:57 PM	PHl3 MFC set to  0.000000
9/22/2010	1:40:57 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:40:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:40:57 PM	Tube furnace set to 0
9/22/2010	1:41:57 PM	H2 valve closed
9/22/2010	1:41:57 PM	BCl3 valve closed
9/22/2010	1:41:57 PM	PH3 valve closed
9/22/2010	1:41:57 PM	SiCl4 pre valve closed
9/22/2010	1:41:57 PM	SiCl4 post valve closed
9/22/2010	1:41:57 PM	Bubbler valve closed
9/22/2010	1:41:57 PM	Helium valve opened
9/22/2010	1:41:57 PM	Main Vac valve opened
9/22/2010	1:41:57 PM	Bypass valve opened
9/22/2010	1:41:57 PM	Helium MFC set to  100.000000
9/22/2010	1:41:57 PM	H2 MFC set to  0.000000
9/22/2010	1:41:57 PM	BCl3 MFC set to  0.000000
9/22/2010	1:41:57 PM	PHl3 MFC set to  0.000000
9/22/2010	1:41:57 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:41:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:41:57 PM	Tube furnace set to 0
9/22/2010	1:42:57 PM	Helium valve closed
9/22/2010	1:42:57 PM	H2 valve closed
9/22/2010	1:42:57 PM	BCl3 valve closed
9/22/2010	1:42:57 PM	PH3 valve closed
9/22/2010	1:42:57 PM	SiCl4 pre valve closed
9/22/2010	1:42:57 PM	SiCl4 post valve closed
9/22/2010	1:42:57 PM	Bubbler valve closed
9/22/2010	1:42:57 PM	Main Vac valve opened
9/22/2010	1:42:57 PM	Bypass valve opened
9/22/2010	1:42:58 PM	Helium MFC set to  0.000000
9/22/2010	1:42:58 PM	H2 MFC set to  0.000000
9/22/2010	1:42:58 PM	BCl3 MFC set to  0.000000
9/22/2010	1:42:58 PM	PHl3 MFC set to  0.000000
9/22/2010	1:42:58 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:42:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:42:58 PM	Tube furnace set to 0
9/22/2010	1:43:58 PM	H2 valve closed
9/22/2010	1:43:58 PM	BCl3 valve closed
9/22/2010	1:43:58 PM	PH3 valve closed
9/22/2010	1:43:58 PM	SiCl4 pre valve closed
9/22/2010	1:43:58 PM	SiCl4 post valve closed
9/22/2010	1:43:58 PM	Bubbler valve closed
9/22/2010	1:43:58 PM	Helium valve opened
9/22/2010	1:43:58 PM	Main Vac valve opened
9/22/2010	1:43:58 PM	Bypass valve opened
9/22/2010	1:43:58 PM	Helium MFC set to  100.000000
9/22/2010	1:43:58 PM	H2 MFC set to  0.000000
9/22/2010	1:43:58 PM	BCl3 MFC set to  0.000000
9/22/2010	1:43:58 PM	PHl3 MFC set to  0.000000
9/22/2010	1:43:58 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:43:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:43:58 PM	Tube furnace set to 0
9/22/2010	1:44:58 PM	Helium valve closed
9/22/2010	1:44:58 PM	H2 valve closed
9/22/2010	1:44:58 PM	BCl3 valve closed
9/22/2010	1:44:58 PM	PH3 valve closed
9/22/2010	1:44:58 PM	SiCl4 pre valve closed
9/22/2010	1:44:58 PM	SiCl4 post valve closed
9/22/2010	1:44:58 PM	Bubbler valve closed
9/22/2010	1:44:58 PM	Main Vac valve opened
9/22/2010	1:44:58 PM	Bypass valve opened
9/22/2010	1:44:58 PM	Helium MFC set to  0.000000
9/22/2010	1:44:58 PM	H2 MFC set to  0.000000
9/22/2010	1:44:58 PM	BCl3 MFC set to  0.000000
9/22/2010	1:44:58 PM	PHl3 MFC set to  0.000000
9/22/2010	1:44:58 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:44:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:44:58 PM	Tube furnace set to 0
9/22/2010	1:45:58 PM	H2 valve closed
9/22/2010	1:45:58 PM	BCl3 valve closed
9/22/2010	1:45:58 PM	PH3 valve closed
9/22/2010	1:45:58 PM	SiCl4 pre valve closed
9/22/2010	1:45:58 PM	SiCl4 post valve closed
9/22/2010	1:45:58 PM	Bubbler valve closed
9/22/2010	1:45:58 PM	Helium valve opened
9/22/2010	1:45:58 PM	Main Vac valve opened
9/22/2010	1:45:58 PM	Bypass valve opened
9/22/2010	1:45:58 PM	Helium MFC set to  100.000000
9/22/2010	1:45:58 PM	H2 MFC set to  0.000000
9/22/2010	1:45:58 PM	BCl3 MFC set to  0.000000
9/22/2010	1:45:58 PM	PHl3 MFC set to  0.000000
9/22/2010	1:45:58 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:45:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:45:58 PM	Tube furnace set to 0
9/22/2010	1:46:58 PM	Helium valve closed
9/22/2010	1:46:58 PM	H2 valve closed
9/22/2010	1:46:58 PM	BCl3 valve closed
9/22/2010	1:46:58 PM	PH3 valve closed
9/22/2010	1:46:58 PM	SiCl4 pre valve closed
9/22/2010	1:46:58 PM	SiCl4 post valve closed
9/22/2010	1:46:58 PM	Bubbler valve closed
9/22/2010	1:46:58 PM	Main Vac valve opened
9/22/2010	1:46:58 PM	Bypass valve opened
9/22/2010	1:46:58 PM	Helium MFC set to  0.000000
9/22/2010	1:46:58 PM	H2 MFC set to  0.000000
9/22/2010	1:46:58 PM	BCl3 MFC set to  0.000000
9/22/2010	1:46:58 PM	PHl3 MFC set to  0.000000
9/22/2010	1:46:58 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:46:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:46:58 PM	Tube furnace set to 0
9/22/2010	1:47:58 PM	H2 valve closed
9/22/2010	1:47:58 PM	BCl3 valve closed
9/22/2010	1:47:58 PM	PH3 valve closed
9/22/2010	1:47:58 PM	SiCl4 pre valve closed
9/22/2010	1:47:58 PM	SiCl4 post valve closed
9/22/2010	1:47:58 PM	Bubbler valve closed
9/22/2010	1:47:58 PM	Helium valve opened
9/22/2010	1:47:58 PM	Main Vac valve opened
9/22/2010	1:47:58 PM	Bypass valve opened
9/22/2010	1:47:58 PM	Helium MFC set to  100.000000
9/22/2010	1:47:59 PM	H2 MFC set to  0.000000
9/22/2010	1:47:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:47:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:47:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:47:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:47:59 PM	Tube furnace set to 0
9/22/2010	1:48:59 PM	Helium valve closed
9/22/2010	1:48:59 PM	H2 valve closed
9/22/2010	1:48:59 PM	BCl3 valve closed
9/22/2010	1:48:59 PM	PH3 valve closed
9/22/2010	1:48:59 PM	SiCl4 pre valve closed
9/22/2010	1:48:59 PM	SiCl4 post valve closed
9/22/2010	1:48:59 PM	Bubbler valve closed
9/22/2010	1:48:59 PM	Main Vac valve opened
9/22/2010	1:48:59 PM	Bypass valve opened
9/22/2010	1:48:59 PM	Helium MFC set to  0.000000
9/22/2010	1:48:59 PM	H2 MFC set to  0.000000
9/22/2010	1:48:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:48:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:48:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:48:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:48:59 PM	Tube furnace set to 0
9/22/2010	1:49:59 PM	H2 valve closed
9/22/2010	1:49:59 PM	BCl3 valve closed
9/22/2010	1:49:59 PM	PH3 valve closed
9/22/2010	1:49:59 PM	SiCl4 pre valve closed
9/22/2010	1:49:59 PM	SiCl4 post valve closed
9/22/2010	1:49:59 PM	Bubbler valve closed
9/22/2010	1:49:59 PM	Helium valve opened
9/22/2010	1:49:59 PM	Main Vac valve opened
9/22/2010	1:49:59 PM	Bypass valve opened
9/22/2010	1:49:59 PM	Helium MFC set to  100.000000
9/22/2010	1:49:59 PM	H2 MFC set to  0.000000
9/22/2010	1:49:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:49:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:49:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:49:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:49:59 PM	Tube furnace set to 0
9/22/2010	1:50:59 PM	Helium valve closed
9/22/2010	1:50:59 PM	H2 valve closed
9/22/2010	1:50:59 PM	BCl3 valve closed
9/22/2010	1:50:59 PM	PH3 valve closed
9/22/2010	1:50:59 PM	SiCl4 pre valve closed
9/22/2010	1:50:59 PM	SiCl4 post valve closed
9/22/2010	1:50:59 PM	Bubbler valve closed
9/22/2010	1:50:59 PM	Main Vac valve opened
9/22/2010	1:50:59 PM	Bypass valve opened
9/22/2010	1:50:59 PM	Helium MFC set to  0.000000
9/22/2010	1:50:59 PM	H2 MFC set to  0.000000
9/22/2010	1:50:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:50:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:50:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:50:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:50:59 PM	Tube furnace set to 0
9/22/2010	1:51:59 PM	H2 valve closed
9/22/2010	1:51:59 PM	BCl3 valve closed
9/22/2010	1:51:59 PM	PH3 valve closed
9/22/2010	1:51:59 PM	SiCl4 pre valve closed
9/22/2010	1:51:59 PM	SiCl4 post valve closed
9/22/2010	1:51:59 PM	Bubbler valve closed
9/22/2010	1:51:59 PM	Helium valve opened
9/22/2010	1:51:59 PM	Main Vac valve opened
9/22/2010	1:51:59 PM	Bypass valve opened
9/22/2010	1:51:59 PM	Helium MFC set to  100.000000
9/22/2010	1:51:59 PM	H2 MFC set to  0.000000
9/22/2010	1:51:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:51:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:51:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:51:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:51:59 PM	Tube furnace set to 0
9/22/2010	1:52:59 PM	Helium valve closed
9/22/2010	1:52:59 PM	H2 valve closed
9/22/2010	1:52:59 PM	BCl3 valve closed
9/22/2010	1:52:59 PM	PH3 valve closed
9/22/2010	1:52:59 PM	SiCl4 pre valve closed
9/22/2010	1:52:59 PM	SiCl4 post valve closed
9/22/2010	1:52:59 PM	Bubbler valve closed
9/22/2010	1:52:59 PM	Main Vac valve opened
9/22/2010	1:52:59 PM	Bypass valve opened
9/22/2010	1:52:59 PM	Helium MFC set to  0.000000
9/22/2010	1:52:59 PM	H2 MFC set to  0.000000
9/22/2010	1:52:59 PM	BCl3 MFC set to  0.000000
9/22/2010	1:52:59 PM	PHl3 MFC set to  0.000000
9/22/2010	1:52:59 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:52:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:53:00 PM	Tube furnace set to 0
9/22/2010	1:54:00 PM	H2 valve closed
9/22/2010	1:54:00 PM	BCl3 valve closed
9/22/2010	1:54:00 PM	PH3 valve closed
9/22/2010	1:54:00 PM	SiCl4 pre valve closed
9/22/2010	1:54:00 PM	SiCl4 post valve closed
9/22/2010	1:54:00 PM	Bubbler valve closed
9/22/2010	1:54:00 PM	Helium valve opened
9/22/2010	1:54:00 PM	Main Vac valve opened
9/22/2010	1:54:00 PM	Bypass valve opened
9/22/2010	1:54:00 PM	Helium MFC set to  100.000000
9/22/2010	1:54:00 PM	H2 MFC set to  0.000000
9/22/2010	1:54:00 PM	BCl3 MFC set to  0.000000
9/22/2010	1:54:00 PM	PHl3 MFC set to  0.000000
9/22/2010	1:54:00 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:54:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:54:00 PM	Tube furnace set to 0
9/22/2010	1:55:00 PM	Helium valve closed
9/22/2010	1:55:00 PM	H2 valve closed
9/22/2010	1:55:00 PM	BCl3 valve closed
9/22/2010	1:55:00 PM	PH3 valve closed
9/22/2010	1:55:00 PM	SiCl4 pre valve closed
9/22/2010	1:55:00 PM	SiCl4 post valve closed
9/22/2010	1:55:00 PM	Bubbler valve closed
9/22/2010	1:55:00 PM	Main Vac valve opened
9/22/2010	1:55:00 PM	Bypass valve opened
9/22/2010	1:55:00 PM	Helium MFC set to  0.000000
9/22/2010	1:55:00 PM	H2 MFC set to  0.000000
9/22/2010	1:55:00 PM	BCl3 MFC set to  0.000000
9/22/2010	1:55:00 PM	PHl3 MFC set to  0.000000
9/22/2010	1:55:00 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:55:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:55:00 PM	Tube furnace set to 0
9/22/2010	1:56:00 PM	H2 valve closed
9/22/2010	1:56:00 PM	BCl3 valve closed
9/22/2010	1:56:00 PM	PH3 valve closed
9/22/2010	1:56:00 PM	SiCl4 pre valve closed
9/22/2010	1:56:00 PM	SiCl4 post valve closed
9/22/2010	1:56:00 PM	Bubbler valve closed
9/22/2010	1:56:00 PM	Helium valve opened
9/22/2010	1:56:00 PM	Main Vac valve opened
9/22/2010	1:56:00 PM	Bypass valve opened
9/22/2010	1:56:00 PM	Helium MFC set to  100.000000
9/22/2010	1:56:00 PM	H2 MFC set to  0.000000
9/22/2010	1:56:00 PM	BCl3 MFC set to  0.000000
9/22/2010	1:56:00 PM	PHl3 MFC set to  0.000000
9/22/2010	1:56:00 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:56:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:56:00 PM	Tube furnace set to 0
9/22/2010	1:57:00 PM	Helium valve closed
9/22/2010	1:57:00 PM	H2 valve closed
9/22/2010	1:57:00 PM	BCl3 valve closed
9/22/2010	1:57:00 PM	PH3 valve closed
9/22/2010	1:57:00 PM	SiCl4 pre valve closed
9/22/2010	1:57:00 PM	SiCl4 post valve closed
9/22/2010	1:57:00 PM	Bubbler valve closed
9/22/2010	1:57:00 PM	Main Vac valve opened
9/22/2010	1:57:00 PM	Bypass valve opened
9/22/2010	1:57:00 PM	Helium MFC set to  0.000000
9/22/2010	1:57:00 PM	H2 MFC set to  0.000000
9/22/2010	1:57:00 PM	BCl3 MFC set to  0.000000
9/22/2010	1:57:00 PM	PHl3 MFC set to  0.000000
9/22/2010	1:57:00 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:57:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:57:00 PM	Tube furnace set to 0
9/22/2010	1:58:00 PM	H2 valve closed
9/22/2010	1:58:00 PM	BCl3 valve closed
9/22/2010	1:58:00 PM	PH3 valve closed
9/22/2010	1:58:00 PM	SiCl4 pre valve closed
9/22/2010	1:58:00 PM	SiCl4 post valve closed
9/22/2010	1:58:00 PM	Bubbler valve closed
9/22/2010	1:58:00 PM	Helium valve opened
9/22/2010	1:58:00 PM	Main Vac valve opened
9/22/2010	1:58:00 PM	Bypass valve opened
9/22/2010	1:58:00 PM	Helium MFC set to  100.000000
9/22/2010	1:58:00 PM	H2 MFC set to  0.000000
9/22/2010	1:58:00 PM	BCl3 MFC set to  0.000000
9/22/2010	1:58:00 PM	PHl3 MFC set to  0.000000
9/22/2010	1:58:00 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:58:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:58:01 PM	Tube furnace set to 0
9/22/2010	1:59:01 PM	Helium valve closed
9/22/2010	1:59:01 PM	H2 valve closed
9/22/2010	1:59:01 PM	BCl3 valve closed
9/22/2010	1:59:01 PM	PH3 valve closed
9/22/2010	1:59:01 PM	SiCl4 pre valve closed
9/22/2010	1:59:01 PM	SiCl4 post valve closed
9/22/2010	1:59:01 PM	Bubbler valve closed
9/22/2010	1:59:01 PM	Main Vac valve opened
9/22/2010	1:59:01 PM	Bypass valve opened
9/22/2010	1:59:01 PM	Helium MFC set to  0.000000
9/22/2010	1:59:01 PM	H2 MFC set to  0.000000
9/22/2010	1:59:01 PM	BCl3 MFC set to  0.000000
9/22/2010	1:59:01 PM	PHl3 MFC set to  0.000000
9/22/2010	1:59:01 PM	SiCl4 MFC set to  0.000000
9/22/2010	1:59:01 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	1:59:01 PM	Tube furnace set to 0
9/22/2010	1:59:02 PM	Run finished at 1:59 PM
9/22/2010	1:59:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	2:02:29 PM	Main Vac valve closed
9/22/2010	2:02:30 PM	Bypass valve closed
9/22/2010	2:03:01 PM	Bypass valve opened
9/22/2010	2:03:01 PM	Main Vac valve opened
9/22/2010	2:03:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	2:03:17 PM	Recipe started at 2:03 PM
9/22/2010	2:03:17 PM	Helium valve closed
9/22/2010	2:03:17 PM	H2 valve closed
9/22/2010	2:03:17 PM	BCl3 valve closed
9/22/2010	2:03:17 PM	PH3 valve closed
9/22/2010	2:03:17 PM	SiCl4 pre valve closed
9/22/2010	2:03:17 PM	SiCl4 post valve closed
9/22/2010	2:03:17 PM	Main Vac valve closed
9/22/2010	2:03:17 PM	Bubbler valve closed
9/22/2010	2:03:17 PM	Bypass valve opened
9/22/2010	2:03:17 PM	Helium MFC set to  0.000000
9/22/2010	2:03:17 PM	H2 MFC set to  0.000000
9/22/2010	2:03:17 PM	BCl3 MFC set to  0.000000
9/22/2010	2:03:17 PM	PHl3 MFC set to  0.000000
9/22/2010	2:03:17 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:03:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:03:17 PM	Tube furnace set to 0
9/22/2010	2:03:17 PM	Helium valve closed
9/22/2010	2:03:17 PM	H2 valve closed
9/22/2010	2:03:17 PM	BCl3 valve closed
9/22/2010	2:03:17 PM	PH3 valve closed
9/22/2010	2:03:17 PM	SiCl4 pre valve closed
9/22/2010	2:03:17 PM	SiCl4 post valve closed
9/22/2010	2:03:17 PM	Bubbler valve closed
9/22/2010	2:03:17 PM	Main Vac valve opened
9/22/2010	2:03:17 PM	Bypass valve opened
9/22/2010	2:03:17 PM	Helium MFC set to  0.000000
9/22/2010	2:03:17 PM	H2 MFC set to  0.000000
9/22/2010	2:03:17 PM	BCl3 MFC set to  0.000000
9/22/2010	2:03:17 PM	PHl3 MFC set to  0.000000
9/22/2010	2:03:17 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:03:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:03:17 PM	Tube furnace set to 0
9/22/2010	2:04:17 PM	H2 valve closed
9/22/2010	2:04:17 PM	BCl3 valve closed
9/22/2010	2:04:17 PM	PH3 valve closed
9/22/2010	2:04:17 PM	SiCl4 pre valve closed
9/22/2010	2:04:17 PM	SiCl4 post valve closed
9/22/2010	2:04:17 PM	Bubbler valve closed
9/22/2010	2:04:17 PM	Helium valve opened
9/22/2010	2:04:17 PM	Main Vac valve opened
9/22/2010	2:04:17 PM	Bypass valve opened
9/22/2010	2:04:17 PM	Helium MFC set to  100.000000
9/22/2010	2:04:17 PM	H2 MFC set to  0.000000
9/22/2010	2:04:17 PM	BCl3 MFC set to  0.000000
9/22/2010	2:04:17 PM	PHl3 MFC set to  0.000000
9/22/2010	2:04:17 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:04:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:04:18 PM	Tube furnace set to 0
9/22/2010	2:05:18 PM	Helium valve closed
9/22/2010	2:05:18 PM	H2 valve closed
9/22/2010	2:05:18 PM	BCl3 valve closed
9/22/2010	2:05:18 PM	PH3 valve closed
9/22/2010	2:05:18 PM	SiCl4 pre valve closed
9/22/2010	2:05:18 PM	SiCl4 post valve closed
9/22/2010	2:05:18 PM	Bubbler valve closed
9/22/2010	2:05:18 PM	Main Vac valve opened
9/22/2010	2:05:18 PM	Bypass valve opened
9/22/2010	2:05:18 PM	Helium MFC set to  0.000000
9/22/2010	2:05:18 PM	H2 MFC set to  0.000000
9/22/2010	2:05:18 PM	BCl3 MFC set to  0.000000
9/22/2010	2:05:18 PM	PHl3 MFC set to  0.000000
9/22/2010	2:05:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:05:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:05:18 PM	Tube furnace set to 0
9/22/2010	2:06:18 PM	H2 valve closed
9/22/2010	2:06:18 PM	BCl3 valve closed
9/22/2010	2:06:18 PM	PH3 valve closed
9/22/2010	2:06:18 PM	SiCl4 pre valve closed
9/22/2010	2:06:18 PM	SiCl4 post valve closed
9/22/2010	2:06:18 PM	Bubbler valve closed
9/22/2010	2:06:18 PM	Helium valve opened
9/22/2010	2:06:18 PM	Main Vac valve opened
9/22/2010	2:06:18 PM	Bypass valve opened
9/22/2010	2:06:18 PM	Helium MFC set to  100.000000
9/22/2010	2:06:18 PM	H2 MFC set to  0.000000
9/22/2010	2:06:18 PM	BCl3 MFC set to  0.000000
9/22/2010	2:06:18 PM	PHl3 MFC set to  0.000000
9/22/2010	2:06:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:06:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:06:18 PM	Tube furnace set to 0
9/22/2010	2:07:18 PM	Helium valve closed
9/22/2010	2:07:18 PM	H2 valve closed
9/22/2010	2:07:18 PM	BCl3 valve closed
9/22/2010	2:07:18 PM	PH3 valve closed
9/22/2010	2:07:18 PM	SiCl4 pre valve closed
9/22/2010	2:07:18 PM	SiCl4 post valve closed
9/22/2010	2:07:18 PM	Bubbler valve closed
9/22/2010	2:07:18 PM	Main Vac valve opened
9/22/2010	2:07:18 PM	Bypass valve opened
9/22/2010	2:07:18 PM	Helium MFC set to  0.000000
9/22/2010	2:07:18 PM	H2 MFC set to  0.000000
9/22/2010	2:07:18 PM	BCl3 MFC set to  0.000000
9/22/2010	2:07:18 PM	PHl3 MFC set to  0.000000
9/22/2010	2:07:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:07:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:07:18 PM	Tube furnace set to 0
9/22/2010	2:08:18 PM	H2 valve closed
9/22/2010	2:08:18 PM	BCl3 valve closed
9/22/2010	2:08:18 PM	PH3 valve closed
9/22/2010	2:08:18 PM	SiCl4 pre valve closed
9/22/2010	2:08:18 PM	SiCl4 post valve closed
9/22/2010	2:08:18 PM	Bubbler valve closed
9/22/2010	2:08:18 PM	Helium valve opened
9/22/2010	2:08:18 PM	Main Vac valve opened
9/22/2010	2:08:18 PM	Bypass valve opened
9/22/2010	2:08:18 PM	Helium MFC set to  100.000000
9/22/2010	2:08:18 PM	H2 MFC set to  0.000000
9/22/2010	2:08:18 PM	BCl3 MFC set to  0.000000
9/22/2010	2:08:18 PM	PHl3 MFC set to  0.000000
9/22/2010	2:08:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:08:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:08:18 PM	Tube furnace set to 0
9/22/2010	2:09:18 PM	Helium valve closed
9/22/2010	2:09:18 PM	H2 valve closed
9/22/2010	2:09:18 PM	BCl3 valve closed
9/22/2010	2:09:18 PM	PH3 valve closed
9/22/2010	2:09:18 PM	SiCl4 pre valve closed
9/22/2010	2:09:18 PM	SiCl4 post valve closed
9/22/2010	2:09:18 PM	Bubbler valve closed
9/22/2010	2:09:18 PM	Main Vac valve opened
9/22/2010	2:09:18 PM	Bypass valve opened
9/22/2010	2:09:18 PM	Helium MFC set to  0.000000
9/22/2010	2:09:18 PM	H2 MFC set to  0.000000
9/22/2010	2:09:18 PM	BCl3 MFC set to  0.000000
9/22/2010	2:09:18 PM	PHl3 MFC set to  0.000000
9/22/2010	2:09:18 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:09:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:09:19 PM	Tube furnace set to 0
9/22/2010	2:10:19 PM	H2 valve closed
9/22/2010	2:10:19 PM	BCl3 valve closed
9/22/2010	2:10:19 PM	PH3 valve closed
9/22/2010	2:10:19 PM	SiCl4 pre valve closed
9/22/2010	2:10:19 PM	SiCl4 post valve closed
9/22/2010	2:10:19 PM	Bubbler valve closed
9/22/2010	2:10:19 PM	Helium valve opened
9/22/2010	2:10:19 PM	Main Vac valve opened
9/22/2010	2:10:19 PM	Bypass valve opened
9/22/2010	2:10:19 PM	Helium MFC set to  100.000000
9/22/2010	2:10:19 PM	H2 MFC set to  0.000000
9/22/2010	2:10:19 PM	BCl3 MFC set to  0.000000
9/22/2010	2:10:19 PM	PHl3 MFC set to  0.000000
9/22/2010	2:10:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:10:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:10:19 PM	Tube furnace set to 0
9/22/2010	2:11:19 PM	Helium valve closed
9/22/2010	2:11:19 PM	H2 valve closed
9/22/2010	2:11:19 PM	BCl3 valve closed
9/22/2010	2:11:19 PM	PH3 valve closed
9/22/2010	2:11:19 PM	SiCl4 pre valve closed
9/22/2010	2:11:19 PM	SiCl4 post valve closed
9/22/2010	2:11:19 PM	Bubbler valve closed
9/22/2010	2:11:19 PM	Main Vac valve opened
9/22/2010	2:11:19 PM	Bypass valve opened
9/22/2010	2:11:19 PM	Helium MFC set to  0.000000
9/22/2010	2:11:19 PM	H2 MFC set to  0.000000
9/22/2010	2:11:19 PM	BCl3 MFC set to  0.000000
9/22/2010	2:11:19 PM	PHl3 MFC set to  0.000000
9/22/2010	2:11:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:11:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:11:19 PM	Tube furnace set to 0
9/22/2010	2:12:19 PM	H2 valve closed
9/22/2010	2:12:19 PM	BCl3 valve closed
9/22/2010	2:12:19 PM	PH3 valve closed
9/22/2010	2:12:19 PM	SiCl4 pre valve closed
9/22/2010	2:12:19 PM	SiCl4 post valve closed
9/22/2010	2:12:19 PM	Bubbler valve closed
9/22/2010	2:12:19 PM	Helium valve opened
9/22/2010	2:12:19 PM	Main Vac valve opened
9/22/2010	2:12:19 PM	Bypass valve opened
9/22/2010	2:12:19 PM	Helium MFC set to  100.000000
9/22/2010	2:12:19 PM	H2 MFC set to  0.000000
9/22/2010	2:12:19 PM	BCl3 MFC set to  0.000000
9/22/2010	2:12:19 PM	PHl3 MFC set to  0.000000
9/22/2010	2:12:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:12:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:12:19 PM	Tube furnace set to 0
9/22/2010	2:13:19 PM	Helium valve closed
9/22/2010	2:13:19 PM	H2 valve closed
9/22/2010	2:13:19 PM	BCl3 valve closed
9/22/2010	2:13:19 PM	PH3 valve closed
9/22/2010	2:13:19 PM	SiCl4 pre valve closed
9/22/2010	2:13:19 PM	SiCl4 post valve closed
9/22/2010	2:13:19 PM	Bubbler valve closed
9/22/2010	2:13:19 PM	Main Vac valve opened
9/22/2010	2:13:19 PM	Bypass valve opened
9/22/2010	2:13:19 PM	Helium MFC set to  0.000000
9/22/2010	2:13:19 PM	H2 MFC set to  0.000000
9/22/2010	2:13:19 PM	BCl3 MFC set to  0.000000
9/22/2010	2:13:19 PM	PHl3 MFC set to  0.000000
9/22/2010	2:13:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:13:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:13:19 PM	Tube furnace set to 0
9/22/2010	2:14:19 PM	H2 valve closed
9/22/2010	2:14:19 PM	BCl3 valve closed
9/22/2010	2:14:19 PM	PH3 valve closed
9/22/2010	2:14:19 PM	SiCl4 pre valve closed
9/22/2010	2:14:19 PM	SiCl4 post valve closed
9/22/2010	2:14:19 PM	Bubbler valve closed
9/22/2010	2:14:19 PM	Helium valve opened
9/22/2010	2:14:19 PM	Main Vac valve opened
9/22/2010	2:14:19 PM	Bypass valve opened
9/22/2010	2:14:19 PM	Helium MFC set to  100.000000
9/22/2010	2:14:19 PM	H2 MFC set to  0.000000
9/22/2010	2:14:19 PM	BCl3 MFC set to  0.000000
9/22/2010	2:14:19 PM	PHl3 MFC set to  0.000000
9/22/2010	2:14:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:14:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:14:20 PM	Tube furnace set to 0
9/22/2010	2:15:20 PM	Helium valve closed
9/22/2010	2:15:20 PM	H2 valve closed
9/22/2010	2:15:20 PM	BCl3 valve closed
9/22/2010	2:15:20 PM	PH3 valve closed
9/22/2010	2:15:20 PM	SiCl4 pre valve closed
9/22/2010	2:15:20 PM	SiCl4 post valve closed
9/22/2010	2:15:20 PM	Bubbler valve closed
9/22/2010	2:15:20 PM	Main Vac valve opened
9/22/2010	2:15:20 PM	Bypass valve opened
9/22/2010	2:15:20 PM	Helium MFC set to  0.000000
9/22/2010	2:15:20 PM	H2 MFC set to  0.000000
9/22/2010	2:15:20 PM	BCl3 MFC set to  0.000000
9/22/2010	2:15:20 PM	PHl3 MFC set to  0.000000
9/22/2010	2:15:20 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:15:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:15:20 PM	Tube furnace set to 0
9/22/2010	2:16:20 PM	H2 valve closed
9/22/2010	2:16:20 PM	BCl3 valve closed
9/22/2010	2:16:20 PM	PH3 valve closed
9/22/2010	2:16:20 PM	SiCl4 pre valve closed
9/22/2010	2:16:20 PM	SiCl4 post valve closed
9/22/2010	2:16:20 PM	Bubbler valve closed
9/22/2010	2:16:20 PM	Helium valve opened
9/22/2010	2:16:20 PM	Main Vac valve opened
9/22/2010	2:16:20 PM	Bypass valve opened
9/22/2010	2:16:20 PM	Helium MFC set to  100.000000
9/22/2010	2:16:20 PM	H2 MFC set to  0.000000
9/22/2010	2:16:20 PM	BCl3 MFC set to  0.000000
9/22/2010	2:16:20 PM	PHl3 MFC set to  0.000000
9/22/2010	2:16:20 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:16:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:16:20 PM	Tube furnace set to 0
9/22/2010	2:17:20 PM	Helium valve closed
9/22/2010	2:17:20 PM	H2 valve closed
9/22/2010	2:17:20 PM	BCl3 valve closed
9/22/2010	2:17:20 PM	PH3 valve closed
9/22/2010	2:17:20 PM	SiCl4 pre valve closed
9/22/2010	2:17:20 PM	SiCl4 post valve closed
9/22/2010	2:17:20 PM	Bubbler valve closed
9/22/2010	2:17:20 PM	Main Vac valve opened
9/22/2010	2:17:20 PM	Bypass valve opened
9/22/2010	2:17:20 PM	Helium MFC set to  0.000000
9/22/2010	2:17:20 PM	H2 MFC set to  0.000000
9/22/2010	2:17:20 PM	BCl3 MFC set to  0.000000
9/22/2010	2:17:20 PM	PHl3 MFC set to  0.000000
9/22/2010	2:17:20 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:17:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:17:20 PM	Tube furnace set to 0
9/22/2010	2:18:20 PM	H2 valve closed
9/22/2010	2:18:20 PM	BCl3 valve closed
9/22/2010	2:18:20 PM	PH3 valve closed
9/22/2010	2:18:20 PM	SiCl4 pre valve closed
9/22/2010	2:18:20 PM	SiCl4 post valve closed
9/22/2010	2:18:20 PM	Bubbler valve closed
9/22/2010	2:18:20 PM	Helium valve opened
9/22/2010	2:18:20 PM	Main Vac valve opened
9/22/2010	2:18:20 PM	Bypass valve opened
9/22/2010	2:18:20 PM	Helium MFC set to  100.000000
9/22/2010	2:18:20 PM	H2 MFC set to  0.000000
9/22/2010	2:18:20 PM	BCl3 MFC set to  0.000000
9/22/2010	2:18:20 PM	PHl3 MFC set to  0.000000
9/22/2010	2:18:20 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:18:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:18:20 PM	Tube furnace set to 0
9/22/2010	2:19:20 PM	Helium valve closed
9/22/2010	2:19:20 PM	H2 valve closed
9/22/2010	2:19:20 PM	BCl3 valve closed
9/22/2010	2:19:20 PM	PH3 valve closed
9/22/2010	2:19:20 PM	SiCl4 pre valve closed
9/22/2010	2:19:20 PM	SiCl4 post valve closed
9/22/2010	2:19:20 PM	Bubbler valve closed
9/22/2010	2:19:20 PM	Main Vac valve opened
9/22/2010	2:19:20 PM	Bypass valve opened
9/22/2010	2:19:20 PM	Helium MFC set to  0.000000
9/22/2010	2:19:20 PM	H2 MFC set to  0.000000
9/22/2010	2:19:20 PM	BCl3 MFC set to  0.000000
9/22/2010	2:19:20 PM	PHl3 MFC set to  0.000000
9/22/2010	2:19:20 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:19:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:19:21 PM	Tube furnace set to 0
9/22/2010	2:20:21 PM	H2 valve closed
9/22/2010	2:20:21 PM	BCl3 valve closed
9/22/2010	2:20:21 PM	PH3 valve closed
9/22/2010	2:20:21 PM	SiCl4 pre valve closed
9/22/2010	2:20:21 PM	SiCl4 post valve closed
9/22/2010	2:20:21 PM	Bubbler valve closed
9/22/2010	2:20:21 PM	Helium valve opened
9/22/2010	2:20:21 PM	Main Vac valve opened
9/22/2010	2:20:21 PM	Bypass valve opened
9/22/2010	2:20:21 PM	Helium MFC set to  100.000000
9/22/2010	2:20:21 PM	H2 MFC set to  0.000000
9/22/2010	2:20:21 PM	BCl3 MFC set to  0.000000
9/22/2010	2:20:21 PM	PHl3 MFC set to  0.000000
9/22/2010	2:20:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:20:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:20:21 PM	Tube furnace set to 0
9/22/2010	2:21:21 PM	Helium valve closed
9/22/2010	2:21:21 PM	H2 valve closed
9/22/2010	2:21:21 PM	BCl3 valve closed
9/22/2010	2:21:21 PM	PH3 valve closed
9/22/2010	2:21:21 PM	SiCl4 pre valve closed
9/22/2010	2:21:21 PM	SiCl4 post valve closed
9/22/2010	2:21:21 PM	Bubbler valve closed
9/22/2010	2:21:21 PM	Main Vac valve opened
9/22/2010	2:21:21 PM	Bypass valve opened
9/22/2010	2:21:21 PM	Helium MFC set to  0.000000
9/22/2010	2:21:21 PM	H2 MFC set to  0.000000
9/22/2010	2:21:21 PM	BCl3 MFC set to  0.000000
9/22/2010	2:21:21 PM	PHl3 MFC set to  0.000000
9/22/2010	2:21:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:21:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:21:21 PM	Tube furnace set to 0
9/22/2010	2:22:21 PM	H2 valve closed
9/22/2010	2:22:21 PM	BCl3 valve closed
9/22/2010	2:22:21 PM	PH3 valve closed
9/22/2010	2:22:21 PM	SiCl4 pre valve closed
9/22/2010	2:22:21 PM	SiCl4 post valve closed
9/22/2010	2:22:21 PM	Bubbler valve closed
9/22/2010	2:22:21 PM	Helium valve opened
9/22/2010	2:22:21 PM	Main Vac valve opened
9/22/2010	2:22:21 PM	Bypass valve opened
9/22/2010	2:22:21 PM	Helium MFC set to  100.000000
9/22/2010	2:22:21 PM	H2 MFC set to  0.000000
9/22/2010	2:22:21 PM	BCl3 MFC set to  0.000000
9/22/2010	2:22:21 PM	PHl3 MFC set to  0.000000
9/22/2010	2:22:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:22:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:22:21 PM	Tube furnace set to 0
9/22/2010	2:23:21 PM	Helium valve closed
9/22/2010	2:23:21 PM	H2 valve closed
9/22/2010	2:23:21 PM	BCl3 valve closed
9/22/2010	2:23:21 PM	PH3 valve closed
9/22/2010	2:23:21 PM	SiCl4 pre valve closed
9/22/2010	2:23:21 PM	SiCl4 post valve closed
9/22/2010	2:23:21 PM	Bubbler valve closed
9/22/2010	2:23:21 PM	Main Vac valve opened
9/22/2010	2:23:21 PM	Bypass valve opened
9/22/2010	2:23:21 PM	Helium MFC set to  0.000000
9/22/2010	2:23:21 PM	H2 MFC set to  0.000000
9/22/2010	2:23:21 PM	BCl3 MFC set to  0.000000
9/22/2010	2:23:21 PM	PHl3 MFC set to  0.000000
9/22/2010	2:23:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:23:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:23:21 PM	Tube furnace set to 0
9/22/2010	2:23:22 PM	Run finished at 2:23 PM
9/22/2010	2:23:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	2:32:32 PM	Recipe started at 2:32 PM
9/22/2010	2:32:32 PM	Helium valve closed
9/22/2010	2:32:32 PM	BCl3 valve closed
9/22/2010	2:32:32 PM	PH3 valve closed
9/22/2010	2:32:32 PM	SiCl4 pre valve closed
9/22/2010	2:32:32 PM	SiCl4 post valve closed
9/22/2010	2:32:32 PM	Main Vac valve closed
9/22/2010	2:32:32 PM	Bypass valve closed
9/22/2010	2:32:32 PM	Bubbler valve closed
9/22/2010	2:32:32 PM	H2 valve opened
9/22/2010	2:32:32 PM	Helium MFC set to  0.000000
9/22/2010	2:32:32 PM	H2 MFC set to  500.000000
9/22/2010	2:32:32 PM	BCl3 MFC set to  0.000000
9/22/2010	2:32:32 PM	PHl3 MFC set to  0.000000
9/22/2010	2:32:32 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:32:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:32:32 PM	Tube furnace set to 0
9/22/2010	2:33:51 PM	Helium valve closed
9/22/2010	2:33:51 PM	BCl3 valve closed
9/22/2010	2:33:51 PM	PH3 valve closed
9/22/2010	2:33:51 PM	SiCl4 pre valve closed
9/22/2010	2:33:51 PM	SiCl4 post valve closed
9/22/2010	2:33:51 PM	Main Vac valve closed
9/22/2010	2:33:51 PM	Bypass valve closed
9/22/2010	2:33:51 PM	H2 valve opened
9/22/2010	2:33:51 PM	Bubbler valve opened
9/22/2010	2:33:51 PM	Helium MFC set to  0.000000
9/22/2010	2:33:51 PM	H2 MFC set to  500.000000
9/22/2010	2:33:51 PM	BCl3 MFC set to  0.000000
9/22/2010	2:33:51 PM	PHl3 MFC set to  0.000000
9/22/2010	2:33:51 PM	SiCl4 MFC set to  0.000000
9/22/2010	2:33:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:33:51 PM	Tube furnace set to 1000
9/22/2010	2:53:51 PM	Helium valve closed
9/22/2010	2:53:51 PM	BCl3 valve closed
9/22/2010	2:53:51 PM	Main Vac valve closed
9/22/2010	2:53:51 PM	Bypass valve closed
9/22/2010	2:53:51 PM	H2 valve opened
9/22/2010	2:53:51 PM	PH3 valve opened
9/22/2010	2:53:51 PM	SiCl4 pre valve opened
9/22/2010	2:53:51 PM	SiCl4 post valve opened
9/22/2010	2:53:51 PM	Bubbler valve opened
9/22/2010	2:53:51 PM	Helium MFC set to  0.000000
9/22/2010	2:53:51 PM	H2 MFC set to  500.000000
9/22/2010	2:53:51 PM	BCl3 MFC set to  0.000000
9/22/2010	2:53:51 PM	PHl3 MFC set to  1.000000
9/22/2010	2:53:51 PM	SiCl4 MFC set to  50.000000
9/22/2010	2:53:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	2:53:51 PM	Tube furnace set to 1000
9/22/2010	3:13:51 PM	H2 valve closed
9/22/2010	3:13:51 PM	BCl3 valve closed
9/22/2010	3:13:51 PM	PH3 valve closed
9/22/2010	3:13:51 PM	SiCl4 pre valve closed
9/22/2010	3:13:51 PM	SiCl4 post valve closed
9/22/2010	3:13:51 PM	Main Vac valve closed
9/22/2010	3:13:51 PM	Bypass valve closed
9/22/2010	3:13:51 PM	Helium valve opened
9/22/2010	3:13:51 PM	Bubbler valve opened
9/22/2010	3:13:51 PM	Helium MFC set to  500.000000
9/22/2010	3:13:51 PM	H2 MFC set to  0.000000
9/22/2010	3:13:51 PM	BCl3 MFC set to  0.000000
9/22/2010	3:13:51 PM	PHl3 MFC set to  0.000000
9/22/2010	3:13:51 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:13:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:13:52 PM	Tube furnace set to 0
9/22/2010	3:33:52 PM	Helium valve closed
9/22/2010	3:33:52 PM	H2 valve closed
9/22/2010	3:33:52 PM	BCl3 valve closed
9/22/2010	3:33:52 PM	PH3 valve closed
9/22/2010	3:33:52 PM	SiCl4 pre valve closed
9/22/2010	3:33:52 PM	SiCl4 post valve closed
9/22/2010	3:33:52 PM	Main Vac valve closed
9/22/2010	3:33:52 PM	Bypass valve closed
9/22/2010	3:33:52 PM	Bubbler valve closed
9/22/2010	3:33:52 PM	Helium MFC set to  0.000000
9/22/2010	3:33:52 PM	H2 MFC set to  0.000000
9/22/2010	3:33:52 PM	BCl3 MFC set to  0.000000
9/22/2010	3:33:52 PM	PHl3 MFC set to  0.000000
9/22/2010	3:33:52 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:33:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:33:52 PM	Tube furnace set to 0
9/22/2010	3:33:52 PM	Run finished at 3:33 PM
9/22/2010	3:56:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	3:56:12 PM	Recipe started at 3:56 PM
9/22/2010	3:56:12 PM	Helium valve closed
9/22/2010	3:56:12 PM	H2 valve closed
9/22/2010	3:56:12 PM	BCl3 valve closed
9/22/2010	3:56:12 PM	PH3 valve closed
9/22/2010	3:56:12 PM	SiCl4 pre valve closed
9/22/2010	3:56:12 PM	SiCl4 post valve closed
9/22/2010	3:56:12 PM	Main Vac valve closed
9/22/2010	3:56:12 PM	Bubbler valve closed
9/22/2010	3:56:12 PM	Bypass valve opened
9/22/2010	3:56:12 PM	Helium MFC set to  0.000000
9/22/2010	3:56:12 PM	H2 MFC set to  0.000000
9/22/2010	3:56:12 PM	BCl3 MFC set to  0.000000
9/22/2010	3:56:12 PM	PHl3 MFC set to  0.000000
9/22/2010	3:56:12 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:56:12 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:56:12 PM	Tube furnace set to 0
9/22/2010	3:56:52 PM	Helium valve closed
9/22/2010	3:56:52 PM	H2 valve closed
9/22/2010	3:56:52 PM	BCl3 valve closed
9/22/2010	3:56:52 PM	PH3 valve closed
9/22/2010	3:56:52 PM	SiCl4 pre valve closed
9/22/2010	3:56:52 PM	SiCl4 post valve closed
9/22/2010	3:56:52 PM	Bubbler valve closed
9/22/2010	3:56:52 PM	Main Vac valve opened
9/22/2010	3:56:52 PM	Bypass valve opened
9/22/2010	3:56:52 PM	Helium MFC set to  0.000000
9/22/2010	3:56:52 PM	H2 MFC set to  0.000000
9/22/2010	3:56:52 PM	BCl3 MFC set to  0.000000
9/22/2010	3:56:52 PM	PHl3 MFC set to  0.000000
9/22/2010	3:56:52 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:56:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:56:52 PM	Tube furnace set to 0
9/22/2010	3:56:53 PM	Run finished at 3:56 PM
9/22/2010	3:56:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	3:57:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	3:58:04 PM	Recipe started at 3:57 PM
9/22/2010	3:58:04 PM	Helium valve closed
9/22/2010	3:58:04 PM	H2 valve closed
9/22/2010	3:58:04 PM	BCl3 valve closed
9/22/2010	3:58:04 PM	PH3 valve closed
9/22/2010	3:58:04 PM	SiCl4 pre valve closed
9/22/2010	3:58:04 PM	SiCl4 post valve closed
9/22/2010	3:58:04 PM	Main Vac valve closed
9/22/2010	3:58:04 PM	Bubbler valve closed
9/22/2010	3:58:04 PM	Bypass valve opened
9/22/2010	3:58:04 PM	Helium MFC set to  0.000000
9/22/2010	3:58:04 PM	H2 MFC set to  0.000000
9/22/2010	3:58:04 PM	BCl3 MFC set to  0.000000
9/22/2010	3:58:04 PM	PHl3 MFC set to  0.000000
9/22/2010	3:58:04 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:58:04 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:58:04 PM	Tube furnace set to 0
9/22/2010	3:58:04 PM	Helium valve closed
9/22/2010	3:58:04 PM	H2 valve closed
9/22/2010	3:58:04 PM	BCl3 valve closed
9/22/2010	3:58:04 PM	PH3 valve closed
9/22/2010	3:58:04 PM	SiCl4 pre valve closed
9/22/2010	3:58:04 PM	SiCl4 post valve closed
9/22/2010	3:58:04 PM	Bubbler valve closed
9/22/2010	3:58:04 PM	Main Vac valve opened
9/22/2010	3:58:04 PM	Bypass valve opened
9/22/2010	3:58:04 PM	Helium MFC set to  0.000000
9/22/2010	3:58:04 PM	H2 MFC set to  0.000000
9/22/2010	3:58:04 PM	BCl3 MFC set to  0.000000
9/22/2010	3:58:04 PM	PHl3 MFC set to  0.000000
9/22/2010	3:58:04 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:58:04 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:58:05 PM	Tube furnace set to 0
9/22/2010	3:59:05 PM	H2 valve closed
9/22/2010	3:59:05 PM	BCl3 valve closed
9/22/2010	3:59:05 PM	PH3 valve closed
9/22/2010	3:59:05 PM	SiCl4 pre valve closed
9/22/2010	3:59:05 PM	SiCl4 post valve closed
9/22/2010	3:59:05 PM	Bubbler valve closed
9/22/2010	3:59:05 PM	Helium valve opened
9/22/2010	3:59:05 PM	Main Vac valve opened
9/22/2010	3:59:05 PM	Bypass valve opened
9/22/2010	3:59:05 PM	Helium MFC set to  100.000000
9/22/2010	3:59:05 PM	H2 MFC set to  0.000000
9/22/2010	3:59:05 PM	BCl3 MFC set to  0.000000
9/22/2010	3:59:05 PM	PHl3 MFC set to  0.000000
9/22/2010	3:59:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	3:59:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	3:59:05 PM	Tube furnace set to 0
9/22/2010	4:00:05 PM	Helium valve closed
9/22/2010	4:00:05 PM	H2 valve closed
9/22/2010	4:00:05 PM	BCl3 valve closed
9/22/2010	4:00:05 PM	PH3 valve closed
9/22/2010	4:00:05 PM	SiCl4 pre valve closed
9/22/2010	4:00:05 PM	SiCl4 post valve closed
9/22/2010	4:00:05 PM	Bubbler valve closed
9/22/2010	4:00:05 PM	Main Vac valve opened
9/22/2010	4:00:05 PM	Bypass valve opened
9/22/2010	4:00:05 PM	Helium MFC set to  0.000000
9/22/2010	4:00:05 PM	H2 MFC set to  0.000000
9/22/2010	4:00:05 PM	BCl3 MFC set to  0.000000
9/22/2010	4:00:05 PM	PHl3 MFC set to  0.000000
9/22/2010	4:00:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:00:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:00:05 PM	Tube furnace set to 0
9/22/2010	4:01:05 PM	H2 valve closed
9/22/2010	4:01:05 PM	BCl3 valve closed
9/22/2010	4:01:05 PM	PH3 valve closed
9/22/2010	4:01:05 PM	SiCl4 pre valve closed
9/22/2010	4:01:05 PM	SiCl4 post valve closed
9/22/2010	4:01:05 PM	Bubbler valve closed
9/22/2010	4:01:05 PM	Helium valve opened
9/22/2010	4:01:05 PM	Main Vac valve opened
9/22/2010	4:01:05 PM	Bypass valve opened
9/22/2010	4:01:05 PM	Helium MFC set to  100.000000
9/22/2010	4:01:05 PM	H2 MFC set to  0.000000
9/22/2010	4:01:05 PM	BCl3 MFC set to  0.000000
9/22/2010	4:01:05 PM	PHl3 MFC set to  0.000000
9/22/2010	4:01:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:01:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:01:05 PM	Tube furnace set to 0
9/22/2010	4:02:05 PM	Helium valve closed
9/22/2010	4:02:05 PM	H2 valve closed
9/22/2010	4:02:05 PM	BCl3 valve closed
9/22/2010	4:02:05 PM	PH3 valve closed
9/22/2010	4:02:05 PM	SiCl4 pre valve closed
9/22/2010	4:02:05 PM	SiCl4 post valve closed
9/22/2010	4:02:05 PM	Bubbler valve closed
9/22/2010	4:02:05 PM	Main Vac valve opened
9/22/2010	4:02:05 PM	Bypass valve opened
9/22/2010	4:02:05 PM	Helium MFC set to  0.000000
9/22/2010	4:02:05 PM	H2 MFC set to  0.000000
9/22/2010	4:02:05 PM	BCl3 MFC set to  0.000000
9/22/2010	4:02:05 PM	PHl3 MFC set to  0.000000
9/22/2010	4:02:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:02:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:02:05 PM	Tube furnace set to 0
9/22/2010	4:03:05 PM	H2 valve closed
9/22/2010	4:03:05 PM	BCl3 valve closed
9/22/2010	4:03:05 PM	PH3 valve closed
9/22/2010	4:03:05 PM	SiCl4 pre valve closed
9/22/2010	4:03:05 PM	SiCl4 post valve closed
9/22/2010	4:03:05 PM	Bubbler valve closed
9/22/2010	4:03:05 PM	Helium valve opened
9/22/2010	4:03:05 PM	Main Vac valve opened
9/22/2010	4:03:05 PM	Bypass valve opened
9/22/2010	4:03:05 PM	Helium MFC set to  100.000000
9/22/2010	4:03:05 PM	H2 MFC set to  0.000000
9/22/2010	4:03:05 PM	BCl3 MFC set to  0.000000
9/22/2010	4:03:05 PM	PHl3 MFC set to  0.000000
9/22/2010	4:03:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:03:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:03:06 PM	Tube furnace set to 0
9/22/2010	4:04:06 PM	Helium valve closed
9/22/2010	4:04:06 PM	H2 valve closed
9/22/2010	4:04:06 PM	BCl3 valve closed
9/22/2010	4:04:06 PM	PH3 valve closed
9/22/2010	4:04:06 PM	SiCl4 pre valve closed
9/22/2010	4:04:06 PM	SiCl4 post valve closed
9/22/2010	4:04:06 PM	Bubbler valve closed
9/22/2010	4:04:06 PM	Main Vac valve opened
9/22/2010	4:04:06 PM	Bypass valve opened
9/22/2010	4:04:06 PM	Helium MFC set to  0.000000
9/22/2010	4:04:06 PM	H2 MFC set to  0.000000
9/22/2010	4:04:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:04:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:04:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:04:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:04:06 PM	Tube furnace set to 0
9/22/2010	4:05:06 PM	H2 valve closed
9/22/2010	4:05:06 PM	BCl3 valve closed
9/22/2010	4:05:06 PM	PH3 valve closed
9/22/2010	4:05:06 PM	SiCl4 pre valve closed
9/22/2010	4:05:06 PM	SiCl4 post valve closed
9/22/2010	4:05:06 PM	Bubbler valve closed
9/22/2010	4:05:06 PM	Helium valve opened
9/22/2010	4:05:06 PM	Main Vac valve opened
9/22/2010	4:05:06 PM	Bypass valve opened
9/22/2010	4:05:06 PM	Helium MFC set to  100.000000
9/22/2010	4:05:06 PM	H2 MFC set to  0.000000
9/22/2010	4:05:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:05:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:05:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:05:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:05:06 PM	Tube furnace set to 0
9/22/2010	4:06:06 PM	Helium valve closed
9/22/2010	4:06:06 PM	H2 valve closed
9/22/2010	4:06:06 PM	BCl3 valve closed
9/22/2010	4:06:06 PM	PH3 valve closed
9/22/2010	4:06:06 PM	SiCl4 pre valve closed
9/22/2010	4:06:06 PM	SiCl4 post valve closed
9/22/2010	4:06:06 PM	Bubbler valve closed
9/22/2010	4:06:06 PM	Main Vac valve opened
9/22/2010	4:06:06 PM	Bypass valve opened
9/22/2010	4:06:06 PM	Helium MFC set to  0.000000
9/22/2010	4:06:06 PM	H2 MFC set to  0.000000
9/22/2010	4:06:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:06:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:06:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:06:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:06:06 PM	Tube furnace set to 0
9/22/2010	4:07:06 PM	H2 valve closed
9/22/2010	4:07:06 PM	BCl3 valve closed
9/22/2010	4:07:06 PM	PH3 valve closed
9/22/2010	4:07:06 PM	SiCl4 pre valve closed
9/22/2010	4:07:06 PM	SiCl4 post valve closed
9/22/2010	4:07:06 PM	Bubbler valve closed
9/22/2010	4:07:06 PM	Helium valve opened
9/22/2010	4:07:06 PM	Main Vac valve opened
9/22/2010	4:07:06 PM	Bypass valve opened
9/22/2010	4:07:06 PM	Helium MFC set to  100.000000
9/22/2010	4:07:06 PM	H2 MFC set to  0.000000
9/22/2010	4:07:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:07:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:07:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:07:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:07:06 PM	Tube furnace set to 0
9/22/2010	4:08:06 PM	Helium valve closed
9/22/2010	4:08:06 PM	H2 valve closed
9/22/2010	4:08:06 PM	BCl3 valve closed
9/22/2010	4:08:06 PM	PH3 valve closed
9/22/2010	4:08:06 PM	SiCl4 pre valve closed
9/22/2010	4:08:06 PM	SiCl4 post valve closed
9/22/2010	4:08:06 PM	Bubbler valve closed
9/22/2010	4:08:06 PM	Main Vac valve opened
9/22/2010	4:08:06 PM	Bypass valve opened
9/22/2010	4:08:06 PM	Helium MFC set to  0.000000
9/22/2010	4:08:06 PM	H2 MFC set to  0.000000
9/22/2010	4:08:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:08:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:08:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:08:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:08:07 PM	Tube furnace set to 0
9/22/2010	4:09:07 PM	H2 valve closed
9/22/2010	4:09:07 PM	BCl3 valve closed
9/22/2010	4:09:07 PM	PH3 valve closed
9/22/2010	4:09:07 PM	SiCl4 pre valve closed
9/22/2010	4:09:07 PM	SiCl4 post valve closed
9/22/2010	4:09:07 PM	Bubbler valve closed
9/22/2010	4:09:07 PM	Helium valve opened
9/22/2010	4:09:07 PM	Main Vac valve opened
9/22/2010	4:09:07 PM	Bypass valve opened
9/22/2010	4:09:07 PM	Helium MFC set to  100.000000
9/22/2010	4:09:07 PM	H2 MFC set to  0.000000
9/22/2010	4:09:07 PM	BCl3 MFC set to  0.000000
9/22/2010	4:09:07 PM	PHl3 MFC set to  0.000000
9/22/2010	4:09:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:09:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:09:07 PM	Tube furnace set to 0
9/22/2010	4:10:07 PM	Helium valve closed
9/22/2010	4:10:07 PM	H2 valve closed
9/22/2010	4:10:07 PM	BCl3 valve closed
9/22/2010	4:10:07 PM	PH3 valve closed
9/22/2010	4:10:07 PM	SiCl4 pre valve closed
9/22/2010	4:10:07 PM	SiCl4 post valve closed
9/22/2010	4:10:07 PM	Bubbler valve closed
9/22/2010	4:10:07 PM	Main Vac valve opened
9/22/2010	4:10:07 PM	Bypass valve opened
9/22/2010	4:10:07 PM	Helium MFC set to  0.000000
9/22/2010	4:10:07 PM	H2 MFC set to  0.000000
9/22/2010	4:10:07 PM	BCl3 MFC set to  0.000000
9/22/2010	4:10:07 PM	PHl3 MFC set to  0.000000
9/22/2010	4:10:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:10:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:10:07 PM	Tube furnace set to 0
9/22/2010	4:11:07 PM	H2 valve closed
9/22/2010	4:11:07 PM	BCl3 valve closed
9/22/2010	4:11:07 PM	PH3 valve closed
9/22/2010	4:11:07 PM	SiCl4 pre valve closed
9/22/2010	4:11:07 PM	SiCl4 post valve closed
9/22/2010	4:11:07 PM	Bubbler valve closed
9/22/2010	4:11:07 PM	Helium valve opened
9/22/2010	4:11:07 PM	Main Vac valve opened
9/22/2010	4:11:07 PM	Bypass valve opened
9/22/2010	4:11:07 PM	Helium MFC set to  100.000000
9/22/2010	4:11:07 PM	H2 MFC set to  0.000000
9/22/2010	4:11:07 PM	BCl3 MFC set to  0.000000
9/22/2010	4:11:07 PM	PHl3 MFC set to  0.000000
9/22/2010	4:11:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:11:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:11:07 PM	Tube furnace set to 0
9/22/2010	4:12:07 PM	Helium valve closed
9/22/2010	4:12:07 PM	H2 valve closed
9/22/2010	4:12:07 PM	BCl3 valve closed
9/22/2010	4:12:07 PM	PH3 valve closed
9/22/2010	4:12:07 PM	SiCl4 pre valve closed
9/22/2010	4:12:07 PM	SiCl4 post valve closed
9/22/2010	4:12:07 PM	Bubbler valve closed
9/22/2010	4:12:07 PM	Main Vac valve opened
9/22/2010	4:12:07 PM	Bypass valve opened
9/22/2010	4:12:07 PM	Helium MFC set to  0.000000
9/22/2010	4:12:07 PM	H2 MFC set to  0.000000
9/22/2010	4:12:07 PM	BCl3 MFC set to  0.000000
9/22/2010	4:12:07 PM	PHl3 MFC set to  0.000000
9/22/2010	4:12:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:12:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:12:07 PM	Tube furnace set to 0
9/22/2010	4:13:07 PM	H2 valve closed
9/22/2010	4:13:07 PM	BCl3 valve closed
9/22/2010	4:13:07 PM	PH3 valve closed
9/22/2010	4:13:07 PM	SiCl4 pre valve closed
9/22/2010	4:13:07 PM	SiCl4 post valve closed
9/22/2010	4:13:07 PM	Bubbler valve closed
9/22/2010	4:13:07 PM	Helium valve opened
9/22/2010	4:13:07 PM	Main Vac valve opened
9/22/2010	4:13:07 PM	Bypass valve opened
9/22/2010	4:13:07 PM	Helium MFC set to  100.000000
9/22/2010	4:13:07 PM	H2 MFC set to  0.000000
9/22/2010	4:13:07 PM	BCl3 MFC set to  0.000000
9/22/2010	4:13:07 PM	PHl3 MFC set to  0.000000
9/22/2010	4:13:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:13:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:13:08 PM	Tube furnace set to 0
9/22/2010	4:14:08 PM	Helium valve closed
9/22/2010	4:14:08 PM	H2 valve closed
9/22/2010	4:14:08 PM	BCl3 valve closed
9/22/2010	4:14:08 PM	PH3 valve closed
9/22/2010	4:14:08 PM	SiCl4 pre valve closed
9/22/2010	4:14:08 PM	SiCl4 post valve closed
9/22/2010	4:14:08 PM	Bubbler valve closed
9/22/2010	4:14:08 PM	Main Vac valve opened
9/22/2010	4:14:08 PM	Bypass valve opened
9/22/2010	4:14:08 PM	Helium MFC set to  0.000000
9/22/2010	4:14:08 PM	H2 MFC set to  0.000000
9/22/2010	4:14:08 PM	BCl3 MFC set to  0.000000
9/22/2010	4:14:08 PM	PHl3 MFC set to  0.000000
9/22/2010	4:14:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:14:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:14:08 PM	Tube furnace set to 0
9/22/2010	4:15:08 PM	H2 valve closed
9/22/2010	4:15:08 PM	BCl3 valve closed
9/22/2010	4:15:08 PM	PH3 valve closed
9/22/2010	4:15:08 PM	SiCl4 pre valve closed
9/22/2010	4:15:08 PM	SiCl4 post valve closed
9/22/2010	4:15:08 PM	Bubbler valve closed
9/22/2010	4:15:08 PM	Helium valve opened
9/22/2010	4:15:08 PM	Main Vac valve opened
9/22/2010	4:15:08 PM	Bypass valve opened
9/22/2010	4:15:08 PM	Helium MFC set to  100.000000
9/22/2010	4:15:08 PM	H2 MFC set to  0.000000
9/22/2010	4:15:08 PM	BCl3 MFC set to  0.000000
9/22/2010	4:15:08 PM	PHl3 MFC set to  0.000000
9/22/2010	4:15:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:15:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:15:08 PM	Tube furnace set to 0
9/22/2010	4:16:08 PM	Helium valve closed
9/22/2010	4:16:08 PM	H2 valve closed
9/22/2010	4:16:08 PM	BCl3 valve closed
9/22/2010	4:16:08 PM	PH3 valve closed
9/22/2010	4:16:08 PM	SiCl4 pre valve closed
9/22/2010	4:16:08 PM	SiCl4 post valve closed
9/22/2010	4:16:08 PM	Bubbler valve closed
9/22/2010	4:16:08 PM	Main Vac valve opened
9/22/2010	4:16:08 PM	Bypass valve opened
9/22/2010	4:16:08 PM	Helium MFC set to  0.000000
9/22/2010	4:16:08 PM	H2 MFC set to  0.000000
9/22/2010	4:16:08 PM	BCl3 MFC set to  0.000000
9/22/2010	4:16:08 PM	PHl3 MFC set to  0.000000
9/22/2010	4:16:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:16:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:16:08 PM	Tube furnace set to 0
9/22/2010	4:17:08 PM	H2 valve closed
9/22/2010	4:17:08 PM	BCl3 valve closed
9/22/2010	4:17:08 PM	PH3 valve closed
9/22/2010	4:17:08 PM	SiCl4 pre valve closed
9/22/2010	4:17:08 PM	SiCl4 post valve closed
9/22/2010	4:17:08 PM	Bubbler valve closed
9/22/2010	4:17:08 PM	Helium valve opened
9/22/2010	4:17:08 PM	Main Vac valve opened
9/22/2010	4:17:08 PM	Bypass valve opened
9/22/2010	4:17:08 PM	Helium MFC set to  100.000000
9/22/2010	4:17:08 PM	H2 MFC set to  0.000000
9/22/2010	4:17:08 PM	BCl3 MFC set to  0.000000
9/22/2010	4:17:08 PM	PHl3 MFC set to  0.000000
9/22/2010	4:17:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:17:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:17:08 PM	Tube furnace set to 0
9/22/2010	4:18:08 PM	Helium valve closed
9/22/2010	4:18:08 PM	H2 valve closed
9/22/2010	4:18:08 PM	BCl3 valve closed
9/22/2010	4:18:08 PM	PH3 valve closed
9/22/2010	4:18:08 PM	SiCl4 pre valve closed
9/22/2010	4:18:08 PM	SiCl4 post valve closed
9/22/2010	4:18:08 PM	Bubbler valve closed
9/22/2010	4:18:08 PM	Main Vac valve opened
9/22/2010	4:18:08 PM	Bypass valve opened
9/22/2010	4:18:08 PM	Helium MFC set to  0.000000
9/22/2010	4:18:08 PM	H2 MFC set to  0.000000
9/22/2010	4:18:08 PM	BCl3 MFC set to  0.000000
9/22/2010	4:18:08 PM	PHl3 MFC set to  0.000000
9/22/2010	4:18:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:18:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:18:08 PM	Tube furnace set to 0
9/22/2010	4:18:09 PM	Run finished at 4:18 PM
9/22/2010	4:18:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	4:23:32 PM	Bypass valve closed
9/22/2010	4:23:33 PM	Main Vac valve closed
9/22/2010	4:24:01 PM	Main Vac valve opened
9/22/2010	4:24:01 PM	Bypass valve opened
9/22/2010	4:24:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	4:24:21 PM	Recipe started at 4:24 PM
9/22/2010	4:24:21 PM	Helium valve closed
9/22/2010	4:24:21 PM	H2 valve closed
9/22/2010	4:24:21 PM	BCl3 valve closed
9/22/2010	4:24:21 PM	PH3 valve closed
9/22/2010	4:24:21 PM	SiCl4 pre valve closed
9/22/2010	4:24:21 PM	SiCl4 post valve closed
9/22/2010	4:24:21 PM	Main Vac valve closed
9/22/2010	4:24:21 PM	Bubbler valve closed
9/22/2010	4:24:21 PM	Bypass valve opened
9/22/2010	4:24:21 PM	Helium MFC set to  0.000000
9/22/2010	4:24:21 PM	H2 MFC set to  0.000000
9/22/2010	4:24:21 PM	BCl3 MFC set to  0.000000
9/22/2010	4:24:21 PM	PHl3 MFC set to  0.000000
9/22/2010	4:24:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:24:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:24:21 PM	Tube furnace set to 0
9/22/2010	4:24:21 PM	Helium valve closed
9/22/2010	4:24:21 PM	H2 valve closed
9/22/2010	4:24:21 PM	BCl3 valve closed
9/22/2010	4:24:21 PM	PH3 valve closed
9/22/2010	4:24:21 PM	SiCl4 pre valve closed
9/22/2010	4:24:21 PM	SiCl4 post valve closed
9/22/2010	4:24:21 PM	Bubbler valve closed
9/22/2010	4:24:21 PM	Main Vac valve opened
9/22/2010	4:24:21 PM	Bypass valve opened
9/22/2010	4:24:21 PM	Helium MFC set to  0.000000
9/22/2010	4:24:21 PM	H2 MFC set to  0.000000
9/22/2010	4:24:21 PM	BCl3 MFC set to  0.000000
9/22/2010	4:24:21 PM	PHl3 MFC set to  0.000000
9/22/2010	4:24:21 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:24:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:24:22 PM	Tube furnace set to 0
9/22/2010	4:25:22 PM	H2 valve closed
9/22/2010	4:25:22 PM	BCl3 valve closed
9/22/2010	4:25:22 PM	PH3 valve closed
9/22/2010	4:25:22 PM	SiCl4 pre valve closed
9/22/2010	4:25:22 PM	SiCl4 post valve closed
9/22/2010	4:25:22 PM	Bubbler valve closed
9/22/2010	4:25:22 PM	Helium valve opened
9/22/2010	4:25:22 PM	Main Vac valve opened
9/22/2010	4:25:22 PM	Bypass valve opened
9/22/2010	4:25:22 PM	Helium MFC set to  100.000000
9/22/2010	4:25:22 PM	H2 MFC set to  0.000000
9/22/2010	4:25:22 PM	BCl3 MFC set to  0.000000
9/22/2010	4:25:22 PM	PHl3 MFC set to  0.000000
9/22/2010	4:25:22 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:25:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:25:22 PM	Tube furnace set to 0
9/22/2010	4:26:22 PM	Helium valve closed
9/22/2010	4:26:22 PM	H2 valve closed
9/22/2010	4:26:22 PM	BCl3 valve closed
9/22/2010	4:26:22 PM	PH3 valve closed
9/22/2010	4:26:22 PM	SiCl4 pre valve closed
9/22/2010	4:26:22 PM	SiCl4 post valve closed
9/22/2010	4:26:22 PM	Bubbler valve closed
9/22/2010	4:26:22 PM	Main Vac valve opened
9/22/2010	4:26:22 PM	Bypass valve opened
9/22/2010	4:26:22 PM	Helium MFC set to  0.000000
9/22/2010	4:26:22 PM	H2 MFC set to  0.000000
9/22/2010	4:26:22 PM	BCl3 MFC set to  0.000000
9/22/2010	4:26:22 PM	PHl3 MFC set to  0.000000
9/22/2010	4:26:22 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:26:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:26:22 PM	Tube furnace set to 0
9/22/2010	4:27:22 PM	H2 valve closed
9/22/2010	4:27:22 PM	BCl3 valve closed
9/22/2010	4:27:22 PM	PH3 valve closed
9/22/2010	4:27:22 PM	SiCl4 pre valve closed
9/22/2010	4:27:22 PM	SiCl4 post valve closed
9/22/2010	4:27:22 PM	Bubbler valve closed
9/22/2010	4:27:22 PM	Helium valve opened
9/22/2010	4:27:22 PM	Main Vac valve opened
9/22/2010	4:27:22 PM	Bypass valve opened
9/22/2010	4:27:22 PM	Helium MFC set to  100.000000
9/22/2010	4:27:22 PM	H2 MFC set to  0.000000
9/22/2010	4:27:22 PM	BCl3 MFC set to  0.000000
9/22/2010	4:27:22 PM	PHl3 MFC set to  0.000000
9/22/2010	4:27:22 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:27:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:27:22 PM	Tube furnace set to 0
9/22/2010	4:28:22 PM	Helium valve closed
9/22/2010	4:28:22 PM	H2 valve closed
9/22/2010	4:28:22 PM	BCl3 valve closed
9/22/2010	4:28:22 PM	PH3 valve closed
9/22/2010	4:28:22 PM	SiCl4 pre valve closed
9/22/2010	4:28:22 PM	SiCl4 post valve closed
9/22/2010	4:28:22 PM	Bubbler valve closed
9/22/2010	4:28:22 PM	Main Vac valve opened
9/22/2010	4:28:22 PM	Bypass valve opened
9/22/2010	4:28:22 PM	Helium MFC set to  0.000000
9/22/2010	4:28:22 PM	H2 MFC set to  0.000000
9/22/2010	4:28:22 PM	BCl3 MFC set to  0.000000
9/22/2010	4:28:22 PM	PHl3 MFC set to  0.000000
9/22/2010	4:28:22 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:28:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:28:22 PM	Tube furnace set to 0
9/22/2010	4:29:22 PM	H2 valve closed
9/22/2010	4:29:22 PM	BCl3 valve closed
9/22/2010	4:29:22 PM	PH3 valve closed
9/22/2010	4:29:22 PM	SiCl4 pre valve closed
9/22/2010	4:29:22 PM	SiCl4 post valve closed
9/22/2010	4:29:22 PM	Bubbler valve closed
9/22/2010	4:29:22 PM	Helium valve opened
9/22/2010	4:29:22 PM	Main Vac valve opened
9/22/2010	4:29:22 PM	Bypass valve opened
9/22/2010	4:29:22 PM	Helium MFC set to  100.000000
9/22/2010	4:29:22 PM	H2 MFC set to  0.000000
9/22/2010	4:29:22 PM	BCl3 MFC set to  0.000000
9/22/2010	4:29:22 PM	PHl3 MFC set to  0.000000
9/22/2010	4:29:22 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:29:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:29:23 PM	Tube furnace set to 0
9/22/2010	4:30:23 PM	Helium valve closed
9/22/2010	4:30:23 PM	H2 valve closed
9/22/2010	4:30:23 PM	BCl3 valve closed
9/22/2010	4:30:23 PM	PH3 valve closed
9/22/2010	4:30:23 PM	SiCl4 pre valve closed
9/22/2010	4:30:23 PM	SiCl4 post valve closed
9/22/2010	4:30:23 PM	Bubbler valve closed
9/22/2010	4:30:23 PM	Main Vac valve opened
9/22/2010	4:30:23 PM	Bypass valve opened
9/22/2010	4:30:23 PM	Helium MFC set to  0.000000
9/22/2010	4:30:23 PM	H2 MFC set to  0.000000
9/22/2010	4:30:23 PM	BCl3 MFC set to  0.000000
9/22/2010	4:30:23 PM	PHl3 MFC set to  0.000000
9/22/2010	4:30:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:30:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:30:23 PM	Tube furnace set to 0
9/22/2010	4:31:23 PM	H2 valve closed
9/22/2010	4:31:23 PM	BCl3 valve closed
9/22/2010	4:31:23 PM	PH3 valve closed
9/22/2010	4:31:23 PM	SiCl4 pre valve closed
9/22/2010	4:31:23 PM	SiCl4 post valve closed
9/22/2010	4:31:23 PM	Bubbler valve closed
9/22/2010	4:31:23 PM	Helium valve opened
9/22/2010	4:31:23 PM	Main Vac valve opened
9/22/2010	4:31:23 PM	Bypass valve opened
9/22/2010	4:31:23 PM	Helium MFC set to  100.000000
9/22/2010	4:31:23 PM	H2 MFC set to  0.000000
9/22/2010	4:31:23 PM	BCl3 MFC set to  0.000000
9/22/2010	4:31:23 PM	PHl3 MFC set to  0.000000
9/22/2010	4:31:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:31:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:31:23 PM	Tube furnace set to 0
9/22/2010	4:32:23 PM	Helium valve closed
9/22/2010	4:32:23 PM	H2 valve closed
9/22/2010	4:32:23 PM	BCl3 valve closed
9/22/2010	4:32:23 PM	PH3 valve closed
9/22/2010	4:32:23 PM	SiCl4 pre valve closed
9/22/2010	4:32:23 PM	SiCl4 post valve closed
9/22/2010	4:32:23 PM	Bubbler valve closed
9/22/2010	4:32:23 PM	Main Vac valve opened
9/22/2010	4:32:23 PM	Bypass valve opened
9/22/2010	4:32:23 PM	Helium MFC set to  0.000000
9/22/2010	4:32:23 PM	H2 MFC set to  0.000000
9/22/2010	4:32:23 PM	BCl3 MFC set to  0.000000
9/22/2010	4:32:23 PM	PHl3 MFC set to  0.000000
9/22/2010	4:32:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:32:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:32:23 PM	Tube furnace set to 0
9/22/2010	4:33:23 PM	H2 valve closed
9/22/2010	4:33:23 PM	BCl3 valve closed
9/22/2010	4:33:23 PM	PH3 valve closed
9/22/2010	4:33:23 PM	SiCl4 pre valve closed
9/22/2010	4:33:23 PM	SiCl4 post valve closed
9/22/2010	4:33:23 PM	Bubbler valve closed
9/22/2010	4:33:23 PM	Helium valve opened
9/22/2010	4:33:23 PM	Main Vac valve opened
9/22/2010	4:33:23 PM	Bypass valve opened
9/22/2010	4:33:23 PM	Helium MFC set to  100.000000
9/22/2010	4:33:23 PM	H2 MFC set to  0.000000
9/22/2010	4:33:23 PM	BCl3 MFC set to  0.000000
9/22/2010	4:33:23 PM	PHl3 MFC set to  0.000000
9/22/2010	4:33:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:33:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:33:23 PM	Tube furnace set to 0
9/22/2010	4:34:23 PM	Helium valve closed
9/22/2010	4:34:23 PM	H2 valve closed
9/22/2010	4:34:23 PM	BCl3 valve closed
9/22/2010	4:34:23 PM	PH3 valve closed
9/22/2010	4:34:23 PM	SiCl4 pre valve closed
9/22/2010	4:34:23 PM	SiCl4 post valve closed
9/22/2010	4:34:23 PM	Bubbler valve closed
9/22/2010	4:34:23 PM	Main Vac valve opened
9/22/2010	4:34:23 PM	Bypass valve opened
9/22/2010	4:34:23 PM	Helium MFC set to  0.000000
9/22/2010	4:34:23 PM	H2 MFC set to  0.000000
9/22/2010	4:34:23 PM	BCl3 MFC set to  0.000000
9/22/2010	4:34:23 PM	PHl3 MFC set to  0.000000
9/22/2010	4:34:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:34:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:34:23 PM	Tube furnace set to 0
9/22/2010	4:35:24 PM	H2 valve closed
9/22/2010	4:35:24 PM	BCl3 valve closed
9/22/2010	4:35:24 PM	PH3 valve closed
9/22/2010	4:35:24 PM	SiCl4 pre valve closed
9/22/2010	4:35:24 PM	SiCl4 post valve closed
9/22/2010	4:35:24 PM	Bubbler valve closed
9/22/2010	4:35:24 PM	Helium valve opened
9/22/2010	4:35:24 PM	Main Vac valve opened
9/22/2010	4:35:24 PM	Bypass valve opened
9/22/2010	4:35:24 PM	Helium MFC set to  100.000000
9/22/2010	4:35:24 PM	H2 MFC set to  0.000000
9/22/2010	4:35:24 PM	BCl3 MFC set to  0.000000
9/22/2010	4:35:24 PM	PHl3 MFC set to  0.000000
9/22/2010	4:35:24 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:35:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:35:24 PM	Tube furnace set to 0
9/22/2010	4:36:24 PM	Helium valve closed
9/22/2010	4:36:24 PM	H2 valve closed
9/22/2010	4:36:24 PM	BCl3 valve closed
9/22/2010	4:36:24 PM	PH3 valve closed
9/22/2010	4:36:24 PM	SiCl4 pre valve closed
9/22/2010	4:36:24 PM	SiCl4 post valve closed
9/22/2010	4:36:24 PM	Bubbler valve closed
9/22/2010	4:36:24 PM	Main Vac valve opened
9/22/2010	4:36:24 PM	Bypass valve opened
9/22/2010	4:36:24 PM	Helium MFC set to  0.000000
9/22/2010	4:36:24 PM	H2 MFC set to  0.000000
9/22/2010	4:36:24 PM	BCl3 MFC set to  0.000000
9/22/2010	4:36:24 PM	PHl3 MFC set to  0.000000
9/22/2010	4:36:24 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:36:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:36:24 PM	Tube furnace set to 0
9/22/2010	4:37:24 PM	H2 valve closed
9/22/2010	4:37:24 PM	BCl3 valve closed
9/22/2010	4:37:24 PM	PH3 valve closed
9/22/2010	4:37:24 PM	SiCl4 pre valve closed
9/22/2010	4:37:24 PM	SiCl4 post valve closed
9/22/2010	4:37:24 PM	Bubbler valve closed
9/22/2010	4:37:24 PM	Helium valve opened
9/22/2010	4:37:24 PM	Main Vac valve opened
9/22/2010	4:37:24 PM	Bypass valve opened
9/22/2010	4:37:24 PM	Helium MFC set to  100.000000
9/22/2010	4:37:24 PM	H2 MFC set to  0.000000
9/22/2010	4:37:24 PM	BCl3 MFC set to  0.000000
9/22/2010	4:37:24 PM	PHl3 MFC set to  0.000000
9/22/2010	4:37:24 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:37:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:37:24 PM	Tube furnace set to 0
9/22/2010	4:38:24 PM	Helium valve closed
9/22/2010	4:38:24 PM	H2 valve closed
9/22/2010	4:38:24 PM	BCl3 valve closed
9/22/2010	4:38:24 PM	PH3 valve closed
9/22/2010	4:38:24 PM	SiCl4 pre valve closed
9/22/2010	4:38:24 PM	SiCl4 post valve closed
9/22/2010	4:38:24 PM	Bubbler valve closed
9/22/2010	4:38:24 PM	Main Vac valve opened
9/22/2010	4:38:24 PM	Bypass valve opened
9/22/2010	4:38:24 PM	Helium MFC set to  0.000000
9/22/2010	4:38:24 PM	H2 MFC set to  0.000000
9/22/2010	4:38:24 PM	BCl3 MFC set to  0.000000
9/22/2010	4:38:24 PM	PHl3 MFC set to  0.000000
9/22/2010	4:38:24 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:38:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:38:24 PM	Tube furnace set to 0
9/22/2010	4:39:24 PM	H2 valve closed
9/22/2010	4:39:24 PM	BCl3 valve closed
9/22/2010	4:39:24 PM	PH3 valve closed
9/22/2010	4:39:24 PM	SiCl4 pre valve closed
9/22/2010	4:39:24 PM	SiCl4 post valve closed
9/22/2010	4:39:24 PM	Bubbler valve closed
9/22/2010	4:39:24 PM	Helium valve opened
9/22/2010	4:39:24 PM	Main Vac valve opened
9/22/2010	4:39:24 PM	Bypass valve opened
9/22/2010	4:39:24 PM	Helium MFC set to  100.000000
9/22/2010	4:39:24 PM	H2 MFC set to  0.000000
9/22/2010	4:39:24 PM	BCl3 MFC set to  0.000000
9/22/2010	4:39:24 PM	PHl3 MFC set to  0.000000
9/22/2010	4:39:24 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:39:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:39:24 PM	Tube furnace set to 0
9/22/2010	4:40:24 PM	Helium valve closed
9/22/2010	4:40:24 PM	H2 valve closed
9/22/2010	4:40:25 PM	BCl3 valve closed
9/22/2010	4:40:25 PM	PH3 valve closed
9/22/2010	4:40:25 PM	SiCl4 pre valve closed
9/22/2010	4:40:25 PM	SiCl4 post valve closed
9/22/2010	4:40:25 PM	Bubbler valve closed
9/22/2010	4:40:25 PM	Main Vac valve opened
9/22/2010	4:40:25 PM	Bypass valve opened
9/22/2010	4:40:25 PM	Helium MFC set to  0.000000
9/22/2010	4:40:25 PM	H2 MFC set to  0.000000
9/22/2010	4:40:25 PM	BCl3 MFC set to  0.000000
9/22/2010	4:40:25 PM	PHl3 MFC set to  0.000000
9/22/2010	4:40:25 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:40:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:40:25 PM	Tube furnace set to 0
9/22/2010	4:41:25 PM	H2 valve closed
9/22/2010	4:41:25 PM	BCl3 valve closed
9/22/2010	4:41:25 PM	PH3 valve closed
9/22/2010	4:41:25 PM	SiCl4 pre valve closed
9/22/2010	4:41:25 PM	SiCl4 post valve closed
9/22/2010	4:41:25 PM	Bubbler valve closed
9/22/2010	4:41:25 PM	Helium valve opened
9/22/2010	4:41:25 PM	Main Vac valve opened
9/22/2010	4:41:25 PM	Bypass valve opened
9/22/2010	4:41:25 PM	Helium MFC set to  100.000000
9/22/2010	4:41:25 PM	H2 MFC set to  0.000000
9/22/2010	4:41:25 PM	BCl3 MFC set to  0.000000
9/22/2010	4:41:25 PM	PHl3 MFC set to  0.000000
9/22/2010	4:41:25 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:41:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:41:25 PM	Tube furnace set to 0
9/22/2010	4:42:25 PM	Helium valve closed
9/22/2010	4:42:25 PM	H2 valve closed
9/22/2010	4:42:25 PM	BCl3 valve closed
9/22/2010	4:42:25 PM	PH3 valve closed
9/22/2010	4:42:25 PM	SiCl4 pre valve closed
9/22/2010	4:42:25 PM	SiCl4 post valve closed
9/22/2010	4:42:25 PM	Bubbler valve closed
9/22/2010	4:42:25 PM	Main Vac valve opened
9/22/2010	4:42:25 PM	Bypass valve opened
9/22/2010	4:42:25 PM	Helium MFC set to  0.000000
9/22/2010	4:42:25 PM	H2 MFC set to  0.000000
9/22/2010	4:42:25 PM	BCl3 MFC set to  0.000000
9/22/2010	4:42:25 PM	PHl3 MFC set to  0.000000
9/22/2010	4:42:25 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:42:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:42:25 PM	Tube furnace set to 0
9/22/2010	4:43:25 PM	H2 valve closed
9/22/2010	4:43:25 PM	BCl3 valve closed
9/22/2010	4:43:25 PM	PH3 valve closed
9/22/2010	4:43:25 PM	SiCl4 pre valve closed
9/22/2010	4:43:25 PM	SiCl4 post valve closed
9/22/2010	4:43:25 PM	Bubbler valve closed
9/22/2010	4:43:25 PM	Helium valve opened
9/22/2010	4:43:25 PM	Main Vac valve opened
9/22/2010	4:43:25 PM	Bypass valve opened
9/22/2010	4:43:25 PM	Helium MFC set to  100.000000
9/22/2010	4:43:25 PM	H2 MFC set to  0.000000
9/22/2010	4:43:25 PM	BCl3 MFC set to  0.000000
9/22/2010	4:43:25 PM	PHl3 MFC set to  0.000000
9/22/2010	4:43:25 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:43:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:43:25 PM	Tube furnace set to 0
9/22/2010	4:44:25 PM	Helium valve closed
9/22/2010	4:44:25 PM	H2 valve closed
9/22/2010	4:44:25 PM	BCl3 valve closed
9/22/2010	4:44:25 PM	PH3 valve closed
9/22/2010	4:44:25 PM	SiCl4 pre valve closed
9/22/2010	4:44:25 PM	SiCl4 post valve closed
9/22/2010	4:44:25 PM	Bubbler valve closed
9/22/2010	4:44:25 PM	Main Vac valve opened
9/22/2010	4:44:25 PM	Bypass valve opened
9/22/2010	4:44:25 PM	Helium MFC set to  0.000000
9/22/2010	4:44:25 PM	H2 MFC set to  0.000000
9/22/2010	4:44:25 PM	BCl3 MFC set to  0.000000
9/22/2010	4:44:25 PM	PHl3 MFC set to  0.000000
9/22/2010	4:44:25 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:44:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:44:25 PM	Tube furnace set to 0
9/22/2010	4:44:26 PM	Run finished at 4:44 PM
9/22/2010	4:44:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	4:52:48 PM	Recipe started at 4:52 PM
9/22/2010	4:52:48 PM	Helium valve closed
9/22/2010	4:52:48 PM	BCl3 valve closed
9/22/2010	4:52:48 PM	PH3 valve closed
9/22/2010	4:52:48 PM	SiCl4 pre valve closed
9/22/2010	4:52:48 PM	SiCl4 post valve closed
9/22/2010	4:52:48 PM	Main Vac valve closed
9/22/2010	4:52:48 PM	Bypass valve closed
9/22/2010	4:52:48 PM	Bubbler valve closed
9/22/2010	4:52:48 PM	H2 valve opened
9/22/2010	4:52:48 PM	Helium MFC set to  0.000000
9/22/2010	4:52:48 PM	H2 MFC set to  500.000000
9/22/2010	4:52:48 PM	BCl3 MFC set to  0.000000
9/22/2010	4:52:48 PM	PHl3 MFC set to  0.000000
9/22/2010	4:52:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:52:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:52:48 PM	Tube furnace set to 0
9/22/2010	4:54:06 PM	Helium valve closed
9/22/2010	4:54:06 PM	BCl3 valve closed
9/22/2010	4:54:06 PM	PH3 valve closed
9/22/2010	4:54:06 PM	SiCl4 pre valve closed
9/22/2010	4:54:06 PM	SiCl4 post valve closed
9/22/2010	4:54:06 PM	Main Vac valve closed
9/22/2010	4:54:06 PM	Bypass valve closed
9/22/2010	4:54:06 PM	H2 valve opened
9/22/2010	4:54:06 PM	Bubbler valve opened
9/22/2010	4:54:06 PM	Helium MFC set to  0.000000
9/22/2010	4:54:06 PM	H2 MFC set to  500.000000
9/22/2010	4:54:06 PM	BCl3 MFC set to  0.000000
9/22/2010	4:54:06 PM	PHl3 MFC set to  0.000000
9/22/2010	4:54:06 PM	SiCl4 MFC set to  0.000000
9/22/2010	4:54:06 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	4:54:07 PM	Tube furnace set to 1000
9/22/2010	5:14:07 PM	Helium valve closed
9/22/2010	5:14:07 PM	BCl3 valve closed
9/22/2010	5:14:07 PM	Main Vac valve closed
9/22/2010	5:14:07 PM	Bypass valve closed
9/22/2010	5:14:07 PM	H2 valve opened
9/22/2010	5:14:07 PM	PH3 valve opened
9/22/2010	5:14:07 PM	SiCl4 pre valve opened
9/22/2010	5:14:07 PM	SiCl4 post valve opened
9/22/2010	5:14:07 PM	Bubbler valve opened
9/22/2010	5:14:07 PM	Helium MFC set to  0.000000
9/22/2010	5:14:07 PM	H2 MFC set to  500.000000
9/22/2010	5:14:07 PM	BCl3 MFC set to  0.000000
9/22/2010	5:14:07 PM	PHl3 MFC set to  1.000000
9/22/2010	5:14:07 PM	SiCl4 MFC set to  50.000000
9/22/2010	5:14:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	5:14:07 PM	Tube furnace set to 1000
9/22/2010	5:34:07 PM	H2 valve closed
9/22/2010	5:34:07 PM	BCl3 valve closed
9/22/2010	5:34:07 PM	PH3 valve closed
9/22/2010	5:34:07 PM	SiCl4 pre valve closed
9/22/2010	5:34:07 PM	SiCl4 post valve closed
9/22/2010	5:34:07 PM	Main Vac valve closed
9/22/2010	5:34:07 PM	Bypass valve closed
9/22/2010	5:34:07 PM	Helium valve opened
9/22/2010	5:34:07 PM	Bubbler valve opened
9/22/2010	5:34:07 PM	Helium MFC set to  500.000000
9/22/2010	5:34:07 PM	H2 MFC set to  0.000000
9/22/2010	5:34:07 PM	BCl3 MFC set to  0.000000
9/22/2010	5:34:07 PM	PHl3 MFC set to  0.000000
9/22/2010	5:34:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	5:34:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	5:34:07 PM	Tube furnace set to 0
9/22/2010	5:54:07 PM	Helium valve closed
9/22/2010	5:54:07 PM	H2 valve closed
9/22/2010	5:54:07 PM	BCl3 valve closed
9/22/2010	5:54:07 PM	PH3 valve closed
9/22/2010	5:54:07 PM	SiCl4 pre valve closed
9/22/2010	5:54:07 PM	SiCl4 post valve closed
9/22/2010	5:54:07 PM	Main Vac valve closed
9/22/2010	5:54:07 PM	Bypass valve closed
9/22/2010	5:54:07 PM	Bubbler valve closed
9/22/2010	5:54:07 PM	Helium MFC set to  0.000000
9/22/2010	5:54:07 PM	H2 MFC set to  0.000000
9/22/2010	5:54:07 PM	BCl3 MFC set to  0.000000
9/22/2010	5:54:07 PM	PHl3 MFC set to  0.000000
9/22/2010	5:54:07 PM	SiCl4 MFC set to  0.000000
9/22/2010	5:54:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	5:54:07 PM	Tube furnace set to 0
9/22/2010	5:54:07 PM	Run finished at 5:54 PM
9/22/2010	6:21:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	6:21:26 PM	Recipe started at 6:21 PM
9/22/2010	6:21:26 PM	Helium valve closed
9/22/2010	6:21:26 PM	H2 valve closed
9/22/2010	6:21:26 PM	BCl3 valve closed
9/22/2010	6:21:26 PM	PH3 valve closed
9/22/2010	6:21:26 PM	SiCl4 pre valve closed
9/22/2010	6:21:26 PM	SiCl4 post valve closed
9/22/2010	6:21:26 PM	Main Vac valve closed
9/22/2010	6:21:26 PM	Bubbler valve closed
9/22/2010	6:21:26 PM	Bypass valve opened
9/22/2010	6:21:26 PM	Helium MFC set to  0.000000
9/22/2010	6:21:26 PM	H2 MFC set to  0.000000
9/22/2010	6:21:26 PM	BCl3 MFC set to  0.000000
9/22/2010	6:21:26 PM	PHl3 MFC set to  0.000000
9/22/2010	6:21:26 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:21:26 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:21:27 PM	Tube furnace set to 0
9/22/2010	6:22:08 PM	Helium valve closed
9/22/2010	6:22:08 PM	H2 valve closed
9/22/2010	6:22:08 PM	BCl3 valve closed
9/22/2010	6:22:08 PM	PH3 valve closed
9/22/2010	6:22:08 PM	SiCl4 pre valve closed
9/22/2010	6:22:08 PM	SiCl4 post valve closed
9/22/2010	6:22:08 PM	Bubbler valve closed
9/22/2010	6:22:08 PM	Main Vac valve opened
9/22/2010	6:22:08 PM	Bypass valve opened
9/22/2010	6:22:08 PM	Helium MFC set to  0.000000
9/22/2010	6:22:08 PM	H2 MFC set to  0.000000
9/22/2010	6:22:08 PM	BCl3 MFC set to  0.000000
9/22/2010	6:22:08 PM	PHl3 MFC set to  0.000000
9/22/2010	6:22:08 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:22:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:22:08 PM	Tube furnace set to 0
9/22/2010	6:22:08 PM	Run finished at 6:22 PM
9/22/2010	6:22:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	6:23:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	6:23:14 PM	Recipe started at 6:23 PM
9/22/2010	6:23:14 PM	Helium valve closed
9/22/2010	6:23:14 PM	H2 valve closed
9/22/2010	6:23:14 PM	BCl3 valve closed
9/22/2010	6:23:14 PM	PH3 valve closed
9/22/2010	6:23:14 PM	SiCl4 pre valve closed
9/22/2010	6:23:14 PM	SiCl4 post valve closed
9/22/2010	6:23:14 PM	Main Vac valve closed
9/22/2010	6:23:14 PM	Bubbler valve closed
9/22/2010	6:23:14 PM	Bypass valve opened
9/22/2010	6:23:14 PM	Helium MFC set to  0.000000
9/22/2010	6:23:14 PM	H2 MFC set to  0.000000
9/22/2010	6:23:14 PM	BCl3 MFC set to  0.000000
9/22/2010	6:23:14 PM	PHl3 MFC set to  0.000000
9/22/2010	6:23:14 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:23:14 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:23:14 PM	Tube furnace set to 0
9/22/2010	6:23:14 PM	Helium valve closed
9/22/2010	6:23:14 PM	H2 valve closed
9/22/2010	6:23:14 PM	BCl3 valve closed
9/22/2010	6:23:14 PM	PH3 valve closed
9/22/2010	6:23:14 PM	SiCl4 pre valve closed
9/22/2010	6:23:14 PM	SiCl4 post valve closed
9/22/2010	6:23:14 PM	Bubbler valve closed
9/22/2010	6:23:14 PM	Main Vac valve opened
9/22/2010	6:23:14 PM	Bypass valve opened
9/22/2010	6:23:14 PM	Helium MFC set to  0.000000
9/22/2010	6:23:14 PM	H2 MFC set to  0.000000
9/22/2010	6:23:14 PM	BCl3 MFC set to  0.000000
9/22/2010	6:23:14 PM	PHl3 MFC set to  0.000000
9/22/2010	6:23:14 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:23:14 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:23:14 PM	Tube furnace set to 0
9/22/2010	6:23:15 PM	Run finished at 6:23 PM
9/22/2010	6:23:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	6:23:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	6:23:37 PM	Recipe started at 6:23 PM
9/22/2010	6:23:37 PM	Helium valve closed
9/22/2010	6:23:37 PM	H2 valve closed
9/22/2010	6:23:37 PM	BCl3 valve closed
9/22/2010	6:23:37 PM	PH3 valve closed
9/22/2010	6:23:37 PM	SiCl4 pre valve closed
9/22/2010	6:23:37 PM	SiCl4 post valve closed
9/22/2010	6:23:37 PM	Main Vac valve closed
9/22/2010	6:23:37 PM	Bubbler valve closed
9/22/2010	6:23:37 PM	Bypass valve opened
9/22/2010	6:23:37 PM	Helium MFC set to  0.000000
9/22/2010	6:23:37 PM	H2 MFC set to  0.000000
9/22/2010	6:23:37 PM	BCl3 MFC set to  0.000000
9/22/2010	6:23:37 PM	PHl3 MFC set to  0.000000
9/22/2010	6:23:37 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:23:37 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:23:38 PM	Tube furnace set to 0
9/22/2010	6:23:38 PM	Helium valve closed
9/22/2010	6:23:38 PM	H2 valve closed
9/22/2010	6:23:38 PM	BCl3 valve closed
9/22/2010	6:23:38 PM	PH3 valve closed
9/22/2010	6:23:38 PM	SiCl4 pre valve closed
9/22/2010	6:23:38 PM	SiCl4 post valve closed
9/22/2010	6:23:38 PM	Bubbler valve closed
9/22/2010	6:23:38 PM	Main Vac valve opened
9/22/2010	6:23:38 PM	Bypass valve opened
9/22/2010	6:23:38 PM	Helium MFC set to  0.000000
9/22/2010	6:23:38 PM	H2 MFC set to  0.000000
9/22/2010	6:23:38 PM	BCl3 MFC set to  0.000000
9/22/2010	6:23:38 PM	PHl3 MFC set to  0.000000
9/22/2010	6:23:38 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:23:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:23:38 PM	Tube furnace set to 0
9/22/2010	6:24:38 PM	H2 valve closed
9/22/2010	6:24:38 PM	BCl3 valve closed
9/22/2010	6:24:38 PM	PH3 valve closed
9/22/2010	6:24:38 PM	SiCl4 pre valve closed
9/22/2010	6:24:38 PM	SiCl4 post valve closed
9/22/2010	6:24:38 PM	Bubbler valve closed
9/22/2010	6:24:38 PM	Helium valve opened
9/22/2010	6:24:38 PM	Main Vac valve opened
9/22/2010	6:24:38 PM	Bypass valve opened
9/22/2010	6:24:38 PM	Helium MFC set to  100.000000
9/22/2010	6:24:38 PM	H2 MFC set to  0.000000
9/22/2010	6:24:38 PM	BCl3 MFC set to  0.000000
9/22/2010	6:24:38 PM	PHl3 MFC set to  0.000000
9/22/2010	6:24:38 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:24:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:24:38 PM	Tube furnace set to 0
9/22/2010	6:25:38 PM	Helium valve closed
9/22/2010	6:25:38 PM	H2 valve closed
9/22/2010	6:25:38 PM	BCl3 valve closed
9/22/2010	6:25:38 PM	PH3 valve closed
9/22/2010	6:25:38 PM	SiCl4 pre valve closed
9/22/2010	6:25:38 PM	SiCl4 post valve closed
9/22/2010	6:25:38 PM	Bubbler valve closed
9/22/2010	6:25:38 PM	Main Vac valve opened
9/22/2010	6:25:38 PM	Bypass valve opened
9/22/2010	6:25:38 PM	Helium MFC set to  0.000000
9/22/2010	6:25:38 PM	H2 MFC set to  0.000000
9/22/2010	6:25:38 PM	BCl3 MFC set to  0.000000
9/22/2010	6:25:38 PM	PHl3 MFC set to  0.000000
9/22/2010	6:25:38 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:25:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:25:38 PM	Tube furnace set to 0
9/22/2010	6:26:38 PM	H2 valve closed
9/22/2010	6:26:38 PM	BCl3 valve closed
9/22/2010	6:26:38 PM	PH3 valve closed
9/22/2010	6:26:38 PM	SiCl4 pre valve closed
9/22/2010	6:26:38 PM	SiCl4 post valve closed
9/22/2010	6:26:38 PM	Bubbler valve closed
9/22/2010	6:26:38 PM	Helium valve opened
9/22/2010	6:26:38 PM	Main Vac valve opened
9/22/2010	6:26:38 PM	Bypass valve opened
9/22/2010	6:26:38 PM	Helium MFC set to  100.000000
9/22/2010	6:26:38 PM	H2 MFC set to  0.000000
9/22/2010	6:26:38 PM	BCl3 MFC set to  0.000000
9/22/2010	6:26:38 PM	PHl3 MFC set to  0.000000
9/22/2010	6:26:38 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:26:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:26:39 PM	Tube furnace set to 0
9/22/2010	6:27:39 PM	Helium valve closed
9/22/2010	6:27:39 PM	H2 valve closed
9/22/2010	6:27:39 PM	BCl3 valve closed
9/22/2010	6:27:39 PM	PH3 valve closed
9/22/2010	6:27:39 PM	SiCl4 pre valve closed
9/22/2010	6:27:39 PM	SiCl4 post valve closed
9/22/2010	6:27:39 PM	Bubbler valve closed
9/22/2010	6:27:39 PM	Main Vac valve opened
9/22/2010	6:27:39 PM	Bypass valve opened
9/22/2010	6:27:39 PM	Helium MFC set to  0.000000
9/22/2010	6:27:39 PM	H2 MFC set to  0.000000
9/22/2010	6:27:39 PM	BCl3 MFC set to  0.000000
9/22/2010	6:27:39 PM	PHl3 MFC set to  0.000000
9/22/2010	6:27:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:27:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:27:39 PM	Tube furnace set to 0
9/22/2010	6:28:39 PM	H2 valve closed
9/22/2010	6:28:39 PM	BCl3 valve closed
9/22/2010	6:28:39 PM	PH3 valve closed
9/22/2010	6:28:39 PM	SiCl4 pre valve closed
9/22/2010	6:28:39 PM	SiCl4 post valve closed
9/22/2010	6:28:39 PM	Bubbler valve closed
9/22/2010	6:28:39 PM	Helium valve opened
9/22/2010	6:28:39 PM	Main Vac valve opened
9/22/2010	6:28:39 PM	Bypass valve opened
9/22/2010	6:28:39 PM	Helium MFC set to  100.000000
9/22/2010	6:28:39 PM	H2 MFC set to  0.000000
9/22/2010	6:28:39 PM	BCl3 MFC set to  0.000000
9/22/2010	6:28:39 PM	PHl3 MFC set to  0.000000
9/22/2010	6:28:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:28:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:28:39 PM	Tube furnace set to 0
9/22/2010	6:29:39 PM	Helium valve closed
9/22/2010	6:29:39 PM	H2 valve closed
9/22/2010	6:29:39 PM	BCl3 valve closed
9/22/2010	6:29:39 PM	PH3 valve closed
9/22/2010	6:29:39 PM	SiCl4 pre valve closed
9/22/2010	6:29:39 PM	SiCl4 post valve closed
9/22/2010	6:29:39 PM	Bubbler valve closed
9/22/2010	6:29:39 PM	Main Vac valve opened
9/22/2010	6:29:39 PM	Bypass valve opened
9/22/2010	6:29:39 PM	Helium MFC set to  0.000000
9/22/2010	6:29:39 PM	H2 MFC set to  0.000000
9/22/2010	6:29:39 PM	BCl3 MFC set to  0.000000
9/22/2010	6:29:39 PM	PHl3 MFC set to  0.000000
9/22/2010	6:29:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:29:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:29:39 PM	Tube furnace set to 0
9/22/2010	6:30:39 PM	H2 valve closed
9/22/2010	6:30:39 PM	BCl3 valve closed
9/22/2010	6:30:39 PM	PH3 valve closed
9/22/2010	6:30:39 PM	SiCl4 pre valve closed
9/22/2010	6:30:39 PM	SiCl4 post valve closed
9/22/2010	6:30:39 PM	Bubbler valve closed
9/22/2010	6:30:39 PM	Helium valve opened
9/22/2010	6:30:39 PM	Main Vac valve opened
9/22/2010	6:30:39 PM	Bypass valve opened
9/22/2010	6:30:39 PM	Helium MFC set to  100.000000
9/22/2010	6:30:39 PM	H2 MFC set to  0.000000
9/22/2010	6:30:39 PM	BCl3 MFC set to  0.000000
9/22/2010	6:30:39 PM	PHl3 MFC set to  0.000000
9/22/2010	6:30:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:30:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:30:39 PM	Tube furnace set to 0
9/22/2010	6:31:39 PM	Helium valve closed
9/22/2010	6:31:39 PM	H2 valve closed
9/22/2010	6:31:39 PM	BCl3 valve closed
9/22/2010	6:31:39 PM	PH3 valve closed
9/22/2010	6:31:39 PM	SiCl4 pre valve closed
9/22/2010	6:31:39 PM	SiCl4 post valve closed
9/22/2010	6:31:39 PM	Bubbler valve closed
9/22/2010	6:31:39 PM	Main Vac valve opened
9/22/2010	6:31:39 PM	Bypass valve opened
9/22/2010	6:31:39 PM	Helium MFC set to  0.000000
9/22/2010	6:31:39 PM	H2 MFC set to  0.000000
9/22/2010	6:31:39 PM	BCl3 MFC set to  0.000000
9/22/2010	6:31:39 PM	PHl3 MFC set to  0.000000
9/22/2010	6:31:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:31:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:31:40 PM	Tube furnace set to 0
9/22/2010	6:32:40 PM	H2 valve closed
9/22/2010	6:32:40 PM	BCl3 valve closed
9/22/2010	6:32:40 PM	PH3 valve closed
9/22/2010	6:32:40 PM	SiCl4 pre valve closed
9/22/2010	6:32:40 PM	SiCl4 post valve closed
9/22/2010	6:32:40 PM	Bubbler valve closed
9/22/2010	6:32:40 PM	Helium valve opened
9/22/2010	6:32:40 PM	Main Vac valve opened
9/22/2010	6:32:40 PM	Bypass valve opened
9/22/2010	6:32:40 PM	Helium MFC set to  100.000000
9/22/2010	6:32:40 PM	H2 MFC set to  0.000000
9/22/2010	6:32:40 PM	BCl3 MFC set to  0.000000
9/22/2010	6:32:40 PM	PHl3 MFC set to  0.000000
9/22/2010	6:32:40 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:32:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:32:40 PM	Tube furnace set to 0
9/22/2010	6:33:40 PM	Helium valve closed
9/22/2010	6:33:40 PM	H2 valve closed
9/22/2010	6:33:40 PM	BCl3 valve closed
9/22/2010	6:33:40 PM	PH3 valve closed
9/22/2010	6:33:40 PM	SiCl4 pre valve closed
9/22/2010	6:33:40 PM	SiCl4 post valve closed
9/22/2010	6:33:40 PM	Bubbler valve closed
9/22/2010	6:33:40 PM	Main Vac valve opened
9/22/2010	6:33:40 PM	Bypass valve opened
9/22/2010	6:33:40 PM	Helium MFC set to  0.000000
9/22/2010	6:33:40 PM	H2 MFC set to  0.000000
9/22/2010	6:33:40 PM	BCl3 MFC set to  0.000000
9/22/2010	6:33:40 PM	PHl3 MFC set to  0.000000
9/22/2010	6:33:40 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:33:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:33:40 PM	Tube furnace set to 0
9/22/2010	6:34:40 PM	H2 valve closed
9/22/2010	6:34:40 PM	BCl3 valve closed
9/22/2010	6:34:40 PM	PH3 valve closed
9/22/2010	6:34:40 PM	SiCl4 pre valve closed
9/22/2010	6:34:40 PM	SiCl4 post valve closed
9/22/2010	6:34:40 PM	Bubbler valve closed
9/22/2010	6:34:40 PM	Helium valve opened
9/22/2010	6:34:40 PM	Main Vac valve opened
9/22/2010	6:34:40 PM	Bypass valve opened
9/22/2010	6:34:40 PM	Helium MFC set to  100.000000
9/22/2010	6:34:40 PM	H2 MFC set to  0.000000
9/22/2010	6:34:40 PM	BCl3 MFC set to  0.000000
9/22/2010	6:34:40 PM	PHl3 MFC set to  0.000000
9/22/2010	6:34:40 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:34:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:34:40 PM	Tube furnace set to 0
9/22/2010	6:35:40 PM	Helium valve closed
9/22/2010	6:35:40 PM	H2 valve closed
9/22/2010	6:35:40 PM	BCl3 valve closed
9/22/2010	6:35:40 PM	PH3 valve closed
9/22/2010	6:35:40 PM	SiCl4 pre valve closed
9/22/2010	6:35:40 PM	SiCl4 post valve closed
9/22/2010	6:35:40 PM	Bubbler valve closed
9/22/2010	6:35:40 PM	Main Vac valve opened
9/22/2010	6:35:40 PM	Bypass valve opened
9/22/2010	6:35:40 PM	Helium MFC set to  0.000000
9/22/2010	6:35:40 PM	H2 MFC set to  0.000000
9/22/2010	6:35:40 PM	BCl3 MFC set to  0.000000
9/22/2010	6:35:40 PM	PHl3 MFC set to  0.000000
9/22/2010	6:35:40 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:35:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:35:40 PM	Tube furnace set to 0
9/22/2010	6:36:40 PM	H2 valve closed
9/22/2010	6:36:40 PM	BCl3 valve closed
9/22/2010	6:36:40 PM	PH3 valve closed
9/22/2010	6:36:40 PM	SiCl4 pre valve closed
9/22/2010	6:36:40 PM	SiCl4 post valve closed
9/22/2010	6:36:40 PM	Bubbler valve closed
9/22/2010	6:36:40 PM	Helium valve opened
9/22/2010	6:36:40 PM	Main Vac valve opened
9/22/2010	6:36:40 PM	Bypass valve opened
9/22/2010	6:36:40 PM	Helium MFC set to  100.000000
9/22/2010	6:36:40 PM	H2 MFC set to  0.000000
9/22/2010	6:36:40 PM	BCl3 MFC set to  0.000000
9/22/2010	6:36:40 PM	PHl3 MFC set to  0.000000
9/22/2010	6:36:40 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:36:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:36:41 PM	Tube furnace set to 0
9/22/2010	6:37:41 PM	Helium valve closed
9/22/2010	6:37:41 PM	H2 valve closed
9/22/2010	6:37:41 PM	BCl3 valve closed
9/22/2010	6:37:41 PM	PH3 valve closed
9/22/2010	6:37:41 PM	SiCl4 pre valve closed
9/22/2010	6:37:41 PM	SiCl4 post valve closed
9/22/2010	6:37:41 PM	Bubbler valve closed
9/22/2010	6:37:41 PM	Main Vac valve opened
9/22/2010	6:37:41 PM	Bypass valve opened
9/22/2010	6:37:41 PM	Helium MFC set to  0.000000
9/22/2010	6:37:41 PM	H2 MFC set to  0.000000
9/22/2010	6:37:41 PM	BCl3 MFC set to  0.000000
9/22/2010	6:37:41 PM	PHl3 MFC set to  0.000000
9/22/2010	6:37:41 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:37:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:37:41 PM	Tube furnace set to 0
9/22/2010	6:38:41 PM	H2 valve closed
9/22/2010	6:38:41 PM	BCl3 valve closed
9/22/2010	6:38:41 PM	PH3 valve closed
9/22/2010	6:38:41 PM	SiCl4 pre valve closed
9/22/2010	6:38:41 PM	SiCl4 post valve closed
9/22/2010	6:38:41 PM	Bubbler valve closed
9/22/2010	6:38:41 PM	Helium valve opened
9/22/2010	6:38:41 PM	Main Vac valve opened
9/22/2010	6:38:41 PM	Bypass valve opened
9/22/2010	6:38:41 PM	Helium MFC set to  100.000000
9/22/2010	6:38:41 PM	H2 MFC set to  0.000000
9/22/2010	6:38:41 PM	BCl3 MFC set to  0.000000
9/22/2010	6:38:41 PM	PHl3 MFC set to  0.000000
9/22/2010	6:38:41 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:38:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:38:41 PM	Tube furnace set to 0
9/22/2010	6:39:41 PM	Helium valve closed
9/22/2010	6:39:41 PM	H2 valve closed
9/22/2010	6:39:41 PM	BCl3 valve closed
9/22/2010	6:39:41 PM	PH3 valve closed
9/22/2010	6:39:41 PM	SiCl4 pre valve closed
9/22/2010	6:39:41 PM	SiCl4 post valve closed
9/22/2010	6:39:41 PM	Bubbler valve closed
9/22/2010	6:39:41 PM	Main Vac valve opened
9/22/2010	6:39:41 PM	Bypass valve opened
9/22/2010	6:39:41 PM	Helium MFC set to  0.000000
9/22/2010	6:39:41 PM	H2 MFC set to  0.000000
9/22/2010	6:39:41 PM	BCl3 MFC set to  0.000000
9/22/2010	6:39:41 PM	PHl3 MFC set to  0.000000
9/22/2010	6:39:41 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:39:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:39:41 PM	Tube furnace set to 0
9/22/2010	6:40:41 PM	H2 valve closed
9/22/2010	6:40:41 PM	BCl3 valve closed
9/22/2010	6:40:41 PM	PH3 valve closed
9/22/2010	6:40:41 PM	SiCl4 pre valve closed
9/22/2010	6:40:41 PM	SiCl4 post valve closed
9/22/2010	6:40:41 PM	Bubbler valve closed
9/22/2010	6:40:41 PM	Helium valve opened
9/22/2010	6:40:41 PM	Main Vac valve opened
9/22/2010	6:40:41 PM	Bypass valve opened
9/22/2010	6:40:41 PM	Helium MFC set to  100.000000
9/22/2010	6:40:41 PM	H2 MFC set to  0.000000
9/22/2010	6:40:41 PM	BCl3 MFC set to  0.000000
9/22/2010	6:40:41 PM	PHl3 MFC set to  0.000000
9/22/2010	6:40:41 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:40:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:40:41 PM	Tube furnace set to 0
9/22/2010	6:41:41 PM	Helium valve closed
9/22/2010	6:41:41 PM	H2 valve closed
9/22/2010	6:41:41 PM	BCl3 valve closed
9/22/2010	6:41:41 PM	PH3 valve closed
9/22/2010	6:41:41 PM	SiCl4 pre valve closed
9/22/2010	6:41:41 PM	SiCl4 post valve closed
9/22/2010	6:41:41 PM	Bubbler valve closed
9/22/2010	6:41:41 PM	Main Vac valve opened
9/22/2010	6:41:41 PM	Bypass valve opened
9/22/2010	6:41:41 PM	Helium MFC set to  0.000000
9/22/2010	6:41:41 PM	H2 MFC set to  0.000000
9/22/2010	6:41:41 PM	BCl3 MFC set to  0.000000
9/22/2010	6:41:41 PM	PHl3 MFC set to  0.000000
9/22/2010	6:41:41 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:41:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:41:41 PM	Tube furnace set to 0
9/22/2010	6:42:42 PM	H2 valve closed
9/22/2010	6:42:42 PM	BCl3 valve closed
9/22/2010	6:42:42 PM	PH3 valve closed
9/22/2010	6:42:42 PM	SiCl4 pre valve closed
9/22/2010	6:42:42 PM	SiCl4 post valve closed
9/22/2010	6:42:42 PM	Bubbler valve closed
9/22/2010	6:42:42 PM	Helium valve opened
9/22/2010	6:42:42 PM	Main Vac valve opened
9/22/2010	6:42:42 PM	Bypass valve opened
9/22/2010	6:42:42 PM	Helium MFC set to  100.000000
9/22/2010	6:42:42 PM	H2 MFC set to  0.000000
9/22/2010	6:42:42 PM	BCl3 MFC set to  0.000000
9/22/2010	6:42:42 PM	PHl3 MFC set to  0.000000
9/22/2010	6:42:42 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:42:42 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:42:42 PM	Tube furnace set to 0
9/22/2010	6:43:42 PM	Helium valve closed
9/22/2010	6:43:42 PM	H2 valve closed
9/22/2010	6:43:42 PM	BCl3 valve closed
9/22/2010	6:43:42 PM	PH3 valve closed
9/22/2010	6:43:42 PM	SiCl4 pre valve closed
9/22/2010	6:43:42 PM	SiCl4 post valve closed
9/22/2010	6:43:42 PM	Bubbler valve closed
9/22/2010	6:43:42 PM	Main Vac valve opened
9/22/2010	6:43:42 PM	Bypass valve opened
9/22/2010	6:43:42 PM	Helium MFC set to  0.000000
9/22/2010	6:43:42 PM	H2 MFC set to  0.000000
9/22/2010	6:43:42 PM	BCl3 MFC set to  0.000000
9/22/2010	6:43:42 PM	PHl3 MFC set to  0.000000
9/22/2010	6:43:42 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:43:42 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:43:42 PM	Tube furnace set to 0
9/22/2010	6:43:43 PM	Run finished at 6:43 PM
9/22/2010	6:43:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	6:45:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	6:45:43 PM	Recipe started at 6:45 PM
9/22/2010	6:45:43 PM	Helium valve closed
9/22/2010	6:45:43 PM	H2 valve closed
9/22/2010	6:45:43 PM	BCl3 valve closed
9/22/2010	6:45:43 PM	PH3 valve closed
9/22/2010	6:45:43 PM	SiCl4 pre valve closed
9/22/2010	6:45:43 PM	SiCl4 post valve closed
9/22/2010	6:45:43 PM	Main Vac valve closed
9/22/2010	6:45:43 PM	Bubbler valve closed
9/22/2010	6:45:43 PM	Bypass valve opened
9/22/2010	6:45:43 PM	Helium MFC set to  0.000000
9/22/2010	6:45:43 PM	H2 MFC set to  0.000000
9/22/2010	6:45:43 PM	BCl3 MFC set to  0.000000
9/22/2010	6:45:43 PM	PHl3 MFC set to  0.000000
9/22/2010	6:45:43 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:45:43 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:45:43 PM	Tube furnace set to 0
9/22/2010	6:45:43 PM	Helium valve closed
9/22/2010	6:45:43 PM	H2 valve closed
9/22/2010	6:45:43 PM	BCl3 valve closed
9/22/2010	6:45:43 PM	PH3 valve closed
9/22/2010	6:45:43 PM	SiCl4 pre valve closed
9/22/2010	6:45:43 PM	SiCl4 post valve closed
9/22/2010	6:45:43 PM	Bubbler valve closed
9/22/2010	6:45:43 PM	Main Vac valve opened
9/22/2010	6:45:43 PM	Bypass valve opened
9/22/2010	6:45:43 PM	Helium MFC set to  0.000000
9/22/2010	6:45:43 PM	H2 MFC set to  0.000000
9/22/2010	6:45:43 PM	BCl3 MFC set to  0.000000
9/22/2010	6:45:43 PM	PHl3 MFC set to  0.000000
9/22/2010	6:45:43 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:45:43 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:45:43 PM	Tube furnace set to 0
9/22/2010	6:46:43 PM	H2 valve closed
9/22/2010	6:46:43 PM	BCl3 valve closed
9/22/2010	6:46:43 PM	PH3 valve closed
9/22/2010	6:46:43 PM	SiCl4 pre valve closed
9/22/2010	6:46:43 PM	SiCl4 post valve closed
9/22/2010	6:46:43 PM	Bubbler valve closed
9/22/2010	6:46:43 PM	Helium valve opened
9/22/2010	6:46:43 PM	Main Vac valve opened
9/22/2010	6:46:43 PM	Bypass valve opened
9/22/2010	6:46:43 PM	Helium MFC set to  100.000000
9/22/2010	6:46:43 PM	H2 MFC set to  0.000000
9/22/2010	6:46:43 PM	BCl3 MFC set to  0.000000
9/22/2010	6:46:43 PM	PHl3 MFC set to  0.000000
9/22/2010	6:46:43 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:46:43 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:46:44 PM	Tube furnace set to 0
9/22/2010	6:47:44 PM	Helium valve closed
9/22/2010	6:47:44 PM	H2 valve closed
9/22/2010	6:47:44 PM	BCl3 valve closed
9/22/2010	6:47:44 PM	PH3 valve closed
9/22/2010	6:47:44 PM	SiCl4 pre valve closed
9/22/2010	6:47:44 PM	SiCl4 post valve closed
9/22/2010	6:47:44 PM	Bubbler valve closed
9/22/2010	6:47:44 PM	Main Vac valve opened
9/22/2010	6:47:44 PM	Bypass valve opened
9/22/2010	6:47:44 PM	Helium MFC set to  0.000000
9/22/2010	6:47:44 PM	H2 MFC set to  0.000000
9/22/2010	6:47:44 PM	BCl3 MFC set to  0.000000
9/22/2010	6:47:44 PM	PHl3 MFC set to  0.000000
9/22/2010	6:47:44 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:47:44 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:47:44 PM	Tube furnace set to 0
9/22/2010	6:48:44 PM	H2 valve closed
9/22/2010	6:48:44 PM	BCl3 valve closed
9/22/2010	6:48:44 PM	PH3 valve closed
9/22/2010	6:48:44 PM	SiCl4 pre valve closed
9/22/2010	6:48:44 PM	SiCl4 post valve closed
9/22/2010	6:48:44 PM	Bubbler valve closed
9/22/2010	6:48:44 PM	Helium valve opened
9/22/2010	6:48:44 PM	Main Vac valve opened
9/22/2010	6:48:44 PM	Bypass valve opened
9/22/2010	6:48:44 PM	Helium MFC set to  100.000000
9/22/2010	6:48:44 PM	H2 MFC set to  0.000000
9/22/2010	6:48:44 PM	BCl3 MFC set to  0.000000
9/22/2010	6:48:44 PM	PHl3 MFC set to  0.000000
9/22/2010	6:48:44 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:48:44 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:48:44 PM	Tube furnace set to 0
9/22/2010	6:49:44 PM	Helium valve closed
9/22/2010	6:49:44 PM	H2 valve closed
9/22/2010	6:49:44 PM	BCl3 valve closed
9/22/2010	6:49:44 PM	PH3 valve closed
9/22/2010	6:49:44 PM	SiCl4 pre valve closed
9/22/2010	6:49:44 PM	SiCl4 post valve closed
9/22/2010	6:49:44 PM	Bubbler valve closed
9/22/2010	6:49:44 PM	Main Vac valve opened
9/22/2010	6:49:44 PM	Bypass valve opened
9/22/2010	6:49:44 PM	Helium MFC set to  0.000000
9/22/2010	6:49:44 PM	H2 MFC set to  0.000000
9/22/2010	6:49:44 PM	BCl3 MFC set to  0.000000
9/22/2010	6:49:44 PM	PHl3 MFC set to  0.000000
9/22/2010	6:49:44 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:49:44 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:49:44 PM	Tube furnace set to 0
9/22/2010	6:50:44 PM	H2 valve closed
9/22/2010	6:50:44 PM	BCl3 valve closed
9/22/2010	6:50:44 PM	PH3 valve closed
9/22/2010	6:50:44 PM	SiCl4 pre valve closed
9/22/2010	6:50:44 PM	SiCl4 post valve closed
9/22/2010	6:50:44 PM	Bubbler valve closed
9/22/2010	6:50:44 PM	Helium valve opened
9/22/2010	6:50:44 PM	Main Vac valve opened
9/22/2010	6:50:44 PM	Bypass valve opened
9/22/2010	6:50:44 PM	Helium MFC set to  100.000000
9/22/2010	6:50:44 PM	H2 MFC set to  0.000000
9/22/2010	6:50:44 PM	BCl3 MFC set to  0.000000
9/22/2010	6:50:44 PM	PHl3 MFC set to  0.000000
9/22/2010	6:50:44 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:50:44 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:50:44 PM	Tube furnace set to 0
9/22/2010	6:51:44 PM	Helium valve closed
9/22/2010	6:51:44 PM	H2 valve closed
9/22/2010	6:51:44 PM	BCl3 valve closed
9/22/2010	6:51:44 PM	PH3 valve closed
9/22/2010	6:51:44 PM	SiCl4 pre valve closed
9/22/2010	6:51:44 PM	SiCl4 post valve closed
9/22/2010	6:51:44 PM	Bubbler valve closed
9/22/2010	6:51:44 PM	Main Vac valve opened
9/22/2010	6:51:44 PM	Bypass valve opened
9/22/2010	6:51:44 PM	Helium MFC set to  0.000000
9/22/2010	6:51:44 PM	H2 MFC set to  0.000000
9/22/2010	6:51:44 PM	BCl3 MFC set to  0.000000
9/22/2010	6:51:44 PM	PHl3 MFC set to  0.000000
9/22/2010	6:51:44 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:51:44 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:51:45 PM	Tube furnace set to 0
9/22/2010	6:52:45 PM	H2 valve closed
9/22/2010	6:52:45 PM	BCl3 valve closed
9/22/2010	6:52:45 PM	PH3 valve closed
9/22/2010	6:52:45 PM	SiCl4 pre valve closed
9/22/2010	6:52:45 PM	SiCl4 post valve closed
9/22/2010	6:52:45 PM	Bubbler valve closed
9/22/2010	6:52:45 PM	Helium valve opened
9/22/2010	6:52:45 PM	Main Vac valve opened
9/22/2010	6:52:45 PM	Bypass valve opened
9/22/2010	6:52:45 PM	Helium MFC set to  100.000000
9/22/2010	6:52:45 PM	H2 MFC set to  0.000000
9/22/2010	6:52:45 PM	BCl3 MFC set to  0.000000
9/22/2010	6:52:45 PM	PHl3 MFC set to  0.000000
9/22/2010	6:52:45 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:52:45 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:52:45 PM	Tube furnace set to 0
9/22/2010	6:53:45 PM	Helium valve closed
9/22/2010	6:53:45 PM	H2 valve closed
9/22/2010	6:53:45 PM	BCl3 valve closed
9/22/2010	6:53:45 PM	PH3 valve closed
9/22/2010	6:53:45 PM	SiCl4 pre valve closed
9/22/2010	6:53:45 PM	SiCl4 post valve closed
9/22/2010	6:53:45 PM	Bubbler valve closed
9/22/2010	6:53:45 PM	Main Vac valve opened
9/22/2010	6:53:45 PM	Bypass valve opened
9/22/2010	6:53:45 PM	Helium MFC set to  0.000000
9/22/2010	6:53:45 PM	H2 MFC set to  0.000000
9/22/2010	6:53:45 PM	BCl3 MFC set to  0.000000
9/22/2010	6:53:45 PM	PHl3 MFC set to  0.000000
9/22/2010	6:53:45 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:53:45 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:53:45 PM	Tube furnace set to 0
9/22/2010	6:54:45 PM	H2 valve closed
9/22/2010	6:54:45 PM	BCl3 valve closed
9/22/2010	6:54:45 PM	PH3 valve closed
9/22/2010	6:54:45 PM	SiCl4 pre valve closed
9/22/2010	6:54:45 PM	SiCl4 post valve closed
9/22/2010	6:54:45 PM	Bubbler valve closed
9/22/2010	6:54:45 PM	Helium valve opened
9/22/2010	6:54:45 PM	Main Vac valve opened
9/22/2010	6:54:45 PM	Bypass valve opened
9/22/2010	6:54:45 PM	Helium MFC set to  100.000000
9/22/2010	6:54:45 PM	H2 MFC set to  0.000000
9/22/2010	6:54:45 PM	BCl3 MFC set to  0.000000
9/22/2010	6:54:45 PM	PHl3 MFC set to  0.000000
9/22/2010	6:54:45 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:54:45 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:54:45 PM	Tube furnace set to 0
9/22/2010	6:55:45 PM	Helium valve closed
9/22/2010	6:55:45 PM	H2 valve closed
9/22/2010	6:55:45 PM	BCl3 valve closed
9/22/2010	6:55:45 PM	PH3 valve closed
9/22/2010	6:55:45 PM	SiCl4 pre valve closed
9/22/2010	6:55:45 PM	SiCl4 post valve closed
9/22/2010	6:55:45 PM	Bubbler valve closed
9/22/2010	6:55:45 PM	Main Vac valve opened
9/22/2010	6:55:45 PM	Bypass valve opened
9/22/2010	6:55:45 PM	Helium MFC set to  0.000000
9/22/2010	6:55:45 PM	H2 MFC set to  0.000000
9/22/2010	6:55:45 PM	BCl3 MFC set to  0.000000
9/22/2010	6:55:45 PM	PHl3 MFC set to  0.000000
9/22/2010	6:55:45 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:55:45 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:55:45 PM	Tube furnace set to 0
9/22/2010	6:56:45 PM	H2 valve closed
9/22/2010	6:56:45 PM	BCl3 valve closed
9/22/2010	6:56:45 PM	PH3 valve closed
9/22/2010	6:56:45 PM	SiCl4 pre valve closed
9/22/2010	6:56:45 PM	SiCl4 post valve closed
9/22/2010	6:56:45 PM	Bubbler valve closed
9/22/2010	6:56:45 PM	Helium valve opened
9/22/2010	6:56:45 PM	Main Vac valve opened
9/22/2010	6:56:45 PM	Bypass valve opened
9/22/2010	6:56:45 PM	Helium MFC set to  100.000000
9/22/2010	6:56:45 PM	H2 MFC set to  0.000000
9/22/2010	6:56:45 PM	BCl3 MFC set to  0.000000
9/22/2010	6:56:45 PM	PHl3 MFC set to  0.000000
9/22/2010	6:56:45 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:56:45 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:56:46 PM	Tube furnace set to 0
9/22/2010	6:57:46 PM	Helium valve closed
9/22/2010	6:57:46 PM	H2 valve closed
9/22/2010	6:57:46 PM	BCl3 valve closed
9/22/2010	6:57:46 PM	PH3 valve closed
9/22/2010	6:57:46 PM	SiCl4 pre valve closed
9/22/2010	6:57:46 PM	SiCl4 post valve closed
9/22/2010	6:57:46 PM	Bubbler valve closed
9/22/2010	6:57:46 PM	Main Vac valve opened
9/22/2010	6:57:46 PM	Bypass valve opened
9/22/2010	6:57:46 PM	Helium MFC set to  0.000000
9/22/2010	6:57:46 PM	H2 MFC set to  0.000000
9/22/2010	6:57:46 PM	BCl3 MFC set to  0.000000
9/22/2010	6:57:46 PM	PHl3 MFC set to  0.000000
9/22/2010	6:57:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:57:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:57:46 PM	Tube furnace set to 0
9/22/2010	6:58:46 PM	H2 valve closed
9/22/2010	6:58:46 PM	BCl3 valve closed
9/22/2010	6:58:46 PM	PH3 valve closed
9/22/2010	6:58:46 PM	SiCl4 pre valve closed
9/22/2010	6:58:46 PM	SiCl4 post valve closed
9/22/2010	6:58:46 PM	Bubbler valve closed
9/22/2010	6:58:46 PM	Helium valve opened
9/22/2010	6:58:46 PM	Main Vac valve opened
9/22/2010	6:58:46 PM	Bypass valve opened
9/22/2010	6:58:46 PM	Helium MFC set to  100.000000
9/22/2010	6:58:46 PM	H2 MFC set to  0.000000
9/22/2010	6:58:46 PM	BCl3 MFC set to  0.000000
9/22/2010	6:58:46 PM	PHl3 MFC set to  0.000000
9/22/2010	6:58:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:58:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:58:46 PM	Tube furnace set to 0
9/22/2010	6:59:46 PM	Helium valve closed
9/22/2010	6:59:46 PM	H2 valve closed
9/22/2010	6:59:46 PM	BCl3 valve closed
9/22/2010	6:59:46 PM	PH3 valve closed
9/22/2010	6:59:46 PM	SiCl4 pre valve closed
9/22/2010	6:59:46 PM	SiCl4 post valve closed
9/22/2010	6:59:46 PM	Bubbler valve closed
9/22/2010	6:59:46 PM	Main Vac valve opened
9/22/2010	6:59:46 PM	Bypass valve opened
9/22/2010	6:59:46 PM	Helium MFC set to  0.000000
9/22/2010	6:59:46 PM	H2 MFC set to  0.000000
9/22/2010	6:59:46 PM	BCl3 MFC set to  0.000000
9/22/2010	6:59:46 PM	PHl3 MFC set to  0.000000
9/22/2010	6:59:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	6:59:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	6:59:46 PM	Tube furnace set to 0
9/22/2010	7:00:46 PM	H2 valve closed
9/22/2010	7:00:46 PM	BCl3 valve closed
9/22/2010	7:00:46 PM	PH3 valve closed
9/22/2010	7:00:46 PM	SiCl4 pre valve closed
9/22/2010	7:00:46 PM	SiCl4 post valve closed
9/22/2010	7:00:46 PM	Bubbler valve closed
9/22/2010	7:00:46 PM	Helium valve opened
9/22/2010	7:00:46 PM	Main Vac valve opened
9/22/2010	7:00:46 PM	Bypass valve opened
9/22/2010	7:00:46 PM	Helium MFC set to  100.000000
9/22/2010	7:00:46 PM	H2 MFC set to  0.000000
9/22/2010	7:00:46 PM	BCl3 MFC set to  0.000000
9/22/2010	7:00:46 PM	PHl3 MFC set to  0.000000
9/22/2010	7:00:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:00:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:00:46 PM	Tube furnace set to 0
9/22/2010	7:01:46 PM	Helium valve closed
9/22/2010	7:01:46 PM	H2 valve closed
9/22/2010	7:01:46 PM	BCl3 valve closed
9/22/2010	7:01:46 PM	PH3 valve closed
9/22/2010	7:01:46 PM	SiCl4 pre valve closed
9/22/2010	7:01:46 PM	SiCl4 post valve closed
9/22/2010	7:01:46 PM	Bubbler valve closed
9/22/2010	7:01:46 PM	Main Vac valve opened
9/22/2010	7:01:46 PM	Bypass valve opened
9/22/2010	7:01:46 PM	Helium MFC set to  0.000000
9/22/2010	7:01:46 PM	H2 MFC set to  0.000000
9/22/2010	7:01:46 PM	BCl3 MFC set to  0.000000
9/22/2010	7:01:46 PM	PHl3 MFC set to  0.000000
9/22/2010	7:01:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:01:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:01:46 PM	Tube furnace set to 0
9/22/2010	7:02:47 PM	H2 valve closed
9/22/2010	7:02:47 PM	BCl3 valve closed
9/22/2010	7:02:47 PM	PH3 valve closed
9/22/2010	7:02:47 PM	SiCl4 pre valve closed
9/22/2010	7:02:47 PM	SiCl4 post valve closed
9/22/2010	7:02:47 PM	Bubbler valve closed
9/22/2010	7:02:47 PM	Helium valve opened
9/22/2010	7:02:47 PM	Main Vac valve opened
9/22/2010	7:02:47 PM	Bypass valve opened
9/22/2010	7:02:47 PM	Helium MFC set to  100.000000
9/22/2010	7:02:47 PM	H2 MFC set to  0.000000
9/22/2010	7:02:47 PM	BCl3 MFC set to  0.000000
9/22/2010	7:02:47 PM	PHl3 MFC set to  0.000000
9/22/2010	7:02:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:02:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:02:47 PM	Tube furnace set to 0
9/22/2010	7:03:47 PM	Helium valve closed
9/22/2010	7:03:47 PM	H2 valve closed
9/22/2010	7:03:47 PM	BCl3 valve closed
9/22/2010	7:03:47 PM	PH3 valve closed
9/22/2010	7:03:47 PM	SiCl4 pre valve closed
9/22/2010	7:03:47 PM	SiCl4 post valve closed
9/22/2010	7:03:47 PM	Bubbler valve closed
9/22/2010	7:03:47 PM	Main Vac valve opened
9/22/2010	7:03:47 PM	Bypass valve opened
9/22/2010	7:03:47 PM	Helium MFC set to  0.000000
9/22/2010	7:03:47 PM	H2 MFC set to  0.000000
9/22/2010	7:03:47 PM	BCl3 MFC set to  0.000000
9/22/2010	7:03:47 PM	PHl3 MFC set to  0.000000
9/22/2010	7:03:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:03:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:03:47 PM	Tube furnace set to 0
9/22/2010	7:04:47 PM	H2 valve closed
9/22/2010	7:04:47 PM	BCl3 valve closed
9/22/2010	7:04:47 PM	PH3 valve closed
9/22/2010	7:04:47 PM	SiCl4 pre valve closed
9/22/2010	7:04:47 PM	SiCl4 post valve closed
9/22/2010	7:04:47 PM	Bubbler valve closed
9/22/2010	7:04:47 PM	Helium valve opened
9/22/2010	7:04:47 PM	Main Vac valve opened
9/22/2010	7:04:47 PM	Bypass valve opened
9/22/2010	7:04:47 PM	Helium MFC set to  100.000000
9/22/2010	7:04:47 PM	H2 MFC set to  0.000000
9/22/2010	7:04:47 PM	BCl3 MFC set to  0.000000
9/22/2010	7:04:47 PM	PHl3 MFC set to  0.000000
9/22/2010	7:04:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:04:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:04:47 PM	Tube furnace set to 0
9/22/2010	7:05:47 PM	Helium valve closed
9/22/2010	7:05:47 PM	H2 valve closed
9/22/2010	7:05:47 PM	BCl3 valve closed
9/22/2010	7:05:47 PM	PH3 valve closed
9/22/2010	7:05:47 PM	SiCl4 pre valve closed
9/22/2010	7:05:47 PM	SiCl4 post valve closed
9/22/2010	7:05:47 PM	Bubbler valve closed
9/22/2010	7:05:47 PM	Main Vac valve opened
9/22/2010	7:05:47 PM	Bypass valve opened
9/22/2010	7:05:47 PM	Helium MFC set to  0.000000
9/22/2010	7:05:47 PM	H2 MFC set to  0.000000
9/22/2010	7:05:47 PM	BCl3 MFC set to  0.000000
9/22/2010	7:05:47 PM	PHl3 MFC set to  0.000000
9/22/2010	7:05:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:05:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:05:47 PM	Tube furnace set to 0
9/22/2010	7:05:48 PM	Run finished at 7:05 PM
9/22/2010	7:05:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	7:13:29 PM	Recipe started at 7:13 PM
9/22/2010	7:13:30 PM	Helium valve closed
9/22/2010	7:13:30 PM	BCl3 valve closed
9/22/2010	7:13:30 PM	PH3 valve closed
9/22/2010	7:13:30 PM	SiCl4 pre valve closed
9/22/2010	7:13:30 PM	SiCl4 post valve closed
9/22/2010	7:13:30 PM	Main Vac valve closed
9/22/2010	7:13:30 PM	Bypass valve closed
9/22/2010	7:13:30 PM	Bubbler valve closed
9/22/2010	7:13:30 PM	H2 valve opened
9/22/2010	7:13:30 PM	Helium MFC set to  0.000000
9/22/2010	7:13:30 PM	H2 MFC set to  500.000000
9/22/2010	7:13:30 PM	BCl3 MFC set to  0.000000
9/22/2010	7:13:30 PM	PHl3 MFC set to  0.000000
9/22/2010	7:13:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:13:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:13:30 PM	Tube furnace set to 0
9/22/2010	7:14:48 PM	Helium valve closed
9/22/2010	7:14:48 PM	BCl3 valve closed
9/22/2010	7:14:48 PM	PH3 valve closed
9/22/2010	7:14:48 PM	SiCl4 pre valve closed
9/22/2010	7:14:48 PM	SiCl4 post valve closed
9/22/2010	7:14:48 PM	Main Vac valve closed
9/22/2010	7:14:48 PM	Bypass valve closed
9/22/2010	7:14:48 PM	H2 valve opened
9/22/2010	7:14:48 PM	Bubbler valve opened
9/22/2010	7:14:48 PM	Helium MFC set to  0.000000
9/22/2010	7:14:48 PM	H2 MFC set to  500.000000
9/22/2010	7:14:48 PM	BCl3 MFC set to  0.000000
9/22/2010	7:14:48 PM	PHl3 MFC set to  0.000000
9/22/2010	7:14:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:14:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:14:48 PM	Tube furnace set to 1000
9/22/2010	7:34:48 PM	Helium valve closed
9/22/2010	7:34:48 PM	BCl3 valve closed
9/22/2010	7:34:48 PM	Main Vac valve closed
9/22/2010	7:34:48 PM	Bypass valve closed
9/22/2010	7:34:48 PM	H2 valve opened
9/22/2010	7:34:48 PM	PH3 valve opened
9/22/2010	7:34:48 PM	SiCl4 pre valve opened
9/22/2010	7:34:48 PM	SiCl4 post valve opened
9/22/2010	7:34:48 PM	Bubbler valve opened
9/22/2010	7:34:48 PM	Helium MFC set to  0.000000
9/22/2010	7:34:48 PM	H2 MFC set to  500.000000
9/22/2010	7:34:48 PM	BCl3 MFC set to  0.000000
9/22/2010	7:34:48 PM	PHl3 MFC set to  0.500000
9/22/2010	7:34:48 PM	SiCl4 MFC set to  50.000000
9/22/2010	7:34:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:34:48 PM	Tube furnace set to 1000
9/22/2010	7:54:48 PM	H2 valve closed
9/22/2010	7:54:48 PM	BCl3 valve closed
9/22/2010	7:54:48 PM	PH3 valve closed
9/22/2010	7:54:48 PM	SiCl4 pre valve closed
9/22/2010	7:54:48 PM	SiCl4 post valve closed
9/22/2010	7:54:48 PM	Main Vac valve closed
9/22/2010	7:54:48 PM	Bypass valve closed
9/22/2010	7:54:48 PM	Helium valve opened
9/22/2010	7:54:48 PM	Bubbler valve opened
9/22/2010	7:54:48 PM	Helium MFC set to  500.000000
9/22/2010	7:54:48 PM	H2 MFC set to  0.000000
9/22/2010	7:54:48 PM	BCl3 MFC set to  0.000000
9/22/2010	7:54:48 PM	PHl3 MFC set to  0.000000
9/22/2010	7:54:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	7:54:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	7:54:49 PM	Tube furnace set to 0
9/22/2010	8:14:48 PM	Helium valve closed
9/22/2010	8:14:48 PM	H2 valve closed
9/22/2010	8:14:48 PM	BCl3 valve closed
9/22/2010	8:14:48 PM	PH3 valve closed
9/22/2010	8:14:48 PM	SiCl4 pre valve closed
9/22/2010	8:14:48 PM	SiCl4 post valve closed
9/22/2010	8:14:48 PM	Main Vac valve closed
9/22/2010	8:14:48 PM	Bypass valve closed
9/22/2010	8:14:48 PM	Bubbler valve closed
9/22/2010	8:14:48 PM	Helium MFC set to  0.000000
9/22/2010	8:14:48 PM	H2 MFC set to  0.000000
9/22/2010	8:14:48 PM	BCl3 MFC set to  0.000000
9/22/2010	8:14:48 PM	PHl3 MFC set to  0.000000
9/22/2010	8:14:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	8:14:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	8:14:49 PM	Tube furnace set to 0
9/22/2010	8:14:49 PM	Run finished at 8:14 PM
9/22/2010	9:06:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	9:06:23 PM	Recipe started at 9:06 PM
9/22/2010	9:06:23 PM	Helium valve closed
9/22/2010	9:06:23 PM	H2 valve closed
9/22/2010	9:06:23 PM	BCl3 valve closed
9/22/2010	9:06:23 PM	PH3 valve closed
9/22/2010	9:06:23 PM	SiCl4 pre valve closed
9/22/2010	9:06:23 PM	SiCl4 post valve closed
9/22/2010	9:06:23 PM	Main Vac valve closed
9/22/2010	9:06:23 PM	Bubbler valve closed
9/22/2010	9:06:23 PM	Bypass valve opened
9/22/2010	9:06:23 PM	Helium MFC set to  0.000000
9/22/2010	9:06:23 PM	H2 MFC set to  0.000000
9/22/2010	9:06:23 PM	BCl3 MFC set to  0.000000
9/22/2010	9:06:23 PM	PHl3 MFC set to  0.000000
9/22/2010	9:06:23 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:06:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:06:23 PM	Tube furnace set to 0
9/22/2010	9:07:05 PM	Helium valve closed
9/22/2010	9:07:05 PM	H2 valve closed
9/22/2010	9:07:05 PM	BCl3 valve closed
9/22/2010	9:07:05 PM	PH3 valve closed
9/22/2010	9:07:05 PM	SiCl4 pre valve closed
9/22/2010	9:07:05 PM	SiCl4 post valve closed
9/22/2010	9:07:05 PM	Bubbler valve closed
9/22/2010	9:07:05 PM	Main Vac valve opened
9/22/2010	9:07:05 PM	Bypass valve opened
9/22/2010	9:07:05 PM	Helium MFC set to  0.000000
9/22/2010	9:07:05 PM	H2 MFC set to  0.000000
9/22/2010	9:07:05 PM	BCl3 MFC set to  0.000000
9/22/2010	9:07:05 PM	PHl3 MFC set to  0.000000
9/22/2010	9:07:05 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:07:05 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:07:05 PM	Tube furnace set to 0
9/22/2010	9:07:05 PM	Run finished at 9:07 PM
9/22/2010	9:07:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	9:08:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	9:08:46 PM	Recipe started at 9:08 PM
9/22/2010	9:08:46 PM	Helium valve closed
9/22/2010	9:08:46 PM	H2 valve closed
9/22/2010	9:08:46 PM	BCl3 valve closed
9/22/2010	9:08:46 PM	PH3 valve closed
9/22/2010	9:08:46 PM	SiCl4 pre valve closed
9/22/2010	9:08:46 PM	SiCl4 post valve closed
9/22/2010	9:08:46 PM	Main Vac valve closed
9/22/2010	9:08:46 PM	Bubbler valve closed
9/22/2010	9:08:46 PM	Bypass valve opened
9/22/2010	9:08:46 PM	Helium MFC set to  0.000000
9/22/2010	9:08:46 PM	H2 MFC set to  0.000000
9/22/2010	9:08:46 PM	BCl3 MFC set to  0.000000
9/22/2010	9:08:46 PM	PHl3 MFC set to  0.000000
9/22/2010	9:08:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:08:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:08:46 PM	Tube furnace set to 0
9/22/2010	9:08:46 PM	Helium valve closed
9/22/2010	9:08:46 PM	H2 valve closed
9/22/2010	9:08:46 PM	BCl3 valve closed
9/22/2010	9:08:46 PM	PH3 valve closed
9/22/2010	9:08:46 PM	SiCl4 pre valve closed
9/22/2010	9:08:46 PM	SiCl4 post valve closed
9/22/2010	9:08:46 PM	Bubbler valve closed
9/22/2010	9:08:46 PM	Main Vac valve opened
9/22/2010	9:08:46 PM	Bypass valve opened
9/22/2010	9:08:46 PM	Helium MFC set to  0.000000
9/22/2010	9:08:46 PM	H2 MFC set to  0.000000
9/22/2010	9:08:46 PM	BCl3 MFC set to  0.000000
9/22/2010	9:08:46 PM	PHl3 MFC set to  0.000000
9/22/2010	9:08:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:08:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:08:46 PM	Tube furnace set to 0
9/22/2010	9:09:46 PM	H2 valve closed
9/22/2010	9:09:46 PM	BCl3 valve closed
9/22/2010	9:09:46 PM	PH3 valve closed
9/22/2010	9:09:46 PM	SiCl4 pre valve closed
9/22/2010	9:09:46 PM	SiCl4 post valve closed
9/22/2010	9:09:46 PM	Bubbler valve closed
9/22/2010	9:09:46 PM	Helium valve opened
9/22/2010	9:09:46 PM	Main Vac valve opened
9/22/2010	9:09:46 PM	Bypass valve opened
9/22/2010	9:09:46 PM	Helium MFC set to  100.000000
9/22/2010	9:09:46 PM	H2 MFC set to  0.000000
9/22/2010	9:09:46 PM	BCl3 MFC set to  0.000000
9/22/2010	9:09:46 PM	PHl3 MFC set to  0.000000
9/22/2010	9:09:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:09:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:09:46 PM	Tube furnace set to 0
9/22/2010	9:10:46 PM	Helium valve closed
9/22/2010	9:10:46 PM	H2 valve closed
9/22/2010	9:10:46 PM	BCl3 valve closed
9/22/2010	9:10:46 PM	PH3 valve closed
9/22/2010	9:10:46 PM	SiCl4 pre valve closed
9/22/2010	9:10:46 PM	SiCl4 post valve closed
9/22/2010	9:10:46 PM	Bubbler valve closed
9/22/2010	9:10:46 PM	Main Vac valve opened
9/22/2010	9:10:46 PM	Bypass valve opened
9/22/2010	9:10:46 PM	Helium MFC set to  0.000000
9/22/2010	9:10:46 PM	H2 MFC set to  0.000000
9/22/2010	9:10:46 PM	BCl3 MFC set to  0.000000
9/22/2010	9:10:46 PM	PHl3 MFC set to  0.000000
9/22/2010	9:10:46 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:10:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:10:47 PM	Tube furnace set to 0
9/22/2010	9:11:47 PM	H2 valve closed
9/22/2010	9:11:47 PM	BCl3 valve closed
9/22/2010	9:11:47 PM	PH3 valve closed
9/22/2010	9:11:47 PM	SiCl4 pre valve closed
9/22/2010	9:11:47 PM	SiCl4 post valve closed
9/22/2010	9:11:47 PM	Bubbler valve closed
9/22/2010	9:11:47 PM	Helium valve opened
9/22/2010	9:11:47 PM	Main Vac valve opened
9/22/2010	9:11:47 PM	Bypass valve opened
9/22/2010	9:11:47 PM	Helium MFC set to  100.000000
9/22/2010	9:11:47 PM	H2 MFC set to  0.000000
9/22/2010	9:11:47 PM	BCl3 MFC set to  0.000000
9/22/2010	9:11:47 PM	PHl3 MFC set to  0.000000
9/22/2010	9:11:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:11:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:11:47 PM	Tube furnace set to 0
9/22/2010	9:12:47 PM	Helium valve closed
9/22/2010	9:12:47 PM	H2 valve closed
9/22/2010	9:12:47 PM	BCl3 valve closed
9/22/2010	9:12:47 PM	PH3 valve closed
9/22/2010	9:12:47 PM	SiCl4 pre valve closed
9/22/2010	9:12:47 PM	SiCl4 post valve closed
9/22/2010	9:12:47 PM	Bubbler valve closed
9/22/2010	9:12:47 PM	Main Vac valve opened
9/22/2010	9:12:47 PM	Bypass valve opened
9/22/2010	9:12:47 PM	Helium MFC set to  0.000000
9/22/2010	9:12:47 PM	H2 MFC set to  0.000000
9/22/2010	9:12:47 PM	BCl3 MFC set to  0.000000
9/22/2010	9:12:47 PM	PHl3 MFC set to  0.000000
9/22/2010	9:12:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:12:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:12:47 PM	Tube furnace set to 0
9/22/2010	9:13:47 PM	H2 valve closed
9/22/2010	9:13:47 PM	BCl3 valve closed
9/22/2010	9:13:47 PM	PH3 valve closed
9/22/2010	9:13:47 PM	SiCl4 pre valve closed
9/22/2010	9:13:47 PM	SiCl4 post valve closed
9/22/2010	9:13:47 PM	Bubbler valve closed
9/22/2010	9:13:47 PM	Helium valve opened
9/22/2010	9:13:47 PM	Main Vac valve opened
9/22/2010	9:13:47 PM	Bypass valve opened
9/22/2010	9:13:47 PM	Helium MFC set to  100.000000
9/22/2010	9:13:47 PM	H2 MFC set to  0.000000
9/22/2010	9:13:47 PM	BCl3 MFC set to  0.000000
9/22/2010	9:13:47 PM	PHl3 MFC set to  0.000000
9/22/2010	9:13:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:13:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:13:47 PM	Tube furnace set to 0
9/22/2010	9:14:47 PM	Helium valve closed
9/22/2010	9:14:47 PM	H2 valve closed
9/22/2010	9:14:47 PM	BCl3 valve closed
9/22/2010	9:14:47 PM	PH3 valve closed
9/22/2010	9:14:47 PM	SiCl4 pre valve closed
9/22/2010	9:14:47 PM	SiCl4 post valve closed
9/22/2010	9:14:47 PM	Bubbler valve closed
9/22/2010	9:14:47 PM	Main Vac valve opened
9/22/2010	9:14:47 PM	Bypass valve opened
9/22/2010	9:14:47 PM	Helium MFC set to  0.000000
9/22/2010	9:14:47 PM	H2 MFC set to  0.000000
9/22/2010	9:14:47 PM	BCl3 MFC set to  0.000000
9/22/2010	9:14:47 PM	PHl3 MFC set to  0.000000
9/22/2010	9:14:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:14:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:14:47 PM	Tube furnace set to 0
9/22/2010	9:15:47 PM	H2 valve closed
9/22/2010	9:15:47 PM	BCl3 valve closed
9/22/2010	9:15:47 PM	PH3 valve closed
9/22/2010	9:15:47 PM	SiCl4 pre valve closed
9/22/2010	9:15:47 PM	SiCl4 post valve closed
9/22/2010	9:15:47 PM	Bubbler valve closed
9/22/2010	9:15:47 PM	Helium valve opened
9/22/2010	9:15:47 PM	Main Vac valve opened
9/22/2010	9:15:47 PM	Bypass valve opened
9/22/2010	9:15:47 PM	Helium MFC set to  100.000000
9/22/2010	9:15:47 PM	H2 MFC set to  0.000000
9/22/2010	9:15:47 PM	BCl3 MFC set to  0.000000
9/22/2010	9:15:47 PM	PHl3 MFC set to  0.000000
9/22/2010	9:15:47 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:15:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:15:48 PM	Tube furnace set to 0
9/22/2010	9:16:48 PM	Helium valve closed
9/22/2010	9:16:48 PM	H2 valve closed
9/22/2010	9:16:48 PM	BCl3 valve closed
9/22/2010	9:16:48 PM	PH3 valve closed
9/22/2010	9:16:48 PM	SiCl4 pre valve closed
9/22/2010	9:16:48 PM	SiCl4 post valve closed
9/22/2010	9:16:48 PM	Bubbler valve closed
9/22/2010	9:16:48 PM	Main Vac valve opened
9/22/2010	9:16:48 PM	Bypass valve opened
9/22/2010	9:16:48 PM	Helium MFC set to  0.000000
9/22/2010	9:16:48 PM	H2 MFC set to  0.000000
9/22/2010	9:16:48 PM	BCl3 MFC set to  0.000000
9/22/2010	9:16:48 PM	PHl3 MFC set to  0.000000
9/22/2010	9:16:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:16:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:16:48 PM	Tube furnace set to 0
9/22/2010	9:17:48 PM	H2 valve closed
9/22/2010	9:17:48 PM	BCl3 valve closed
9/22/2010	9:17:48 PM	PH3 valve closed
9/22/2010	9:17:48 PM	SiCl4 pre valve closed
9/22/2010	9:17:48 PM	SiCl4 post valve closed
9/22/2010	9:17:48 PM	Bubbler valve closed
9/22/2010	9:17:48 PM	Helium valve opened
9/22/2010	9:17:48 PM	Main Vac valve opened
9/22/2010	9:17:48 PM	Bypass valve opened
9/22/2010	9:17:48 PM	Helium MFC set to  100.000000
9/22/2010	9:17:48 PM	H2 MFC set to  0.000000
9/22/2010	9:17:48 PM	BCl3 MFC set to  0.000000
9/22/2010	9:17:48 PM	PHl3 MFC set to  0.000000
9/22/2010	9:17:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:17:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:17:48 PM	Tube furnace set to 0
9/22/2010	9:18:48 PM	Helium valve closed
9/22/2010	9:18:48 PM	H2 valve closed
9/22/2010	9:18:48 PM	BCl3 valve closed
9/22/2010	9:18:48 PM	PH3 valve closed
9/22/2010	9:18:48 PM	SiCl4 pre valve closed
9/22/2010	9:18:48 PM	SiCl4 post valve closed
9/22/2010	9:18:48 PM	Bubbler valve closed
9/22/2010	9:18:48 PM	Main Vac valve opened
9/22/2010	9:18:48 PM	Bypass valve opened
9/22/2010	9:18:48 PM	Helium MFC set to  0.000000
9/22/2010	9:18:48 PM	H2 MFC set to  0.000000
9/22/2010	9:18:48 PM	BCl3 MFC set to  0.000000
9/22/2010	9:18:48 PM	PHl3 MFC set to  0.000000
9/22/2010	9:18:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:18:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:18:48 PM	Tube furnace set to 0
9/22/2010	9:19:48 PM	H2 valve closed
9/22/2010	9:19:48 PM	BCl3 valve closed
9/22/2010	9:19:48 PM	PH3 valve closed
9/22/2010	9:19:48 PM	SiCl4 pre valve closed
9/22/2010	9:19:48 PM	SiCl4 post valve closed
9/22/2010	9:19:48 PM	Bubbler valve closed
9/22/2010	9:19:48 PM	Helium valve opened
9/22/2010	9:19:48 PM	Main Vac valve opened
9/22/2010	9:19:48 PM	Bypass valve opened
9/22/2010	9:19:48 PM	Helium MFC set to  100.000000
9/22/2010	9:19:48 PM	H2 MFC set to  0.000000
9/22/2010	9:19:48 PM	BCl3 MFC set to  0.000000
9/22/2010	9:19:48 PM	PHl3 MFC set to  0.000000
9/22/2010	9:19:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:19:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:19:48 PM	Tube furnace set to 0
9/22/2010	9:20:48 PM	Helium valve closed
9/22/2010	9:20:48 PM	H2 valve closed
9/22/2010	9:20:48 PM	BCl3 valve closed
9/22/2010	9:20:48 PM	PH3 valve closed
9/22/2010	9:20:48 PM	SiCl4 pre valve closed
9/22/2010	9:20:48 PM	SiCl4 post valve closed
9/22/2010	9:20:48 PM	Bubbler valve closed
9/22/2010	9:20:48 PM	Main Vac valve opened
9/22/2010	9:20:48 PM	Bypass valve opened
9/22/2010	9:20:48 PM	Helium MFC set to  0.000000
9/22/2010	9:20:48 PM	H2 MFC set to  0.000000
9/22/2010	9:20:48 PM	BCl3 MFC set to  0.000000
9/22/2010	9:20:48 PM	PHl3 MFC set to  0.000000
9/22/2010	9:20:48 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:20:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:20:49 PM	Tube furnace set to 0
9/22/2010	9:21:49 PM	H2 valve closed
9/22/2010	9:21:49 PM	BCl3 valve closed
9/22/2010	9:21:49 PM	PH3 valve closed
9/22/2010	9:21:49 PM	SiCl4 pre valve closed
9/22/2010	9:21:49 PM	SiCl4 post valve closed
9/22/2010	9:21:49 PM	Bubbler valve closed
9/22/2010	9:21:49 PM	Helium valve opened
9/22/2010	9:21:49 PM	Main Vac valve opened
9/22/2010	9:21:49 PM	Bypass valve opened
9/22/2010	9:21:49 PM	Helium MFC set to  100.000000
9/22/2010	9:21:49 PM	H2 MFC set to  0.000000
9/22/2010	9:21:49 PM	BCl3 MFC set to  0.000000
9/22/2010	9:21:49 PM	PHl3 MFC set to  0.000000
9/22/2010	9:21:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:21:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:21:49 PM	Tube furnace set to 0
9/22/2010	9:22:49 PM	Helium valve closed
9/22/2010	9:22:49 PM	H2 valve closed
9/22/2010	9:22:49 PM	BCl3 valve closed
9/22/2010	9:22:49 PM	PH3 valve closed
9/22/2010	9:22:49 PM	SiCl4 pre valve closed
9/22/2010	9:22:49 PM	SiCl4 post valve closed
9/22/2010	9:22:49 PM	Bubbler valve closed
9/22/2010	9:22:49 PM	Main Vac valve opened
9/22/2010	9:22:49 PM	Bypass valve opened
9/22/2010	9:22:49 PM	Helium MFC set to  0.000000
9/22/2010	9:22:49 PM	H2 MFC set to  0.000000
9/22/2010	9:22:49 PM	BCl3 MFC set to  0.000000
9/22/2010	9:22:49 PM	PHl3 MFC set to  0.000000
9/22/2010	9:22:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:22:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:22:49 PM	Tube furnace set to 0
9/22/2010	9:23:49 PM	H2 valve closed
9/22/2010	9:23:49 PM	BCl3 valve closed
9/22/2010	9:23:49 PM	PH3 valve closed
9/22/2010	9:23:49 PM	SiCl4 pre valve closed
9/22/2010	9:23:49 PM	SiCl4 post valve closed
9/22/2010	9:23:49 PM	Bubbler valve closed
9/22/2010	9:23:49 PM	Helium valve opened
9/22/2010	9:23:49 PM	Main Vac valve opened
9/22/2010	9:23:49 PM	Bypass valve opened
9/22/2010	9:23:49 PM	Helium MFC set to  100.000000
9/22/2010	9:23:49 PM	H2 MFC set to  0.000000
9/22/2010	9:23:49 PM	BCl3 MFC set to  0.000000
9/22/2010	9:23:49 PM	PHl3 MFC set to  0.000000
9/22/2010	9:23:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:23:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:23:49 PM	Tube furnace set to 0
9/22/2010	9:24:49 PM	Helium valve closed
9/22/2010	9:24:49 PM	H2 valve closed
9/22/2010	9:24:49 PM	BCl3 valve closed
9/22/2010	9:24:49 PM	PH3 valve closed
9/22/2010	9:24:49 PM	SiCl4 pre valve closed
9/22/2010	9:24:49 PM	SiCl4 post valve closed
9/22/2010	9:24:49 PM	Bubbler valve closed
9/22/2010	9:24:49 PM	Main Vac valve opened
9/22/2010	9:24:49 PM	Bypass valve opened
9/22/2010	9:24:49 PM	Helium MFC set to  0.000000
9/22/2010	9:24:49 PM	H2 MFC set to  0.000000
9/22/2010	9:24:49 PM	BCl3 MFC set to  0.000000
9/22/2010	9:24:49 PM	PHl3 MFC set to  0.000000
9/22/2010	9:24:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:24:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:24:49 PM	Tube furnace set to 0
9/22/2010	9:25:49 PM	H2 valve closed
9/22/2010	9:25:49 PM	BCl3 valve closed
9/22/2010	9:25:49 PM	PH3 valve closed
9/22/2010	9:25:49 PM	SiCl4 pre valve closed
9/22/2010	9:25:49 PM	SiCl4 post valve closed
9/22/2010	9:25:49 PM	Bubbler valve closed
9/22/2010	9:25:49 PM	Helium valve opened
9/22/2010	9:25:49 PM	Main Vac valve opened
9/22/2010	9:25:49 PM	Bypass valve opened
9/22/2010	9:25:49 PM	Helium MFC set to  100.000000
9/22/2010	9:25:49 PM	H2 MFC set to  0.000000
9/22/2010	9:25:49 PM	BCl3 MFC set to  0.000000
9/22/2010	9:25:49 PM	PHl3 MFC set to  0.000000
9/22/2010	9:25:49 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:25:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:25:50 PM	Tube furnace set to 0
9/22/2010	9:26:50 PM	Helium valve closed
9/22/2010	9:26:50 PM	H2 valve closed
9/22/2010	9:26:50 PM	BCl3 valve closed
9/22/2010	9:26:50 PM	PH3 valve closed
9/22/2010	9:26:50 PM	SiCl4 pre valve closed
9/22/2010	9:26:50 PM	SiCl4 post valve closed
9/22/2010	9:26:50 PM	Bubbler valve closed
9/22/2010	9:26:50 PM	Main Vac valve opened
9/22/2010	9:26:50 PM	Bypass valve opened
9/22/2010	9:26:50 PM	Helium MFC set to  0.000000
9/22/2010	9:26:50 PM	H2 MFC set to  0.000000
9/22/2010	9:26:50 PM	BCl3 MFC set to  0.000000
9/22/2010	9:26:50 PM	PHl3 MFC set to  0.000000
9/22/2010	9:26:50 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:26:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:26:50 PM	Tube furnace set to 0
9/22/2010	9:27:50 PM	H2 valve closed
9/22/2010	9:27:50 PM	BCl3 valve closed
9/22/2010	9:27:50 PM	PH3 valve closed
9/22/2010	9:27:50 PM	SiCl4 pre valve closed
9/22/2010	9:27:50 PM	SiCl4 post valve closed
9/22/2010	9:27:50 PM	Bubbler valve closed
9/22/2010	9:27:50 PM	Helium valve opened
9/22/2010	9:27:50 PM	Main Vac valve opened
9/22/2010	9:27:50 PM	Bypass valve opened
9/22/2010	9:27:50 PM	Helium MFC set to  100.000000
9/22/2010	9:27:50 PM	H2 MFC set to  0.000000
9/22/2010	9:27:50 PM	BCl3 MFC set to  0.000000
9/22/2010	9:27:50 PM	PHl3 MFC set to  0.000000
9/22/2010	9:27:50 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:27:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:27:50 PM	Tube furnace set to 0
9/22/2010	9:28:50 PM	Helium valve closed
9/22/2010	9:28:50 PM	H2 valve closed
9/22/2010	9:28:50 PM	BCl3 valve closed
9/22/2010	9:28:50 PM	PH3 valve closed
9/22/2010	9:28:50 PM	SiCl4 pre valve closed
9/22/2010	9:28:50 PM	SiCl4 post valve closed
9/22/2010	9:28:50 PM	Bubbler valve closed
9/22/2010	9:28:50 PM	Main Vac valve opened
9/22/2010	9:28:50 PM	Bypass valve opened
9/22/2010	9:28:50 PM	Helium MFC set to  0.000000
9/22/2010	9:28:50 PM	H2 MFC set to  0.000000
9/22/2010	9:28:50 PM	BCl3 MFC set to  0.000000
9/22/2010	9:28:50 PM	PHl3 MFC set to  0.000000
9/22/2010	9:28:50 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:28:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:28:50 PM	Tube furnace set to 0
9/22/2010	9:28:51 PM	Run finished at 9:28 PM
9/22/2010	9:28:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	9:31:45 PM	Bypass valve closed
9/22/2010	9:31:46 PM	Main Vac valve closed
9/22/2010	9:32:10 PM	Bypass valve opened
9/22/2010	9:32:11 PM	Main Vac valve opened
9/22/2010	9:32:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	9:32:28 PM	Recipe started at 9:32 PM
9/22/2010	9:32:28 PM	Helium valve closed
9/22/2010	9:32:28 PM	H2 valve closed
9/22/2010	9:32:28 PM	BCl3 valve closed
9/22/2010	9:32:28 PM	PH3 valve closed
9/22/2010	9:32:28 PM	SiCl4 pre valve closed
9/22/2010	9:32:28 PM	SiCl4 post valve closed
9/22/2010	9:32:28 PM	Main Vac valve closed
9/22/2010	9:32:28 PM	Bubbler valve closed
9/22/2010	9:32:28 PM	Bypass valve opened
9/22/2010	9:32:28 PM	Helium MFC set to  0.000000
9/22/2010	9:32:28 PM	H2 MFC set to  0.000000
9/22/2010	9:32:28 PM	BCl3 MFC set to  0.000000
9/22/2010	9:32:28 PM	PHl3 MFC set to  0.000000
9/22/2010	9:32:28 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:32:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:32:28 PM	Tube furnace set to 0
9/22/2010	9:32:28 PM	Helium valve closed
9/22/2010	9:32:28 PM	H2 valve closed
9/22/2010	9:32:28 PM	BCl3 valve closed
9/22/2010	9:32:28 PM	PH3 valve closed
9/22/2010	9:32:28 PM	SiCl4 pre valve closed
9/22/2010	9:32:28 PM	SiCl4 post valve closed
9/22/2010	9:32:28 PM	Bubbler valve closed
9/22/2010	9:32:28 PM	Main Vac valve opened
9/22/2010	9:32:28 PM	Bypass valve opened
9/22/2010	9:32:28 PM	Helium MFC set to  0.000000
9/22/2010	9:32:28 PM	H2 MFC set to  0.000000
9/22/2010	9:32:28 PM	BCl3 MFC set to  0.000000
9/22/2010	9:32:28 PM	PHl3 MFC set to  0.000000
9/22/2010	9:32:28 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:32:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:32:28 PM	Tube furnace set to 0
9/22/2010	9:33:28 PM	H2 valve closed
9/22/2010	9:33:28 PM	BCl3 valve closed
9/22/2010	9:33:28 PM	PH3 valve closed
9/22/2010	9:33:28 PM	SiCl4 pre valve closed
9/22/2010	9:33:28 PM	SiCl4 post valve closed
9/22/2010	9:33:28 PM	Bubbler valve closed
9/22/2010	9:33:28 PM	Helium valve opened
9/22/2010	9:33:28 PM	Main Vac valve opened
9/22/2010	9:33:28 PM	Bypass valve opened
9/22/2010	9:33:28 PM	Helium MFC set to  100.000000
9/22/2010	9:33:29 PM	H2 MFC set to  0.000000
9/22/2010	9:33:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:33:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:33:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:33:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:33:29 PM	Tube furnace set to 0
9/22/2010	9:34:29 PM	Helium valve closed
9/22/2010	9:34:29 PM	H2 valve closed
9/22/2010	9:34:29 PM	BCl3 valve closed
9/22/2010	9:34:29 PM	PH3 valve closed
9/22/2010	9:34:29 PM	SiCl4 pre valve closed
9/22/2010	9:34:29 PM	SiCl4 post valve closed
9/22/2010	9:34:29 PM	Bubbler valve closed
9/22/2010	9:34:29 PM	Main Vac valve opened
9/22/2010	9:34:29 PM	Bypass valve opened
9/22/2010	9:34:29 PM	Helium MFC set to  0.000000
9/22/2010	9:34:29 PM	H2 MFC set to  0.000000
9/22/2010	9:34:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:34:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:34:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:34:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:34:29 PM	Tube furnace set to 0
9/22/2010	9:35:29 PM	H2 valve closed
9/22/2010	9:35:29 PM	BCl3 valve closed
9/22/2010	9:35:29 PM	PH3 valve closed
9/22/2010	9:35:29 PM	SiCl4 pre valve closed
9/22/2010	9:35:29 PM	SiCl4 post valve closed
9/22/2010	9:35:29 PM	Bubbler valve closed
9/22/2010	9:35:29 PM	Helium valve opened
9/22/2010	9:35:29 PM	Main Vac valve opened
9/22/2010	9:35:29 PM	Bypass valve opened
9/22/2010	9:35:29 PM	Helium MFC set to  100.000000
9/22/2010	9:35:29 PM	H2 MFC set to  0.000000
9/22/2010	9:35:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:35:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:35:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:35:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:35:29 PM	Tube furnace set to 0
9/22/2010	9:36:29 PM	Helium valve closed
9/22/2010	9:36:29 PM	H2 valve closed
9/22/2010	9:36:29 PM	BCl3 valve closed
9/22/2010	9:36:29 PM	PH3 valve closed
9/22/2010	9:36:29 PM	SiCl4 pre valve closed
9/22/2010	9:36:29 PM	SiCl4 post valve closed
9/22/2010	9:36:29 PM	Bubbler valve closed
9/22/2010	9:36:29 PM	Main Vac valve opened
9/22/2010	9:36:29 PM	Bypass valve opened
9/22/2010	9:36:29 PM	Helium MFC set to  0.000000
9/22/2010	9:36:29 PM	H2 MFC set to  0.000000
9/22/2010	9:36:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:36:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:36:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:36:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:36:29 PM	Tube furnace set to 0
9/22/2010	9:37:29 PM	H2 valve closed
9/22/2010	9:37:29 PM	BCl3 valve closed
9/22/2010	9:37:29 PM	PH3 valve closed
9/22/2010	9:37:29 PM	SiCl4 pre valve closed
9/22/2010	9:37:29 PM	SiCl4 post valve closed
9/22/2010	9:37:29 PM	Bubbler valve closed
9/22/2010	9:37:29 PM	Helium valve opened
9/22/2010	9:37:29 PM	Main Vac valve opened
9/22/2010	9:37:29 PM	Bypass valve opened
9/22/2010	9:37:29 PM	Helium MFC set to  100.000000
9/22/2010	9:37:29 PM	H2 MFC set to  0.000000
9/22/2010	9:37:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:37:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:37:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:37:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:37:29 PM	Tube furnace set to 0
9/22/2010	9:38:29 PM	Helium valve closed
9/22/2010	9:38:29 PM	H2 valve closed
9/22/2010	9:38:29 PM	BCl3 valve closed
9/22/2010	9:38:29 PM	PH3 valve closed
9/22/2010	9:38:29 PM	SiCl4 pre valve closed
9/22/2010	9:38:29 PM	SiCl4 post valve closed
9/22/2010	9:38:29 PM	Bubbler valve closed
9/22/2010	9:38:29 PM	Main Vac valve opened
9/22/2010	9:38:29 PM	Bypass valve opened
9/22/2010	9:38:29 PM	Helium MFC set to  0.000000
9/22/2010	9:38:29 PM	H2 MFC set to  0.000000
9/22/2010	9:38:29 PM	BCl3 MFC set to  0.000000
9/22/2010	9:38:29 PM	PHl3 MFC set to  0.000000
9/22/2010	9:38:29 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:38:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:38:30 PM	Tube furnace set to 0
9/22/2010	9:39:30 PM	H2 valve closed
9/22/2010	9:39:30 PM	BCl3 valve closed
9/22/2010	9:39:30 PM	PH3 valve closed
9/22/2010	9:39:30 PM	SiCl4 pre valve closed
9/22/2010	9:39:30 PM	SiCl4 post valve closed
9/22/2010	9:39:30 PM	Bubbler valve closed
9/22/2010	9:39:30 PM	Helium valve opened
9/22/2010	9:39:30 PM	Main Vac valve opened
9/22/2010	9:39:30 PM	Bypass valve opened
9/22/2010	9:39:30 PM	Helium MFC set to  100.000000
9/22/2010	9:39:30 PM	H2 MFC set to  0.000000
9/22/2010	9:39:30 PM	BCl3 MFC set to  0.000000
9/22/2010	9:39:30 PM	PHl3 MFC set to  0.000000
9/22/2010	9:39:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:39:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:39:30 PM	Tube furnace set to 0
9/22/2010	9:40:30 PM	Helium valve closed
9/22/2010	9:40:30 PM	H2 valve closed
9/22/2010	9:40:30 PM	BCl3 valve closed
9/22/2010	9:40:30 PM	PH3 valve closed
9/22/2010	9:40:30 PM	SiCl4 pre valve closed
9/22/2010	9:40:30 PM	SiCl4 post valve closed
9/22/2010	9:40:30 PM	Bubbler valve closed
9/22/2010	9:40:30 PM	Main Vac valve opened
9/22/2010	9:40:30 PM	Bypass valve opened
9/22/2010	9:40:30 PM	Helium MFC set to  0.000000
9/22/2010	9:40:30 PM	H2 MFC set to  0.000000
9/22/2010	9:40:30 PM	BCl3 MFC set to  0.000000
9/22/2010	9:40:30 PM	PHl3 MFC set to  0.000000
9/22/2010	9:40:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:40:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:40:30 PM	Tube furnace set to 0
9/22/2010	9:41:30 PM	H2 valve closed
9/22/2010	9:41:30 PM	BCl3 valve closed
9/22/2010	9:41:30 PM	PH3 valve closed
9/22/2010	9:41:30 PM	SiCl4 pre valve closed
9/22/2010	9:41:30 PM	SiCl4 post valve closed
9/22/2010	9:41:30 PM	Bubbler valve closed
9/22/2010	9:41:30 PM	Helium valve opened
9/22/2010	9:41:30 PM	Main Vac valve opened
9/22/2010	9:41:30 PM	Bypass valve opened
9/22/2010	9:41:30 PM	Helium MFC set to  100.000000
9/22/2010	9:41:30 PM	H2 MFC set to  0.000000
9/22/2010	9:41:30 PM	BCl3 MFC set to  0.000000
9/22/2010	9:41:30 PM	PHl3 MFC set to  0.000000
9/22/2010	9:41:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:41:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:41:30 PM	Tube furnace set to 0
9/22/2010	9:42:30 PM	Helium valve closed
9/22/2010	9:42:30 PM	H2 valve closed
9/22/2010	9:42:30 PM	BCl3 valve closed
9/22/2010	9:42:30 PM	PH3 valve closed
9/22/2010	9:42:30 PM	SiCl4 pre valve closed
9/22/2010	9:42:30 PM	SiCl4 post valve closed
9/22/2010	9:42:30 PM	Bubbler valve closed
9/22/2010	9:42:30 PM	Main Vac valve opened
9/22/2010	9:42:30 PM	Bypass valve opened
9/22/2010	9:42:30 PM	Helium MFC set to  0.000000
9/22/2010	9:42:30 PM	H2 MFC set to  0.000000
9/22/2010	9:42:30 PM	BCl3 MFC set to  0.000000
9/22/2010	9:42:30 PM	PHl3 MFC set to  0.000000
9/22/2010	9:42:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:42:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:42:30 PM	Tube furnace set to 0
9/22/2010	9:43:30 PM	H2 valve closed
9/22/2010	9:43:30 PM	BCl3 valve closed
9/22/2010	9:43:30 PM	PH3 valve closed
9/22/2010	9:43:30 PM	SiCl4 pre valve closed
9/22/2010	9:43:30 PM	SiCl4 post valve closed
9/22/2010	9:43:30 PM	Bubbler valve closed
9/22/2010	9:43:30 PM	Helium valve opened
9/22/2010	9:43:30 PM	Main Vac valve opened
9/22/2010	9:43:30 PM	Bypass valve opened
9/22/2010	9:43:30 PM	Helium MFC set to  100.000000
9/22/2010	9:43:30 PM	H2 MFC set to  0.000000
9/22/2010	9:43:30 PM	BCl3 MFC set to  0.000000
9/22/2010	9:43:30 PM	PHl3 MFC set to  0.000000
9/22/2010	9:43:30 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:43:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:43:31 PM	Tube furnace set to 0
9/22/2010	9:44:31 PM	Helium valve closed
9/22/2010	9:44:31 PM	H2 valve closed
9/22/2010	9:44:31 PM	BCl3 valve closed
9/22/2010	9:44:31 PM	PH3 valve closed
9/22/2010	9:44:31 PM	SiCl4 pre valve closed
9/22/2010	9:44:31 PM	SiCl4 post valve closed
9/22/2010	9:44:31 PM	Bubbler valve closed
9/22/2010	9:44:31 PM	Main Vac valve opened
9/22/2010	9:44:31 PM	Bypass valve opened
9/22/2010	9:44:31 PM	Helium MFC set to  0.000000
9/22/2010	9:44:31 PM	H2 MFC set to  0.000000
9/22/2010	9:44:31 PM	BCl3 MFC set to  0.000000
9/22/2010	9:44:31 PM	PHl3 MFC set to  0.000000
9/22/2010	9:44:31 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:44:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:44:31 PM	Tube furnace set to 0
9/22/2010	9:45:31 PM	H2 valve closed
9/22/2010	9:45:31 PM	BCl3 valve closed
9/22/2010	9:45:31 PM	PH3 valve closed
9/22/2010	9:45:31 PM	SiCl4 pre valve closed
9/22/2010	9:45:31 PM	SiCl4 post valve closed
9/22/2010	9:45:31 PM	Bubbler valve closed
9/22/2010	9:45:31 PM	Helium valve opened
9/22/2010	9:45:31 PM	Main Vac valve opened
9/22/2010	9:45:31 PM	Bypass valve opened
9/22/2010	9:45:31 PM	Helium MFC set to  100.000000
9/22/2010	9:45:31 PM	H2 MFC set to  0.000000
9/22/2010	9:45:31 PM	BCl3 MFC set to  0.000000
9/22/2010	9:45:31 PM	PHl3 MFC set to  0.000000
9/22/2010	9:45:31 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:45:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:45:31 PM	Tube furnace set to 0
9/22/2010	9:46:31 PM	Helium valve closed
9/22/2010	9:46:31 PM	H2 valve closed
9/22/2010	9:46:31 PM	BCl3 valve closed
9/22/2010	9:46:31 PM	PH3 valve closed
9/22/2010	9:46:31 PM	SiCl4 pre valve closed
9/22/2010	9:46:31 PM	SiCl4 post valve closed
9/22/2010	9:46:31 PM	Bubbler valve closed
9/22/2010	9:46:31 PM	Main Vac valve opened
9/22/2010	9:46:31 PM	Bypass valve opened
9/22/2010	9:46:31 PM	Helium MFC set to  0.000000
9/22/2010	9:46:31 PM	H2 MFC set to  0.000000
9/22/2010	9:46:31 PM	BCl3 MFC set to  0.000000
9/22/2010	9:46:31 PM	PHl3 MFC set to  0.000000
9/22/2010	9:46:31 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:46:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:46:31 PM	Tube furnace set to 0
9/22/2010	9:47:31 PM	H2 valve closed
9/22/2010	9:47:31 PM	BCl3 valve closed
9/22/2010	9:47:31 PM	PH3 valve closed
9/22/2010	9:47:31 PM	SiCl4 pre valve closed
9/22/2010	9:47:31 PM	SiCl4 post valve closed
9/22/2010	9:47:31 PM	Bubbler valve closed
9/22/2010	9:47:31 PM	Helium valve opened
9/22/2010	9:47:31 PM	Main Vac valve opened
9/22/2010	9:47:31 PM	Bypass valve opened
9/22/2010	9:47:31 PM	Helium MFC set to  100.000000
9/22/2010	9:47:31 PM	H2 MFC set to  0.000000
9/22/2010	9:47:31 PM	BCl3 MFC set to  0.000000
9/22/2010	9:47:31 PM	PHl3 MFC set to  0.000000
9/22/2010	9:47:31 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:47:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:47:31 PM	Tube furnace set to 0
9/22/2010	9:48:31 PM	Helium valve closed
9/22/2010	9:48:31 PM	H2 valve closed
9/22/2010	9:48:31 PM	BCl3 valve closed
9/22/2010	9:48:31 PM	PH3 valve closed
9/22/2010	9:48:31 PM	SiCl4 pre valve closed
9/22/2010	9:48:31 PM	SiCl4 post valve closed
9/22/2010	9:48:31 PM	Bubbler valve closed
9/22/2010	9:48:31 PM	Main Vac valve opened
9/22/2010	9:48:31 PM	Bypass valve opened
9/22/2010	9:48:31 PM	Helium MFC set to  0.000000
9/22/2010	9:48:31 PM	H2 MFC set to  0.000000
9/22/2010	9:48:31 PM	BCl3 MFC set to  0.000000
9/22/2010	9:48:31 PM	PHl3 MFC set to  0.000000
9/22/2010	9:48:31 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:48:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:48:32 PM	Tube furnace set to 0
9/22/2010	9:49:32 PM	H2 valve closed
9/22/2010	9:49:32 PM	BCl3 valve closed
9/22/2010	9:49:32 PM	PH3 valve closed
9/22/2010	9:49:32 PM	SiCl4 pre valve closed
9/22/2010	9:49:32 PM	SiCl4 post valve closed
9/22/2010	9:49:32 PM	Bubbler valve closed
9/22/2010	9:49:32 PM	Helium valve opened
9/22/2010	9:49:32 PM	Main Vac valve opened
9/22/2010	9:49:32 PM	Bypass valve opened
9/22/2010	9:49:32 PM	Helium MFC set to  100.000000
9/22/2010	9:49:32 PM	H2 MFC set to  0.000000
9/22/2010	9:49:32 PM	BCl3 MFC set to  0.000000
9/22/2010	9:49:32 PM	PHl3 MFC set to  0.000000
9/22/2010	9:49:32 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:49:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:49:32 PM	Tube furnace set to 0
9/22/2010	9:50:32 PM	Helium valve closed
9/22/2010	9:50:32 PM	H2 valve closed
9/22/2010	9:50:32 PM	BCl3 valve closed
9/22/2010	9:50:32 PM	PH3 valve closed
9/22/2010	9:50:32 PM	SiCl4 pre valve closed
9/22/2010	9:50:32 PM	SiCl4 post valve closed
9/22/2010	9:50:32 PM	Bubbler valve closed
9/22/2010	9:50:32 PM	Main Vac valve opened
9/22/2010	9:50:32 PM	Bypass valve opened
9/22/2010	9:50:32 PM	Helium MFC set to  0.000000
9/22/2010	9:50:32 PM	H2 MFC set to  0.000000
9/22/2010	9:50:32 PM	BCl3 MFC set to  0.000000
9/22/2010	9:50:32 PM	PHl3 MFC set to  0.000000
9/22/2010	9:50:32 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:50:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:50:32 PM	Tube furnace set to 0
9/22/2010	9:51:32 PM	H2 valve closed
9/22/2010	9:51:32 PM	BCl3 valve closed
9/22/2010	9:51:32 PM	PH3 valve closed
9/22/2010	9:51:32 PM	SiCl4 pre valve closed
9/22/2010	9:51:32 PM	SiCl4 post valve closed
9/22/2010	9:51:32 PM	Bubbler valve closed
9/22/2010	9:51:32 PM	Helium valve opened
9/22/2010	9:51:32 PM	Main Vac valve opened
9/22/2010	9:51:32 PM	Bypass valve opened
9/22/2010	9:51:32 PM	Helium MFC set to  100.000000
9/22/2010	9:51:32 PM	H2 MFC set to  0.000000
9/22/2010	9:51:32 PM	BCl3 MFC set to  0.000000
9/22/2010	9:51:32 PM	PHl3 MFC set to  0.000000
9/22/2010	9:51:32 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:51:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:51:32 PM	Tube furnace set to 0
9/22/2010	9:52:32 PM	Helium valve closed
9/22/2010	9:52:32 PM	H2 valve closed
9/22/2010	9:52:32 PM	BCl3 valve closed
9/22/2010	9:52:32 PM	PH3 valve closed
9/22/2010	9:52:32 PM	SiCl4 pre valve closed
9/22/2010	9:52:32 PM	SiCl4 post valve closed
9/22/2010	9:52:32 PM	Bubbler valve closed
9/22/2010	9:52:32 PM	Main Vac valve opened
9/22/2010	9:52:32 PM	Bypass valve opened
9/22/2010	9:52:32 PM	Helium MFC set to  0.000000
9/22/2010	9:52:32 PM	H2 MFC set to  0.000000
9/22/2010	9:52:32 PM	BCl3 MFC set to  0.000000
9/22/2010	9:52:32 PM	PHl3 MFC set to  0.000000
9/22/2010	9:52:32 PM	SiCl4 MFC set to  0.000000
9/22/2010	9:52:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	9:52:32 PM	Tube furnace set to 0
9/22/2010	9:52:33 PM	Run finished at 9:52 PM
9/22/2010	9:52:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/22/2010	10:09:19 PM	Recipe started at 10:09 PM
9/22/2010	10:09:19 PM	Helium valve closed
9/22/2010	10:09:19 PM	BCl3 valve closed
9/22/2010	10:09:19 PM	PH3 valve closed
9/22/2010	10:09:19 PM	SiCl4 pre valve closed
9/22/2010	10:09:19 PM	SiCl4 post valve closed
9/22/2010	10:09:19 PM	Main Vac valve closed
9/22/2010	10:09:19 PM	Bypass valve closed
9/22/2010	10:09:19 PM	Bubbler valve closed
9/22/2010	10:09:19 PM	H2 valve opened
9/22/2010	10:09:19 PM	Helium MFC set to  0.000000
9/22/2010	10:09:19 PM	H2 MFC set to  500.000000
9/22/2010	10:09:19 PM	BCl3 MFC set to  0.000000
9/22/2010	10:09:19 PM	PHl3 MFC set to  0.000000
9/22/2010	10:09:19 PM	SiCl4 MFC set to  0.000000
9/22/2010	10:09:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:09:19 PM	Tube furnace set to 0
9/22/2010	10:10:38 PM	Helium valve closed
9/22/2010	10:10:38 PM	BCl3 valve closed
9/22/2010	10:10:38 PM	PH3 valve closed
9/22/2010	10:10:38 PM	SiCl4 pre valve closed
9/22/2010	10:10:38 PM	SiCl4 post valve closed
9/22/2010	10:10:38 PM	Main Vac valve closed
9/22/2010	10:10:38 PM	Bypass valve closed
9/22/2010	10:10:38 PM	H2 valve opened
9/22/2010	10:10:38 PM	Bubbler valve opened
9/22/2010	10:10:38 PM	Helium MFC set to  0.000000
9/22/2010	10:10:38 PM	H2 MFC set to  500.000000
9/22/2010	10:10:38 PM	BCl3 MFC set to  0.000000
9/22/2010	10:10:38 PM	PHl3 MFC set to  0.000000
9/22/2010	10:10:38 PM	SiCl4 MFC set to  0.000000
9/22/2010	10:10:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:10:38 PM	Tube furnace set to 1000
9/22/2010	10:30:38 PM	Helium valve closed
9/22/2010	10:30:38 PM	BCl3 valve closed
9/22/2010	10:30:38 PM	Main Vac valve closed
9/22/2010	10:30:38 PM	Bypass valve closed
9/22/2010	10:30:38 PM	H2 valve opened
9/22/2010	10:30:38 PM	PH3 valve opened
9/22/2010	10:30:38 PM	SiCl4 pre valve opened
9/22/2010	10:30:38 PM	SiCl4 post valve opened
9/22/2010	10:30:38 PM	Bubbler valve opened
9/22/2010	10:30:38 PM	Helium MFC set to  0.000000
9/22/2010	10:30:38 PM	H2 MFC set to  500.000000
9/22/2010	10:30:38 PM	BCl3 MFC set to  0.000000
9/22/2010	10:30:38 PM	PHl3 MFC set to  0.200000
9/22/2010	10:30:38 PM	SiCl4 MFC set to  50.000000
9/22/2010	10:30:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:30:38 PM	Tube furnace set to 1000
9/22/2010	10:50:39 PM	H2 valve closed
9/22/2010	10:50:39 PM	BCl3 valve closed
9/22/2010	10:50:39 PM	PH3 valve closed
9/22/2010	10:50:39 PM	SiCl4 pre valve closed
9/22/2010	10:50:39 PM	SiCl4 post valve closed
9/22/2010	10:50:39 PM	Main Vac valve closed
9/22/2010	10:50:39 PM	Bypass valve closed
9/22/2010	10:50:39 PM	Helium valve opened
9/22/2010	10:50:39 PM	Bubbler valve opened
9/22/2010	10:50:39 PM	Helium MFC set to  500.000000
9/22/2010	10:50:39 PM	H2 MFC set to  0.000000
9/22/2010	10:50:39 PM	BCl3 MFC set to  0.000000
9/22/2010	10:50:39 PM	PHl3 MFC set to  0.000000
9/22/2010	10:50:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	10:50:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	10:50:39 PM	Tube furnace set to 0
9/22/2010	11:10:39 PM	Helium valve closed
9/22/2010	11:10:39 PM	H2 valve closed
9/22/2010	11:10:39 PM	BCl3 valve closed
9/22/2010	11:10:39 PM	PH3 valve closed
9/22/2010	11:10:39 PM	SiCl4 pre valve closed
9/22/2010	11:10:39 PM	SiCl4 post valve closed
9/22/2010	11:10:39 PM	Main Vac valve closed
9/22/2010	11:10:39 PM	Bypass valve closed
9/22/2010	11:10:39 PM	Bubbler valve closed
9/22/2010	11:10:39 PM	Helium MFC set to  0.000000
9/22/2010	11:10:39 PM	H2 MFC set to  0.000000
9/22/2010	11:10:39 PM	BCl3 MFC set to  0.000000
9/22/2010	11:10:39 PM	PHl3 MFC set to  0.000000
9/22/2010	11:10:39 PM	SiCl4 MFC set to  0.000000
9/22/2010	11:10:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:10:39 PM	Tube furnace set to 0
9/22/2010	11:10:39 PM	Run finished at 11:10 PM
9/22/2010	11:28:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	11:28:13 PM	Recipe started at 11:28 PM
9/22/2010	11:28:13 PM	Helium valve closed
9/22/2010	11:28:13 PM	H2 valve closed
9/22/2010	11:28:13 PM	BCl3 valve closed
9/22/2010	11:28:13 PM	PH3 valve closed
9/22/2010	11:28:13 PM	SiCl4 pre valve closed
9/22/2010	11:28:13 PM	SiCl4 post valve closed
9/22/2010	11:28:13 PM	Main Vac valve closed
9/22/2010	11:28:13 PM	Bubbler valve closed
9/22/2010	11:28:13 PM	Bypass valve opened
9/22/2010	11:28:13 PM	Helium MFC set to  0.000000
9/22/2010	11:28:13 PM	H2 MFC set to  0.000000
9/22/2010	11:28:13 PM	BCl3 MFC set to  0.000000
9/22/2010	11:28:13 PM	PHl3 MFC set to  0.000000
9/22/2010	11:28:13 PM	SiCl4 MFC set to  0.000000
9/22/2010	11:28:13 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:28:13 PM	Tube furnace set to 0
9/22/2010	11:28:53 PM	Helium valve closed
9/22/2010	11:28:53 PM	H2 valve closed
9/22/2010	11:28:53 PM	BCl3 valve closed
9/22/2010	11:28:53 PM	PH3 valve closed
9/22/2010	11:28:53 PM	SiCl4 pre valve closed
9/22/2010	11:28:53 PM	SiCl4 post valve closed
9/22/2010	11:28:53 PM	Bubbler valve closed
9/22/2010	11:28:53 PM	Main Vac valve opened
9/22/2010	11:28:53 PM	Bypass valve opened
9/22/2010	11:28:53 PM	Helium MFC set to  0.000000
9/22/2010	11:28:53 PM	H2 MFC set to  0.000000
9/22/2010	11:28:53 PM	BCl3 MFC set to  0.000000
9/22/2010	11:28:53 PM	PHl3 MFC set to  0.000000
9/22/2010	11:28:53 PM	SiCl4 MFC set to  0.000000
9/22/2010	11:28:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2010	11:28:53 PM	Tube furnace set to 0
9/22/2010	11:28:53 PM	Run finished at 11:28 PM
9/22/2010	11:28:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2010	11:29:36 PM	Bypass valve closed
9/22/2010	11:29:37 PM	Main Vac valve closed
9/22/2010	11:30:03 PM	Main Vac valve opened
9/22/2010	11:30:03 PM	Bypass valve opened
9/22/2010	11:40:11 PM	Bypass valve closed
9/22/2010	11:40:12 PM	Main Vac valve closed
9/22/2010	11:40:59 PM	Main Vac valve opened
9/22/2010	11:40:59 PM	Bypass valve opened
